JPS6196535U - - Google Patents

Info

Publication number
JPS6196535U
JPS6196535U JP18161184U JP18161184U JPS6196535U JP S6196535 U JPS6196535 U JP S6196535U JP 18161184 U JP18161184 U JP 18161184U JP 18161184 U JP18161184 U JP 18161184U JP S6196535 U JPS6196535 U JP S6196535U
Authority
JP
Japan
Prior art keywords
quartz boat
grooves
positioning
side plates
round bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18161184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18161184U priority Critical patent/JPS6196535U/ja
Publication of JPS6196535U publication Critical patent/JPS6196535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP18161184U 1984-11-28 1984-11-28 Pending JPS6196535U (US06277897-20010821-C00009.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18161184U JPS6196535U (US06277897-20010821-C00009.png) 1984-11-28 1984-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18161184U JPS6196535U (US06277897-20010821-C00009.png) 1984-11-28 1984-11-28

Publications (1)

Publication Number Publication Date
JPS6196535U true JPS6196535U (US06277897-20010821-C00009.png) 1986-06-21

Family

ID=30739155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18161184U Pending JPS6196535U (US06277897-20010821-C00009.png) 1984-11-28 1984-11-28

Country Status (1)

Country Link
JP (1) JPS6196535U (US06277897-20010821-C00009.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398123A (ja) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk 半導体製造用ウエハ−ボ−トの製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398123A (ja) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk 半導体製造用ウエハ−ボ−トの製法

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