JPS62102416A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPS62102416A
JPS62102416A JP24188685A JP24188685A JPS62102416A JP S62102416 A JPS62102416 A JP S62102416A JP 24188685 A JP24188685 A JP 24188685A JP 24188685 A JP24188685 A JP 24188685A JP S62102416 A JPS62102416 A JP S62102416A
Authority
JP
Japan
Prior art keywords
magnetic
projections
recording medium
magnetic recording
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24188685A
Other languages
Japanese (ja)
Inventor
Kazunobu Chiba
千葉 一信
Yutaka Okazaki
裕 岡崎
Seiichi Ogata
小形 誠一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP24188685A priority Critical patent/JPS62102416A/en
Publication of JPS62102416A publication Critical patent/JPS62102416A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a magnetic recording medium having excellent magnetic characteristics and excellent durability by forming plural layers of thin ferromagnetic metallic films on a nonmagnetic base having micro-projections on the surface. CONSTITUTION:>=1 kinds of projections such as peak-shaped projections, wrinkle-shaped projections or granular projections are formed as projections 3 on the surface of a substrate 1 and the surface roughness thereof is preliminarily controlled in the stage of forming a magnetic recording medium of plural layers of the thin ferromagnetic metallic film type formed as the magnetic layer on the substrate 1 consisting of a nonmagnetic material. The peak-shaped projections are formed by internally adding pulverized inorg. particles of calcium carbonate, silica, alumina, etc. in the stage of forming a high-polymer film. The wrinkle-shaped projections are formed by coating a dilute soln. of a resin, for which, for example, a specific solvent mixture is used, on the substrate and drying the coating. The surface characteristic of the thin ferromagnetic metallic films is thereby controlled and the runnability and durability are improved. Excellent characteristics are thus obtd. in the magnetic characteristics and electromagnetic conversion characteristic.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、真空蒸着法により基体」二に強磁性薄膜を磁
性層として形成してなる、いわゆる強磁性金属薄膜型の
磁気記録媒体に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a so-called ferromagnetic metal thin film type magnetic recording medium in which a ferromagnetic thin film is formed as a magnetic layer on a substrate by a vacuum evaporation method. It is.

〔発明の概要〕[Summary of the invention]

本発明は、表面に微小突起を有する非磁性支持体上に複
数層の強磁性金属薄膜を形成することにより、 磁気特性に優れるとともに、耐久性にも優れる磁気記録
媒体を提供しようとするものである。
The present invention aims to provide a magnetic recording medium with excellent magnetic properties and durability by forming multiple layers of ferromagnetic metal thin films on a non-magnetic support having microprotrusions on the surface. be.

〔従来の技術〕[Conventional technology]

従来より磁気記録媒体としては、非磁性材料よりなる基
体上にγ−Fe20=、Coを含有するγ−F8203
1F13304.Coを含有するPe5o、、 ’r 
 FezO3とFe3O4のへルトライド化合物+ C
oを含有するヘルドライド化合物、 Cr[1□等の酸
化物磁性粉末、あるいはPe、Co。
Conventionally, as a magnetic recording medium, γ-F8203 containing γ-Fe20= and Co on a substrate made of a non-magnetic material has been used.
1F13304. Pe5o containing Co,,'r
Hertolide compound of FezO3 and Fe3O4 + C
Heldride compound containing o, oxide magnetic powder such as Cr[1□, or Pe, Co.

Ni等を主成分とする合金磁性粉末等の粉末磁性材料を
、塩化ビニル−酢酸ビニル系共重合体、ポリエステル樹
脂1ポリウレタン樹脂等の有機バインダ中に分散セしめ
、塗布、乾燥させて磁性層を形成した、いわゆる塗布型
の磁気記録媒体が広く用いられてきている。
A magnetic layer is formed by dispersing a powder magnetic material such as an alloy magnetic powder containing Ni etc. as a main component in an organic binder such as vinyl chloride-vinyl acetate copolymer, polyester resin 1 polyurethane resin, coating, and drying. So-called coated magnetic recording media have been widely used.

