JPS6196687U - - Google Patents

Info

Publication number

JPS6196687U

JPS6196687U JP17979984U JP17979984U JPS6196687U JP S6196687 U JPS6196687 U JP S6196687U JP 17979984 U JP17979984 U JP 17979984U JP 17979984 U JP17979984 U JP 17979984U JP S6196687 U JPS6196687 U JP S6196687U

Authority

JP

Japan

Prior art keywords

holding

robot

silicon wafer

hand

arc shape

Prior art date

1984-11-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
• 229910052710 silicon Inorganic materials 0.000 claims description 6
• 239000010703 silicon Substances 0.000 claims description 6
• 210000000078 claw Anatomy 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 3
• 229920003002 synthetic resin Polymers 0.000 description 1
• 239000000057 synthetic resin Substances 0.000 description 1