JPS6198830U - - Google Patents
Info
- Publication number
- JPS6198830U JPS6198830U JP18287084U JP18287084U JPS6198830U JP S6198830 U JPS6198830 U JP S6198830U JP 18287084 U JP18287084 U JP 18287084U JP 18287084 U JP18287084 U JP 18287084U JP S6198830 U JPS6198830 U JP S6198830U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- processed
- processing chamber
- resin molded
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18287084U JPS6198830U (enExample) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18287084U JPS6198830U (enExample) | 1984-11-30 | 1984-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6198830U true JPS6198830U (enExample) | 1986-06-24 |
Family
ID=30740403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18287084U Pending JPS6198830U (enExample) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6198830U (enExample) |
-
1984
- 1984-11-30 JP JP18287084U patent/JPS6198830U/ja active Pending
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