JPS62102526A - Exposing apparatus - Google Patents

Abstract

PURPOSE:To reduce the number of cables between an XY stage and an exposing unit body by detecting the presence or the state of a semiconductor wafer on the stage to emit a light emitting diode connected with a solar battery. CONSTITUTION:A semiconductor wafer 12 is placed on a wafer chuck 13 on an XY stage having an X stage 4X and a Y stage 4Y, attracted and held by the chuck 13. When a detecting element for detecting the presence or the stage of an element to be detected detects the wafer 12, a detecting element connects light emitting diodes 3X, 3Y with a battery 2 connected with a solar battery 1. A detector provided at an exposing apparatus body receives lights from the diodes 3X, 3Y to control the related elements of the body.

Description

[Detailed Description of the Invention] [Field of the Invention] The present invention relates to an exposure apparatus used to print a circuit pattern on a semiconductor wafer, and in particular to an exposure apparatus for properly setting mechanical and optical specifications related to projection exposure. This is related to improvements to the inspection and confirmation mechanism.

[Background of the Invention] There are various types of exposure methods for printing circuit patterns on semiconductor wafers.They can be roughly divided into close exposure methods, in which a mask and semiconductor wafer are placed close to each other for projection exposure at the same magnification, and methods that use mirrors to create special shapes. There are two types of exposure methods: the mirror projection method, which creates a light beam and sweeps it for exposure, and the reduction projection exposure method, which uses a lens to reduce the circuit pattern and expose it by projection. In the operation of these exposure devices, the presence or absence of a semiconductor wafer, the suitability of the size of the semiconductor wafer chuck (whether a semiconductor wafer chuck of an appropriate size is selected for the size of the semiconductor wafer to be exposed), Semiconductor wafer delivery position H (
θ, x, y, z>, focusing, shielding masking position, objective lens position, etc., and confirm that they are set properly before projection exposure. Must be. An inspection confirmation mechanism for this purpose is provided on the XY stage and is connected to the main body of the apparatus by a cable. However, since there are many items to be inspected and confirmed, the number of communication cables increases accordingly, which adversely affects the positioning, positional accuracy, and posture accuracy of the XY stage.

OBJECTS OF THE INVENTION] An object of the present invention is to provide an exposure apparatus that eliminates communication cables between the XY stage and the main body of the apparatus to ensure smooth movement and positioning accuracy of the XY stage.

This objective is achieved by utilizing optical communications according to the invention. That is, an XY stage is provided with a solar cell, a battery connected to the solar cell, a light emitting diode, and means for connecting the light emitting diode to the battery in response to detection of the presence or state of an object to be detected,
The above object is achieved by providing a detector in the main body of the device that receives optical communication from the light emitting diode.

[Embodiment] FIG. 1 is a perspective view of an XY stage in an embodiment of an exposure apparatus of the present invention, and FIG. 2 is a schematic diagram showing the relationship between the xY stage and the main body of the exposure apparatus of the present invention.

In the figure, 1 is a solar cell, 2 is a battery connected to this solar cell, 3X and 3Y are light emitting diodes, and 4X is an X
stage, 4Y is a Y stage, 5 is a detector, 6 is a detection element that detects the presence or state of an object to be detected, 7 is a base surface plate, 8 is an L-shaped mirror, 9 is a DC motor for driving in the X direction, 10 is Y 11 is a Y-direction drive feed screw, 12 is a semiconductor wafer, and 13 is a wafer chuck.

Explain the operation. After the semiconductor wafer has been subjected to exposure processing, the semiconductor wafer is removed from the XY stage, and a new semiconductor wafer to be processed next is carried onto the XY stage at the delivery position and placed on a wafer chuck. The wafer chuck holds a semiconductor wafer by suction.

When the processed semiconductor wafer is removed from the XY stage,
The XY stage is moved until the solar cell 1 on the stage is positioned directly below a projection lens (not shown), and the shutter is opened to allow the solar cell 1 to receive light and charge it. Before a new semiconductor wafer 12 is transferred, the XY stage returns to the transfer position and receives the new semiconductor wafer 12 onto the wafer chuck 13. In this way, since the solar cell 1 is charged using the time after the processed semiconductor wafer is removed and before the new semiconductor wafer is placed, there is no need to spend any extra time on charging. This solar cell 1 is connected to a battery 2. The battery 2 is used as a power source for the light emitting diodes 3X, 3Y and their associated circuits.

In the case of semiconductor wafer detection, a circuit including a mechanical switch, a photoelectric switch, a proximity switch, etc. is used as the detection element 6. When this detection element detects the semiconductor wafer 12, its attached circuit connects the battery 2 with the light emitting diode 4.
Connect X and 4Y to energize the light emitting diode and cause it to emit light. A detector 5 provided in the main body of the device receives optical communication from this light emitting diode, and controls related elements of the main body of the device accordingly.

In this embodiment, light emitting diodes 3X and 3Y are installed at one corner of the X stage 4x at positions that send out light in the X and Y directions, and each detector 5, for example, a photoelectric sensor, is installed in these directions. An element is provided in the main body of the device.

Although the same number of light emitting diodes and detectors as the detection elements for detecting the presence or state of the object to be detected may be provided,
If a central processing unit is provided that encodes a detection signal from a detection element that detects the presence or state of an object to be detected, and the encoded optical signal is sent, one light emitting diode and one detector are sufficient.

[Effects of the Invention] According to the present invention, it is possible to eliminate the communication cable between the XY stage and the main body of the apparatus, and thereby the movement of the XY stage becomes smooth and the positioning accuracy is improved.

[Brief explanation of drawings]

FIG. 1 is a perspective view of an XY stage of an embodiment of the exposure apparatus of the present invention. FIG. 2 shows the relationship between the XY stage and the main body of the exposure apparatus of the present invention. In the figure: solar cell, 2: battery, 3x; 3Y: light-emitting tie, 4x = 4Y: x stage. Y stage, 5: detector, 6: detection element. Figure 1 MN2 diagram

Claims (1)

[Claims] 1. A solar cell, a battery connected to the solar cell, a light emitting diode, and means for connecting the light emitting diode to the battery in response to detection of the presence or state of an object to be detected. An exposure apparatus comprising: an XY stage provided with; and an apparatus main body provided with a detector receiving optical communication from the light emitting diode. 2. The exposure apparatus according to claim 1, which is provided with the same number of light emitting diodes and detectors as the number of detection elements that detect the presence or state of the object to be detected. 3. The above-mentioned means includes a central processing unit that encodes a detection signal from a detection element for detecting the presence or state of an object to be detected, and the above-mentioned light emitting diode and at least one detector are each provided. Exposure apparatus according to scope 1. 4. The exposure apparatus according to claim 1, 2 or 3, wherein the light emitting diode is provided one each in the X direction and the Y direction. 5. Claims 1 and 2, wherein the solar cell is placed on the XY stage so that it is placed in a position where it receives light from the projection lens of the apparatus main body as the XY stage moves. , 3 or 4. The exposure apparatus according to item 3 or 4.