また、一方では、高密度磁気記録への要求の高まりと共
に、基体上に強磁性金属iN膜を真空蒸着法、スパッタ
リング法、イオンブレーティング法等の真空薄膜形成技
術やメッキ法等の手法を用いて直接被着形成した強磁性
金属薄膜型の磁気記録媒体が注目を集めている。この種
の磁気記録媒体は、抗磁力Heや残留磁束密度Brが大
きいばかりでなり、磁性層の厚みを極めて薄くすること
が可能であるため記録M ’61’tや再生時の厚み損
失が著しく小さいこと、磁性層中に非6(i外材である
有機バインダを混入する必要がないためiri M、材
料の充填密度を飛躍的に高めることができること等、数
々の利点を有している。
On the other hand, with the increasing demand for high-density magnetic recording, ferromagnetic metal iN films are being formed on substrates using vacuum thin film formation techniques such as vacuum evaporation, sputtering, and ion blating, and techniques such as plating. ferromagnetic metal thin film type magnetic recording media that are directly deposited using magnetic materials are attracting attention. This type of magnetic recording medium has large coercive force He and residual magnetic flux density Br, and the thickness of the magnetic layer can be made extremely thin, so the thickness loss during recording and reproduction is significant. It has many advantages, such as being small and being able to dramatically increase the packing density of the material since there is no need to mix an organic binder, which is a non-6(i) material, into the magnetic layer.

そして従来、上述の強磁性金属薄膜型の磁気記録媒体の
抗磁力、角形比等の磁気特性をより一層改善すべく、例
えば特開昭6(1−113318号公報に記載されるよ
うな多層構造、すなわち強磁性薄膜を複数層形成した磁
気記録媒体が提案されている。
Conventionally, in order to further improve the magnetic properties such as coercive force and squareness ratio of the above-mentioned ferromagnetic metal thin film type magnetic recording medium, a multilayer structure as described in JP-A No. 1-113318, for example, has been developed. That is, a magnetic recording medium in which multiple layers of ferromagnetic thin films are formed has been proposed.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところで、磁気記録の分野においては、高密度記録化や
高品質記録化等の進展により磁気記i、す媒体には一層
の磁気特性の改良が要求されるのは勿論であるが、さら
に、耐久性、走行性等の実用特性の改善も要望されてい
る。上述の多層構造の磁気記録媒体においても例外では
ない。
By the way, in the field of magnetic recording, with the progress of higher density recording and higher quality recording, it goes without saying that magnetic recording media are required to further improve their magnetic properties. There is also a demand for improvements in practical properties such as durability and running properties. The multilayered magnetic recording medium described above is no exception.

本発明は、このような従来の実情に鑑みて提案されたも
のであって、優れた磁気特性を有するとともに、面・1
久性や走行性等の実用特性にも優れた磁気記録媒体を提
供することを目的とする。
The present invention has been proposed in view of such conventional circumstances, and has excellent magnetic properties and
The object of the present invention is to provide a magnetic recording medium that also has excellent practical properties such as durability and runnability.

C問題点を解決するための手段〕 本発明の磁気記録媒体は、上述の目的を達成するために
、表面に微小突起を有する非磁性支持体、l−に複数層
の強磁性金属薄膜を形成したことを特徴とする。
Means for Solving Problem C] In order to achieve the above-mentioned object, the magnetic recording medium of the present invention includes a nonmagnetic support having microprotrusions on the surface, and a plurality of ferromagnetic metal thin films formed on the l- It is characterized by what it did.

〔作用〕[Effect]

非磁性支持体の表面に設けた微小突起により、強磁性金
属TiN膜の表面性がコントロールされ、走行性や耐久
性が向上する。また、磁性層を複数層の強磁性金属薄膜
により構成しているので、fd磁気特性電磁変換特性に
も優れた特性を発揮する。
The microprotrusions provided on the surface of the nonmagnetic support control the surface properties of the ferromagnetic metal TiN film, improving runnability and durability. Furthermore, since the magnetic layer is composed of multiple layers of ferromagnetic metal thin films, it exhibits excellent fd magnetic characteristics and electromagnetic conversion characteristics.

