JPS62103255U - - Google Patents

Info

Publication number

JPS62103255U

JPS62103255U JP19468485U JP19468485U JPS62103255U JP S62103255 U JPS62103255 U JP S62103255U JP 19468485 U JP19468485 U JP 19468485U JP 19468485 U JP19468485 U JP 19468485U JP S62103255 U JPS62103255 U JP S62103255U

Authority

JP

Japan

Prior art keywords

semiconductor pattern

semiconductor

pad

position detection

prober

Prior art date

1985-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 238000001514 detection method Methods 0.000 claims description 3
• 239000008188 pellet Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)