JPS6197504A - 三次元位置測定方法及び装置 - Google Patents

三次元位置測定方法及び装置

Info

Publication number
JPS6197504A
JPS6197504A JP22010684A JP22010684A JPS6197504A JP S6197504 A JPS6197504 A JP S6197504A JP 22010684 A JP22010684 A JP 22010684A JP 22010684 A JP22010684 A JP 22010684A JP S6197504 A JPS6197504 A JP S6197504A
Authority
JP
Japan
Prior art keywords
probe
measuring device
coordinate
axis
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22010684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467602B2 (enrdf_load_stackoverflow
Inventor
Naotomi Miyagawa
直臣 宮川
Shinsuke Nagase
長瀬　新助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamazaki Mazak Corp
Original Assignee
Yamazaki Mazak Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamazaki Mazak Corp filed Critical Yamazaki Mazak Corp
Priority to JP22010684A priority Critical patent/JPS6197504A/ja
Publication of JPS6197504A publication Critical patent/JPS6197504A/ja
Publication of JPH0467602B2 publication Critical patent/JPH0467602B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP22010684A 1984-10-19 1984-10-19 三次元位置測定方法及び装置 Granted JPS6197504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22010684A JPS6197504A (ja) 1984-10-19 1984-10-19 三次元位置測定方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22010684A JPS6197504A (ja) 1984-10-19 1984-10-19 三次元位置測定方法及び装置

Publications (2)

Publication Number Publication Date
JPS6197504A true JPS6197504A (ja) 1986-05-16
JPH0467602B2 JPH0467602B2 (enrdf_load_stackoverflow) 1992-10-28

Family

ID=16746003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22010684A Granted JPS6197504A (ja) 1984-10-19 1984-10-19 三次元位置測定方法及び装置

Country Status (1)

Country Link
JP (1) JPS6197504A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002257535A (ja) * 2001-03-05 2002-09-11 Mitsutoyo Corp 位置測定装置
JP2005017062A (ja) * 2003-06-25 2005-01-20 Hitachi Ltd 立体形状計測装置、加工装置、および半導体デバイス製造方法
CN115096493A (zh) * 2022-05-26 2022-09-23 保定来福汽车照明集团有限公司 一种丝网张力辅助测量组件

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002257535A (ja) * 2001-03-05 2002-09-11 Mitsutoyo Corp 位置測定装置
JP2005017062A (ja) * 2003-06-25 2005-01-20 Hitachi Ltd 立体形状計測装置、加工装置、および半導体デバイス製造方法
US7511828B2 (en) 2003-06-25 2009-03-31 Hitachi, Ltd. Three-dimensional shape measuring unit, processing unit, and semiconductor device manufacturing method
CN115096493A (zh) * 2022-05-26 2022-09-23 保定来福汽车照明集团有限公司 一种丝网张力辅助测量组件

Also Published As

Publication number Publication date
JPH0467602B2 (enrdf_load_stackoverflow) 1992-10-28

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