〔実施例〕〔Example〕

以下、本発明の詳細な説明する。 The present invention will be explained in detail below.

本発明が適用される磁気記録媒体は、第1図に示すよう
に、非磁性材料よりなる基体(1) j二に、磁性層と
して複数層(この例では2層)の強磁性薄膜(2a) 
、 (2b)を形成してなる、いわゆる強磁性金属薄膜
型の磁気記録媒体である。
As shown in FIG. 1, a magnetic recording medium to which the present invention is applied includes a substrate (1) made of a non-magnetic material; second, a plurality of layers (two layers in this example) of ferromagnetic thin films (2a )
, (2b) is a so-called ferromagnetic metal thin film type magnetic recording medium.

上記基体(1)としては、ポリイミドやポリアミド等の
耐熱性高分子フィルム等が使用される。
As the substrate (1), a heat-resistant polymer film such as polyimide or polyamide is used.

そして、本発明の磁気記録媒体においては、上記基体(
1)の表面に山状突起やしわ状突起、杓状突起等の突起
を1種以上微小突起(3)として形成し、その表面粗さ
をコントロールしておく。
In the magnetic recording medium of the present invention, the base (
One or more types of microprotrusions (3) such as mountain-like protrusions, wrinkle-like protrusions, and ladle-like protrusions are formed on the surface of 1), and the surface roughness thereof is controlled.

上記山状突起は、高分子フィルム製膜時に、粒径500
〜3000人の無機微粒子を内添させることにより形成
され、高分子フィルム表面からの高さは5’ O0〜1
000人、密度はlXl0’〜10XIO’個/薦厘8
とする。山状突起を形成するために使用される無機微粒
子としては、炭酸カルシウム(CaCO3)やシリカ、
アルミナ等が好適である。
The above-mentioned mountain-like protrusions have a particle size of 500 when forming a polymer film.
It is formed by internally adding ~3000 inorganic fine particles, and the height from the polymer film surface is 5' O0~1
000 people, density is lXl0'~10XIO' pieces/recommendation 8
shall be. Inorganic fine particles used to form mountain-like protrusions include calcium carbonate (CaCO3), silica,
Alumina etc. are suitable.

−に記しわ状突起は、例えば特定の混合溶媒を用いた樹
脂の希薄溶液を塗布乾燥することにより形成される起伏
であって、その高さは0.01〜10μm、好ましくは
0.03〜0.5μm、突起間の最短間隔0.1〜20
pmとする。このしわ状突起を形成するための樹脂とし
ては、ポリエチレンテレフタレート、ポリエチレンナフ
タレート等の飽和ポリエステル、ポリアミド、ポリスチ
ロール、ポリカーボネート、ポリアクリレート、ポリス
ルホン、ポリエーテルスルホン、ポリ塩化ビニル、ポリ
塩化ビニリデン、ポリビニルブチラール、ポリフェニレ
ンオキサイド、フェノキシ樹脂等の各種樹脂の単体、混
合体または共重合体であり、可溶性溶剤を有するものが
適している。そして、これらの樹脂をその良溶媒に溶解
せしめた樹脂濃度1〜11000ppの溶液に、その樹
脂の貧溶媒であって前記良溶媒より高い沸点を有する溶
媒を樹脂に対して10〜100倍添加した溶液を、高分
子フィルムの表面に塗布乾燥することにより、非常に微
細なしわ状凹凸を有するii1層を得ることができる。
- The wrinkle-like protrusions described in - are undulations formed by applying and drying a dilute solution of resin using a specific mixed solvent, and the height thereof is 0.01 to 10 μm, preferably 0.03 to 10 μm. 0.5μm, minimum distance between protrusions 0.1~20
Let it be pm. Examples of resins used to form these wrinkle-like projections include saturated polyesters such as polyethylene terephthalate and polyethylene naphthalate, polyamides, polystyrene, polycarbonates, polyacrylates, polysulfones, polyethersulfones, polyvinyl chloride, polyvinylidene chloride, and polyvinyl butyral. A single substance, a mixture, or a copolymer of various resins such as polyphenylene oxide, phenoxy resin, etc., and those having a soluble solvent are suitable. Then, to a solution in which these resins were dissolved in the good solvent at a resin concentration of 1 to 11,000 ppp, a solvent that was a poor solvent for the resin and had a boiling point higher than the good solvent was added 10 to 100 times the amount of the resin. By applying the solution to the surface of the polymer film and drying it, a layer ii1 having very fine wrinkle-like irregularities can be obtained.

