JPS62100677U - - Google Patents
Info
- Publication number
- JPS62100677U JPS62100677U JP19226785U JP19226785U JPS62100677U JP S62100677 U JPS62100677 U JP S62100677U JP 19226785 U JP19226785 U JP 19226785U JP 19226785 U JP19226785 U JP 19226785U JP S62100677 U JPS62100677 U JP S62100677U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- objective lens
- lens group
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000000609 electron-beam lithography Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19226785U JPS62100677U (cs) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19226785U JPS62100677U (cs) | 1985-12-16 | 1985-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62100677U true JPS62100677U (cs) | 1987-06-26 |
Family
ID=31147184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19226785U Pending JPS62100677U (cs) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62100677U (cs) |
-
1985
- 1985-12-16 JP JP19226785U patent/JPS62100677U/ja active Pending
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