JPS619836U - Foreign matter inspection plate - Google Patents

Foreign matter inspection plate

Info

Publication number
JPS619836U
JPS619836U JP9466184U JP9466184U JPS619836U JP S619836 U JPS619836 U JP S619836U JP 9466184 U JP9466184 U JP 9466184U JP 9466184 U JP9466184 U JP 9466184U JP S619836 U JPS619836 U JP S619836U
Authority
JP
Japan
Prior art keywords
foreign matter
matter inspection
inspection plate
plate
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9466184U
Other languages
Japanese (ja)
Inventor
敏之 青山
雅央 大滝
Original Assignee
凸版印刷株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 凸版印刷株式会社 filed Critical 凸版印刷株式会社
Priority to JP9466184U priority Critical patent/JPS619836U/en
Publication of JPS619836U publication Critical patent/JPS619836U/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】 第1図は、本考案の異物検査用プレートの一実施例を示
す斜視図であり、第2図は本考案の検査用プレートの一
使用形態を示す説明図である。 1・・・異物検査用プレート、2・・・基板、3・・・
金属薄膜層、4・・・枠。
[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a perspective view showing an embodiment of the foreign matter inspection plate of the present invention, and FIG. 2 is an explanatory diagram showing one usage form of the inspection plate of the present invention. . 1... Plate for foreign matter inspection, 2... Board, 3...
Metal thin film layer, 4...frame.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被検査体の被検査面を分割して占拠しうる大きさの基板
の少なくとも表面に鏡面の金属薄膜層を設けたことを特
徴とする異物検査用プレート。
A plate for foreign matter inspection, characterized in that a mirror-finished metal thin film layer is provided on at least the surface of a substrate having a size that can divide and occupy the inspection surface of an object to be inspected.
JP9466184U 1984-06-25 1984-06-25 Foreign matter inspection plate Pending JPS619836U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9466184U JPS619836U (en) 1984-06-25 1984-06-25 Foreign matter inspection plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9466184U JPS619836U (en) 1984-06-25 1984-06-25 Foreign matter inspection plate

Publications (1)

Publication Number Publication Date
JPS619836U true JPS619836U (en) 1986-01-21

Family

ID=30653345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9466184U Pending JPS619836U (en) 1984-06-25 1984-06-25 Foreign matter inspection plate

Country Status (1)

Country Link
JP (1) JPS619836U (en)

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