JPS62100152U - - Google Patents

Info

Publication number
JPS62100152U
JPS62100152U JP19174785U JP19174785U JPS62100152U JP S62100152 U JPS62100152 U JP S62100152U JP 19174785 U JP19174785 U JP 19174785U JP 19174785 U JP19174785 U JP 19174785U JP S62100152 U JPS62100152 U JP S62100152U
Authority
JP
Japan
Prior art keywords
pad
screw
stand
cleaning
compression spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19174785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425101Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19174785U priority Critical patent/JPH0425101Y2/ja
Publication of JPS62100152U publication Critical patent/JPS62100152U/ja
Application granted granted Critical
Publication of JPH0425101Y2 publication Critical patent/JPH0425101Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP19174785U 1985-12-13 1985-12-13 Expired JPH0425101Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19174785U JPH0425101Y2 (en:Method) 1985-12-13 1985-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19174785U JPH0425101Y2 (en:Method) 1985-12-13 1985-12-13

Publications (2)

Publication Number Publication Date
JPS62100152U true JPS62100152U (en:Method) 1987-06-25
JPH0425101Y2 JPH0425101Y2 (en:Method) 1992-06-15

Family

ID=31146176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19174785U Expired JPH0425101Y2 (en:Method) 1985-12-13 1985-12-13

Country Status (1)

Country Link
JP (1) JPH0425101Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6058097B1 (ja) * 2015-09-16 2017-01-11 株式会社エーエス 床磨機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6058097B1 (ja) * 2015-09-16 2017-01-11 株式会社エーエス 床磨機

Also Published As

Publication number Publication date
JPH0425101Y2 (en:Method) 1992-06-15

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