JPS6196687U - - Google Patents

Info

Publication number
JPS6196687U
JPS6196687U JP17979984U JP17979984U JPS6196687U JP S6196687 U JPS6196687 U JP S6196687U JP 17979984 U JP17979984 U JP 17979984U JP 17979984 U JP17979984 U JP 17979984U JP S6196687 U JPS6196687 U JP S6196687U
Authority
JP
Japan
Prior art keywords
holding
robot
silicon wafer
hand
arc shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17979984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17979984U priority Critical patent/JPS6196687U/ja
Publication of JPS6196687U publication Critical patent/JPS6196687U/ja
Pending legal-status Critical Current

Links

JP17979984U 1984-11-27 1984-11-27 Pending JPS6196687U (US06649357-20031118-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17979984U JPS6196687U (US06649357-20031118-C00005.png) 1984-11-27 1984-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17979984U JPS6196687U (US06649357-20031118-C00005.png) 1984-11-27 1984-11-27

Publications (1)

Publication Number Publication Date
JPS6196687U true JPS6196687U (US06649357-20031118-C00005.png) 1986-06-21

Family

ID=30737364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17979984U Pending JPS6196687U (US06649357-20031118-C00005.png) 1984-11-27 1984-11-27

Country Status (1)

Country Link
JP (1) JPS6196687U (US06649357-20031118-C00005.png)

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