粒状突起は、アクリル樹脂等の有機超i敗粒子またはシ
リカ、金属粉等の無機超微粒子を球状あるいは半球状に
付着さ−することにより形成される。
The granular protrusions are formed by attaching organic ultra-fine particles such as acrylic resin or inorganic ultra-fine particles such as silica or metal powder in a spherical or hemispherical shape.

この粒状突起の高さは、50〜500人、南瓜はI X
 10’〜50X]06個/關2程度とする。
The height of this granular projection is 50 to 500 people, and the pumpkin is I
10'~50X] 06 pieces/approximately 2 pieces.

これら突起の少なくとも1種を形成すれば、磁性層であ
る強磁性金属薄膜(2a) 、 (2b)の表面P1が
制御されるが、2接収」−を組み合わせることにより効
果が増し、特に山状突起を設けたベースフィルム上にし
わ状突起2粒状突起を形成すれば極めて耐久性、走行性
が改善される。
If at least one of these protrusions is formed, the surface P1 of the ferromagnetic metal thin film (2a), (2b) that is the magnetic layer is controlled, but the effect is increased by combining the ferromagnetic metal thin films (2a) and (2b). If two granular wrinkle-like projections are formed on a base film provided with projections, durability and runnability can be greatly improved.

上述の微小突起(3)の全体としての高さは、100〜
2000人であることが好ましく、その密度はln+”
当り平均でI X I O’〜lXlO7個であること
が好ましい。
The overall height of the above-mentioned microprotrusions (3) is 100~
Preferably 2000 people, the density is ln+”
It is preferable that the number of IXIO' to 1XlO is 7 on average.

一方、強磁性薄膜(2a) 、’ (2b)は、強磁性
金属材料を上記基体(1)上に真空蒸着法により直接被
着することにより磁性層として形成される。
On the other hand, the ferromagnetic thin films (2a) and '(2b) are formed as magnetic layers by directly depositing a ferromagnetic metal material onto the substrate (1) by vacuum deposition.

この強磁性薄膜(2)を構成する強磁性金属材料としで
は、Fe、 Co、 Ni等の金属、あるいはFe−C
o。
The ferromagnetic metal material constituting this ferromagnetic thin film (2) is metal such as Fe, Co, Ni, or Fe-C.
o.

Fe−Ni 、 Go−N i + Fe−Co−N 
i 、 re−Cu 、 Go−Cu 、 Co−Au
 、 Co−PL。
Fe-Ni, Go-Ni + Fe-Co-N
i, re-Cu, Go-Cu, Co-Au
, Co-PL.

Mn−B1. Mn−A 1 、 Fe−Cr、 Co
−Cr、 Ni−Cr、 Pe−Go−Cr、 Co−
Ni−Cr、Fe−co−Ni−Cr等の強磁性合金が
挙げられる。
Mn-B1. Mn-A1, Fe-Cr, Co
-Cr, Ni-Cr, Pe-Go-Cr, Co-
Examples include ferromagnetic alloys such as Ni-Cr and Fe-co-Ni-Cr.

