JPS619836U - Foreign matter inspection plate - Google Patents
Foreign matter inspection plateInfo
- Publication number
- JPS619836U JPS619836U JP9466184U JP9466184U JPS619836U JP S619836 U JPS619836 U JP S619836U JP 9466184 U JP9466184 U JP 9466184U JP 9466184 U JP9466184 U JP 9466184U JP S619836 U JPS619836 U JP S619836U
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- matter inspection
- inspection plate
- plate
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第1図は、本考案の異物検査用プレートの一実施例を示
す斜視図であり、第2図は本考案の検査用プレートの一
使用形態を示す説明図である。
1・・・異物検査用プレート、2・・・基板、3・・・
金属薄膜層、4・・・枠。[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a perspective view showing an embodiment of the foreign matter inspection plate of the present invention, and FIG. 2 is an explanatory diagram showing one usage form of the inspection plate of the present invention. . 1... Plate for foreign matter inspection, 2... Board, 3...
Metal thin film layer, 4...frame.
Claims (1)
の少なくとも表面に鏡面の金属薄膜層を設けたことを特
徴とする異物検査用プレート。A plate for foreign matter inspection, characterized in that a mirror-finished metal thin film layer is provided on at least the surface of a substrate having a size that can divide and occupy the inspection surface of an object to be inspected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9466184U JPS619836U (en) | 1984-06-25 | 1984-06-25 | Foreign matter inspection plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9466184U JPS619836U (en) | 1984-06-25 | 1984-06-25 | Foreign matter inspection plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS619836U true JPS619836U (en) | 1986-01-21 |
Family
ID=30653345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9466184U Pending JPS619836U (en) | 1984-06-25 | 1984-06-25 | Foreign matter inspection plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS619836U (en) |
-
1984
- 1984-06-25 JP JP9466184U patent/JPS619836U/en active Pending
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