JPS6194558U - - Google Patents

Info

Publication number
JPS6194558U
JPS6194558U JP18062284U JP18062284U JPS6194558U JP S6194558 U JPS6194558 U JP S6194558U JP 18062284 U JP18062284 U JP 18062284U JP 18062284 U JP18062284 U JP 18062284U JP S6194558 U JPS6194558 U JP S6194558U
Authority
JP
Japan
Prior art keywords
arms
attached
transmission mechanism
rotate
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18062284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18062284U priority Critical patent/JPS6194558U/ja
Priority to DE8585105298T priority patent/DE3573899D1/de
Priority to EP85105298A priority patent/EP0160305B1/fr
Publication of JPS6194558U publication Critical patent/JPS6194558U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18062284U 1984-05-02 1984-11-28 Pending JPS6194558U (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP18062284U JPS6194558U (fr) 1984-11-28 1984-11-28
DE8585105298T DE3573899D1 (en) 1984-05-02 1985-05-01 Carrying device
EP85105298A EP0160305B1 (fr) 1984-05-02 1985-05-01 Dispositif de support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18062284U JPS6194558U (fr) 1984-11-28 1984-11-28

Publications (1)

Publication Number Publication Date
JPS6194558U true JPS6194558U (fr) 1986-06-18

Family

ID=30738175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18062284U Pending JPS6194558U (fr) 1984-05-02 1984-11-28

Country Status (1)

Country Link
JP (1) JPS6194558U (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794338A (en) * 1980-12-04 1982-06-11 Tdk Corp Vapor deposition device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794338A (en) * 1980-12-04 1982-06-11 Tdk Corp Vapor deposition device

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