上記強磁性金属薄膜(2a) 、 (2b)は、それぞ
れ移動する基体(1)に対して蒸発源からの蒸発原子を
高入射角から低入射角へと連続的に変化させながら斜め
蒸着することにより形成されるもので、湾曲した傾斜柱
状構造を有する。また、この実施例では、」二記各強磁
性金属薄膜(2a) 、 (2b)の傾斜方向は同一方
向となっている。
The ferromagnetic metal thin films (2a) and (2b) are deposited obliquely onto the moving substrate (1) while continuously changing the evaporated atoms from the evaporation source from a high incident angle to a low incident angle. It has a curved and inclined columnar structure. Furthermore, in this embodiment, the inclination directions of the ferromagnetic metal thin films (2a) and (2b) are the same.

このように強磁性金属薄膜(2a) 、 (2b)の傾
斜柱状構造の方向を揃えて複数層形成することにより、
磁気特性、特に再生出力やノイズ等に優れた磁気記録媒
体とすることができる。
In this way, by forming multiple layers of ferromagnetic metal thin films (2a) and (2b) with the tilted columnar structures aligned in the same direction,
A magnetic recording medium with excellent magnetic properties, especially reproduction output, noise, etc., can be obtained.

上述の複数層の強磁性金属薄膜(2a) 、 (2b)
は、第2図に示すような真空蒸着装置を用いてim常の
手法に従って斜め蒸着することにより形成される。
The above-mentioned multi-layered ferromagnetic metal thin film (2a), (2b)
is formed by diagonal deposition according to a conventional method using a vacuum deposition apparatus as shown in FIG.

この真空蒸着装置は、図示しない真空ポンプによって所
定の真空度に設定される真空槽(1])内に、電子ビー
ム加熱等の加熱手段により加熱される蒸発源(12)と
、巻出しロール(13)、巻取りロール(]4)及び冷
却用の円筒状キャン(15)とを配置することにより構
成され、巻出しロール(13)から供給される基体(1
)を上記キャン(15)に沿わせて連続的に走行(移動
)させながら、上記蒸発a(12)からの蒸発原子を上
記基体(1)の表面に被着させ、この蒸発原子の連続膜
を磁性層として形成するものである。
This vacuum evaporation apparatus includes an evaporation source (12) heated by heating means such as electron beam heating, and an unwinding roll ( 13), a take-up roll (4) and a cooling cylindrical can (15) are arranged, and the base body (1
) is continuously run (moved) along the can (15), the evaporated atoms from the evaporator a (12) are deposited on the surface of the substrate (1), and a continuous film of the evaporated atoms is formed. is formed as a magnetic layer.

ここで、上記蒸発源(I2)と移動する基体(1)との
間には、遮蔽板(16)が設けられ、上記基体(1)に
被着される蒸発原子の蒸気流を規制している。
Here, a shielding plate (16) is provided between the evaporation source (I2) and the moving substrate (1) to regulate the vapor flow of the evaporated atoms deposited on the substrate (1). There is.

すなわち、上記基体(1)に対しては、上記蒸発源(1
2)からの蒸発原子が、高入射角から低入射角で連続的
に変化し7ながら被着されるようになっ′ζいる。
That is, the evaporation source (1) is attached to the base (1).
The evaporated atoms from 2) are deposited while changing continuously from a high incident angle to a low incident angle.

したがって、上記装置を用いて2回繰り返し斜め蒸着を
施すことにより、第1図に示すような2層構造の磁気記
録媒体とすることができる。
Therefore, by repeating the oblique deposition twice using the above-mentioned apparatus, a magnetic recording medium having a two-layer structure as shown in FIG. 1 can be obtained.

ところで、−1−述の方法番(より強磁性VW膜(2a
) 。
By the way, -1- mentioned method number (more ferromagnetic VW film (2a
).

(2b)を形成する際に、基体(1)と強磁性薄膜(2
a)間、あるいは各強磁性金属薄膜(2a) 、 (2
b)間の付着力向上、並びに抗磁力の制御等のために、
下地層や中間層を設けてもよい。これら下地層または中
間層としては、八ft 、Si、Cr、Mn、Zn+B
i、Ti、Cu+In、Ni、Go、Fe等、あるいは
これらの酸化物、窒化物等が挙げられる。
(2b), the substrate (1) and the ferromagnetic thin film (2b) are formed.
a) or between each ferromagnetic metal thin film (2a), (2
b) In order to improve the adhesion between and control the coercive force, etc.
A base layer or an intermediate layer may be provided. These base layers or intermediate layers include 8ft, Si, Cr, Mn, Zn+B.
Examples include i, Ti, Cu+In, Ni, Go, Fe, and oxides and nitrides thereof.

