JPS6199254A - 荷電粒子ビ−ム装置における集束レンズの調整方法 - Google Patents

荷電粒子ビ−ム装置における集束レンズの調整方法

Info

Publication number
JPS6199254A
JPS6199254A JP59219425A JP21942584A JPS6199254A JP S6199254 A JPS6199254 A JP S6199254A JP 59219425 A JP59219425 A JP 59219425A JP 21942584 A JP21942584 A JP 21942584A JP S6199254 A JPS6199254 A JP S6199254A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
focusing lens
target
wien
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59219425A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453068B2 (enrdf_load_stackoverflow
Inventor
Norimichi Anazawa
穴沢　紀道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP59219425A priority Critical patent/JPS6199254A/ja
Publication of JPS6199254A publication Critical patent/JPS6199254A/ja
Publication of JPH0453068B2 publication Critical patent/JPH0453068B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59219425A 1984-10-19 1984-10-19 荷電粒子ビ−ム装置における集束レンズの調整方法 Granted JPS6199254A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59219425A JPS6199254A (ja) 1984-10-19 1984-10-19 荷電粒子ビ−ム装置における集束レンズの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59219425A JPS6199254A (ja) 1984-10-19 1984-10-19 荷電粒子ビ−ム装置における集束レンズの調整方法

Publications (2)

Publication Number Publication Date
JPS6199254A true JPS6199254A (ja) 1986-05-17
JPH0453068B2 JPH0453068B2 (enrdf_load_stackoverflow) 1992-08-25

Family

ID=16735188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59219425A Granted JPS6199254A (ja) 1984-10-19 1984-10-19 荷電粒子ビ−ム装置における集束レンズの調整方法

Country Status (1)

Country Link
JP (1) JPS6199254A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0453068B2 (enrdf_load_stackoverflow) 1992-08-25

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