JPS62106238U - - Google Patents

Info

Publication number
JPS62106238U
JPS62106238U JP1985138591U JP13859185U JPS62106238U JP S62106238 U JPS62106238 U JP S62106238U JP 1985138591 U JP1985138591 U JP 1985138591U JP 13859185 U JP13859185 U JP 13859185U JP S62106238 U JPS62106238 U JP S62106238U
Authority
JP
Japan
Prior art keywords
ion beam
mask
nozzle
vacuum container
compound vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985138591U
Other languages
English (en)
Japanese (ja)
Other versions
JPH036914Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985138591U priority Critical patent/JPH036914Y2/ja
Publication of JPS62106238U publication Critical patent/JPS62106238U/ja
Application granted granted Critical
Publication of JPH036914Y2 publication Critical patent/JPH036914Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP1985138591U 1985-09-10 1985-09-10 Expired JPH036914Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985138591U JPH036914Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985138591U JPH036914Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS62106238U true JPS62106238U (enrdf_load_stackoverflow) 1987-07-07
JPH036914Y2 JPH036914Y2 (enrdf_load_stackoverflow) 1991-02-21

Family

ID=31043718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985138591U Expired JPH036914Y2 (enrdf_load_stackoverflow) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH036914Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6414307B1 (en) * 1999-07-09 2002-07-02 Fei Company Method and apparatus for enhancing yield of secondary ions

Also Published As

Publication number Publication date
JPH036914Y2 (enrdf_load_stackoverflow) 1991-02-21

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