さらに、上述の強磁性薄膜(2h)上には、この強磁性
薄膜(2b)の耐蝕性の向上や走行性の向上等を図るた
めに、保護膜を形成してもよい。この保護膜としては、
先の下地層で挙げたような金属あるいはそれらの酸化物
、窒化物等による無機保護膜、脂肪酸、脂肪酸のアルカ
リ金属塩あるいはアルカリ土類金属塩である金属石鹸、
高級アルコール。
Further, a protective film may be formed on the ferromagnetic thin film (2h) in order to improve the corrosion resistance and runnability of the ferromagnetic thin film (2b). As this protective film,
An inorganic protective film made of metals or their oxides, nitrides, etc. as mentioned in the previous base layer, fatty acids, metal soaps that are alkali metal salts or alkaline earth metal salts of fatty acids,
High class alcohol.

脂肪酸エステル、弗素含有化合物、シリコンオイル等の
有機保護膜等がある。
Examples include organic protective films such as fatty acid esters, fluorine-containing compounds, and silicone oil.

以上のような方法に従い、強磁性金属薄膜(2a)と(
2b)の膜厚を変え、サンプルテープを作成した。
According to the method described above, the ferromagnetic metal thin film (2a) and (
Sample tapes were created by changing the film thickness of 2b).

これを実施例1及び実施例2とした。なお、蒸着時の入
射角は50°〜90°とし、強磁性金属材料としてはC
oを使用した。また、表面に1敗小突起を設けない基体
を用いてサンプルテープを作成し、これを比較例1とし
た。
This was designated as Example 1 and Example 2. The incident angle during vapor deposition was 50° to 90°, and the ferromagnetic metal material was C.
o was used. In addition, a sample tape was prepared using a substrate having no small protrusions on its surface, and this was designated as Comparative Example 1.

これら実施例及び比較例について、磁気特性(抗磁力H
C9残留磁束密度B r及び角形比R8)及び実用特性
を調べた。結果を第1表に示す。
Regarding these Examples and Comparative Examples, magnetic properties (coercive force H
The C9 residual magnetic flux density B r and squareness ratio R8) and practical characteristics were investigated. The results are shown in Table 1.

なお、表中、スチル特性はテープに4.2 M llz
の映像信号を記録し、この再生出力が50%に減衰する
までの時間を測定した。また、シャトル特性は25℃、
相対湿度50%の条件で200回走行した後の出力変動
を調べた。
In addition, in the table, the still characteristics are 4.2 Mllz for the tape.
A video signal was recorded, and the time required for the playback output to attenuate to 50% was measured. In addition, the shuttle characteristics are 25℃,
The output fluctuation was investigated after running 200 times at a relative humidity of 50%.

第1表 この第1表より、強磁性金属薄膜を2層構造とすること
により、磁気特性が確保されるとともに、基体に微小突
起を設けているので、耐久性も大幅に改善されたことが
わかる。
Table 1 From this Table 1, it can be seen that by making the ferromagnetic metal thin film have a two-layer structure, magnetic properties are ensured, and since the base is provided with minute protrusions, durability is also greatly improved. Recognize.

