JPS62101229U - - Google Patents
Info
- Publication number
- JPS62101229U JPS62101229U JP19107685U JP19107685U JPS62101229U JP S62101229 U JPS62101229 U JP S62101229U JP 19107685 U JP19107685 U JP 19107685U JP 19107685 U JP19107685 U JP 19107685U JP S62101229 U JPS62101229 U JP S62101229U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotary disk
- holder
- disk
- pick member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 11
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107685U JPS62101229U (OSRAM) | 1985-12-13 | 1985-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19107685U JPS62101229U (OSRAM) | 1985-12-13 | 1985-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101229U true JPS62101229U (OSRAM) | 1987-06-27 |
Family
ID=31144884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19107685U Pending JPS62101229U (OSRAM) | 1985-12-13 | 1985-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101229U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397375A (en) * | 1977-02-07 | 1978-08-25 | Nissin Electric Co Ltd | Device for producing semiconductor |
| JPS5431271A (en) * | 1977-08-13 | 1979-03-08 | Nissin Electric Co Ltd | Wafer holder |
-
1985
- 1985-12-13 JP JP19107685U patent/JPS62101229U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397375A (en) * | 1977-02-07 | 1978-08-25 | Nissin Electric Co Ltd | Device for producing semiconductor |
| JPS5431271A (en) * | 1977-08-13 | 1979-03-08 | Nissin Electric Co Ltd | Wafer holder |