JPS62102883U - - Google Patents
Info
- Publication number
- JPS62102883U JPS62102883U JP1985196330U JP19633085U JPS62102883U JP S62102883 U JPS62102883 U JP S62102883U JP 1985196330 U JP1985196330 U JP 1985196330U JP 19633085 U JP19633085 U JP 19633085U JP S62102883 U JPS62102883 U JP S62102883U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- negative pressure
- vacuum pump
- control circuit
- pump body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Ac Motors In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196330U JPS62102883U (fr) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985196330U JPS62102883U (fr) | 1985-12-20 | 1985-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62102883U true JPS62102883U (fr) | 1987-06-30 |
Family
ID=31155054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985196330U Pending JPS62102883U (fr) | 1985-12-20 | 1985-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62102883U (fr) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003078838A1 (fr) * | 2002-03-20 | 2003-09-25 | Ricoh Company, Ltd. | Dispositif de regulation de pompe a vide, et dispositif sous vide |
| JP2005256845A (ja) * | 1999-11-17 | 2005-09-22 | Nabtesco Corp | 真空排気装置 |
| JP2007263122A (ja) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | 真空排気装置 |
| JP2007263121A (ja) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | 真空排気装置 |
| JP2007298043A (ja) * | 1999-11-17 | 2007-11-15 | Nabtesco Corp | 真空排気装置 |
| JP2009127528A (ja) * | 2007-11-22 | 2009-06-11 | Kobe Steel Ltd | 低騒音型液冷式圧縮機 |
-
1985
- 1985-12-20 JP JP1985196330U patent/JPS62102883U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005256845A (ja) * | 1999-11-17 | 2005-09-22 | Nabtesco Corp | 真空排気装置 |
| JP2007263122A (ja) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | 真空排気装置 |
| JP2007263121A (ja) * | 1999-11-17 | 2007-10-11 | Nabtesco Corp | 真空排気装置 |
| JP2007298043A (ja) * | 1999-11-17 | 2007-11-15 | Nabtesco Corp | 真空排気装置 |
| WO2003078838A1 (fr) * | 2002-03-20 | 2003-09-25 | Ricoh Company, Ltd. | Dispositif de regulation de pompe a vide, et dispositif sous vide |
| JP2009127528A (ja) * | 2007-11-22 | 2009-06-11 | Kobe Steel Ltd | 低騒音型液冷式圧縮機 |