ところで、」−述の強磁性金属薄膜(2a) 、 (2
b)の傾斜柱状構造の傾斜方向は、第3図に示すように
、互いに逆方向であってもよい。この場合は、第2図に
示すように、基体(1)を先ず矢印六方向に送り出しな
がら強磁性金属薄膜(2a)を斜め蒸着した後、第4図
に示すように、alibi板(16)の位置を変え、巻
取りロール(13)から基体(1)を矢印B方向に送り
出しながら強磁性金属薄膜(2b)を斜め蒸着すればよ
い。
By the way, the ferromagnetic metal thin film (2a) and (2
The directions of inclination of the inclined columnar structures in b) may be opposite to each other, as shown in FIG. In this case, as shown in FIG. 2, the ferromagnetic metal thin film (2a) is obliquely deposited while the substrate (1) is first fed out in the six directions of arrows, and then the alibi plate (16) is deposited as shown in FIG. The ferromagnetic metal thin film (2b) may be obliquely deposited while the substrate (1) is fed out from the take-up roll (13) in the direction of arrow B.

このように、強磁性金属薄膜(2a) 、 (2b)の
傾斜柱状構造の向きを逆方向にすることにより、位相ず
れが解消され、デジタル記録を行う場合に極めて有利で
ある。すなわち、従来の斜方蒸着膜をリングヘッドでデ
ジタル記録(方形波)すると、再生波形が非対称となる
ために、長手記録媒体で調整した再生回路(イコライザ
回路)がそのままでは使用できないこと、回路規模が大
きくなるほど蒸着テープ専用に最適調整することが難し
いこと等の問題がある。これに対して、2層構造からな
る強磁性金属!4膜(2a) 、 (2h)の傾斜柱状
構造の向きを逆方向とすれば、再生波形の非対称性か改
善され、長手記録媒体で調整した回路を用いたときでも
エラーレートを低く抑えることができ、また最適調整も
簡単に行えるようになる。
In this way, by oriented the tilted columnar structures of the ferromagnetic metal thin films (2a) and (2b) in opposite directions, the phase shift is eliminated, which is extremely advantageous when performing digital recording. In other words, when a conventional obliquely evaporated film is digitally recorded (square wave) with a ring head, the reproduced waveform becomes asymmetrical, so the reproduction circuit (equalizer circuit) adjusted with a longitudinal recording medium cannot be used as is, and the circuit scale The larger the value, the more difficult it is to make optimum adjustments specifically for the vapor-deposited tape. On the other hand, a ferromagnetic metal with a two-layer structure! If the tilted columnar structures of the four films (2a) and (2h) are oriented in opposite directions, the asymmetry of the reproduced waveform can be improved and the error rate can be kept low even when using a circuit adjusted for a longitudinal recording medium. This also makes it easier to make optimal adjustments.

実際、先の実施例と同様の手法により、第2図及び第4
図に示すような方法で強磁性金属薄II#(2a)と(
2b)の傾斜柱状構造の傾きの方向を逆にしてサンプル
テープを作成し、磁気特性及び実用特性、さらには順方
向での位相ずれを測定したところ、第2表に示すように
、特に位相ずれの改善が著しいものであった。
In fact, by using the same method as in the previous embodiment, FIGS.
Ferromagnetic metal thin II# (2a) and (
A sample tape was prepared by reversing the direction of inclination of the inclined columnar structure in 2b), and the magnetic properties and practical characteristics, as well as the phase shift in the forward direction, were measured. The improvement was remarkable.

(以下余白) 第2表 実 実 実 以−ヒ、本発明について具体的な実施例を挙げながら説
明したが、本発明がこれら実施例に限定されるものでは
なく、例えば強磁性金属薄膜を3層以上の構成とする等
、本発明の要旨を逸脱しない範囲において種々の形態を
とりうろことは言うまでもない。
(Margins below) Table 2: Although the present invention has been described with reference to specific examples, the present invention is not limited to these examples. For example, the present invention is not limited to these examples. It goes without saying that various forms may be taken without departing from the gist of the present invention, such as a structure with more than one layer.

〔発明の効果〕〔Effect of the invention〕

以−ヒの説明からも明らかなように、本発明の磁気記録
媒体は、磁性層である強磁性金属薄膜を複数層から構成
するとともに、非磁性支持体に微小突起を設けているの
で、優れた磁気特性、電磁変換特性を有するとともに、
耐久性や走行性等の実用特性にも優れる。
As is clear from the following explanation, the magnetic recording medium of the present invention is composed of a plurality of ferromagnetic metal thin films as magnetic layers, and has microprotrusions on a non-magnetic support, so it has excellent properties. In addition to having magnetic properties and electromagnetic conversion properties,
It also has excellent practical properties such as durability and runnability.

