JPS62106238U - - Google Patents
Info
- Publication number
- JPS62106238U JPS62106238U JP1985138591U JP13859185U JPS62106238U JP S62106238 U JPS62106238 U JP S62106238U JP 1985138591 U JP1985138591 U JP 1985138591U JP 13859185 U JP13859185 U JP 13859185U JP S62106238 U JPS62106238 U JP S62106238U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- mask
- nozzle
- vacuum container
- compound vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138591U JPH036914Y2 (de) | 1985-09-10 | 1985-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985138591U JPH036914Y2 (de) | 1985-09-10 | 1985-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62106238U true JPS62106238U (de) | 1987-07-07 |
| JPH036914Y2 JPH036914Y2 (de) | 1991-02-21 |
Family
ID=31043718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985138591U Expired JPH036914Y2 (de) | 1985-09-10 | 1985-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036914Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6414307B1 (en) * | 1999-07-09 | 2002-07-02 | Fei Company | Method and apparatus for enhancing yield of secondary ions |
-
1985
- 1985-09-10 JP JP1985138591U patent/JPH036914Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH036914Y2 (de) | 1991-02-21 |
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