JPS6196538U - - Google Patents

Info

Publication number
JPS6196538U
JPS6196538U JP18080084U JP18080084U JPS6196538U JP S6196538 U JPS6196538 U JP S6196538U JP 18080084 U JP18080084 U JP 18080084U JP 18080084 U JP18080084 U JP 18080084U JP S6196538 U JPS6196538 U JP S6196538U
Authority
JP
Japan
Prior art keywords
valve
air
gas
fixing surface
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18080084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442913Y2 (US20100223739A1-20100909-C00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18080084U priority Critical patent/JPH0442913Y2/ja
Publication of JPS6196538U publication Critical patent/JPS6196538U/ja
Application granted granted Critical
Publication of JPH0442913Y2 publication Critical patent/JPH0442913Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Drying Of Semiconductors (AREA)
JP18080084U 1984-11-30 1984-11-30 Expired JPH0442913Y2 (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18080084U JPH0442913Y2 (US20100223739A1-20100909-C00005.png) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18080084U JPH0442913Y2 (US20100223739A1-20100909-C00005.png) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196538U true JPS6196538U (US20100223739A1-20100909-C00005.png) 1986-06-21
JPH0442913Y2 JPH0442913Y2 (US20100223739A1-20100909-C00005.png) 1992-10-12

Family

ID=30738357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18080084U Expired JPH0442913Y2 (US20100223739A1-20100909-C00005.png) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0442913Y2 (US20100223739A1-20100909-C00005.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281138A (ja) * 1988-05-08 1989-11-13 Tadahiro Omi プロセスガス供給配管装置
JPH0221618A (ja) * 1988-07-08 1990-01-24 Tadahiro Omi プロセス装置用ガス供給配管装置
JPH11141713A (ja) * 1997-09-05 1999-05-28 Tetra Laval Holdings & Finance Sa 無菌弁組立体
JP2019157888A (ja) * 2018-03-07 2019-09-19 株式会社Screenホールディングス 薬液制御弁および基板処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1555471A4 (en) * 2002-10-21 2005-12-14 Ckd Corp INTEGRATED GAS VALVE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281138A (ja) * 1988-05-08 1989-11-13 Tadahiro Omi プロセスガス供給配管装置
JPH0221618A (ja) * 1988-07-08 1990-01-24 Tadahiro Omi プロセス装置用ガス供給配管装置
JPH11141713A (ja) * 1997-09-05 1999-05-28 Tetra Laval Holdings & Finance Sa 無菌弁組立体
JP2019157888A (ja) * 2018-03-07 2019-09-19 株式会社Screenホールディングス 薬液制御弁および基板処理装置

Also Published As

Publication number Publication date
JPH0442913Y2 (US20100223739A1-20100909-C00005.png) 1992-10-12

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