特に、複数層からなる強磁性金属薄膜の傾斜柱状構造の
傾斜方向が互いに逆方向となるように斜め蒸着すれば、
位相ずれも解消され、エラーレートを低く抑えることが
できるとともに、調整も簡単なものとなる。
In particular, if the tilted columnar structure of the ferromagnetic metal thin film consisting of multiple layers is deposited obliquely so that the tilt directions are opposite to each other,
Phase shifts are also eliminated, the error rate can be kept low, and adjustments can be made easily.

【図面の簡単な説明】 第1図は本発明を適用した磁気記録媒体の一例を示す模
式的な要部拡大断面図である。 第2図は強磁性金属薄膜形成のために使用される真空蒸
着装置の構成を示す模式図である。 第3図は本発明を適用した磁気記録媒体の他の例を示す
模式的な要部拡大断面図である。 第4図は強磁性金属薄膜の傾斜柱状構造の傾斜ツノ向を
逆方向とするための真空蒸着装置の構成を示す模式図で
ある。 l    ・・・基体(非磁性支持体)2a、’lb・
・・強磁性薄膜 3    ・・・微小突起
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic enlarged sectional view of essential parts showing an example of a magnetic recording medium to which the present invention is applied. FIG. 2 is a schematic diagram showing the configuration of a vacuum evaporation apparatus used for forming a ferromagnetic metal thin film. FIG. 3 is a schematic enlarged sectional view of essential parts showing another example of a magnetic recording medium to which the present invention is applied. FIG. 4 is a schematic diagram showing the configuration of a vacuum evaporation apparatus for making the tilted horns of the tilted columnar structure of the ferromagnetic metal thin film reverse in direction. l...Substrate (non-magnetic support) 2a,'lb・
...Ferromagnetic thin film 3 ...Minute protrusions

Claims (1)

【特許請求の範囲】[Claims] 表面に微小突起を有する非磁性支持体上に複数層の強磁
性金属薄膜を形成したことを特徴とする磁気記録媒体。
A magnetic recording medium characterized in that a plurality of layers of ferromagnetic metal thin films are formed on a nonmagnetic support having microprotrusions on the surface.
JP24188685A 1985-10-29 1985-10-29 Magnetic recording medium Pending JPS62102416A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24188685A JPS62102416A (en) 1985-10-29 1985-10-29 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24188685A JPS62102416A (en) 1985-10-29 1985-10-29 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS62102416A true JPS62102416A (en) 1987-05-12

Family

ID=17081009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24188685A Pending JPS62102416A (en) 1985-10-29 1985-10-29 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS62102416A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01263920A (en) * 1988-04-13 1989-10-20 Matsushita Electric Ind Co Ltd Magnetic recording medium

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130228A (en) * 1981-02-06 1982-08-12 Fuji Photo Film Co Ltd Magnetic recording medium
JPS57133519A (en) * 1981-02-10 1982-08-18 Fuji Photo Film Co Ltd Magnetic recording medium
JPS5930231A (en) * 1982-08-12 1984-02-17 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS61214116A (en) * 1985-03-19 1986-09-24 Hitachi Maxell Ltd Magnetic recording medium and its production

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130228A (en) * 1981-02-06 1982-08-12 Fuji Photo Film Co Ltd Magnetic recording medium
JPS57133519A (en) * 1981-02-10 1982-08-18 Fuji Photo Film Co Ltd Magnetic recording medium
JPS5930231A (en) * 1982-08-12 1984-02-17 Matsushita Electric Ind Co Ltd Magnetic recording medium
JPS61214116A (en) * 1985-03-19 1986-09-24 Hitachi Maxell Ltd Magnetic recording medium and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01263920A (en) * 1988-04-13 1989-10-20 Matsushita Electric Ind Co Ltd Magnetic recording medium

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