JPS62103247U - - Google Patents

Info

Publication number

JPS62103247U

JPS62103247U JP19500685U JP19500685U JPS62103247U JP S62103247 U JPS62103247 U JP S62103247U JP 19500685 U JP19500685 U JP 19500685U JP 19500685 U JP19500685 U JP 19500685U JP S62103247 U JPS62103247 U JP S62103247U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

cleaning liquid

onto

coating

fluid

Prior art date

1985-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 7
• 239000011248 coating agent Substances 0.000 claims description 6
• 238000000576 coating method Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 6
• 238000004140 cleaning Methods 0.000 claims description 4
• 239000012530 fluid Substances 0.000 claims description 4
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 239000000463 material Substances 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1