JPS619392B2 - - Google Patents

Info

Publication number
JPS619392B2
JPS619392B2 JP58039313A JP3931383A JPS619392B2 JP S619392 B2 JPS619392 B2 JP S619392B2 JP 58039313 A JP58039313 A JP 58039313A JP 3931383 A JP3931383 A JP 3931383A JP S619392 B2 JPS619392 B2 JP S619392B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58039313A
Other languages
Japanese (ja)
Other versions
JPS58181872A (ja
Inventor
Kaaru Andaason Nasanieru
Yuujin Deibii Rarii
Deiin Guraudaaru Uinsento
Maikeru Matsukafurei Patoritsuku
Aren Myurei Buruusu
Uein Raito Buruusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS58181872A publication Critical patent/JPS58181872A/ja
Publication of JPS619392B2 publication Critical patent/JPS619392B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/193Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features the pole pieces being ferrite or other magnetic particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Heads (AREA)
  • ing And Chemical Polishing (AREA)
JP58039313A 1982-03-15 1983-03-11 反応性イオンで食刻される構造体を形成する方法 Granted JPS58181872A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/357,947 US4375390A (en) 1982-03-15 1982-03-15 Thin film techniques for fabricating narrow track ferrite heads
US357947 1994-12-16

Publications (2)

Publication Number Publication Date
JPS58181872A JPS58181872A (ja) 1983-10-24
JPS619392B2 true JPS619392B2 (OSRAM) 1986-03-22

Family

ID=23407688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58039313A Granted JPS58181872A (ja) 1982-03-15 1983-03-11 反応性イオンで食刻される構造体を形成する方法

Country Status (4)

Country Link
US (1) US4375390A (OSRAM)
EP (1) EP0088869B1 (OSRAM)
JP (1) JPS58181872A (OSRAM)
DE (1) DE3374485D1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09310194A (ja) * 1995-12-29 1997-12-02 Lucent Technol Inc ニッケルフェライトデバイスへのニッケルの電気メッキ

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8200532A (nl) * 1982-02-12 1983-09-01 Philips Nv Reactief ionen etsen van een voorwerp van ferriet.
US4420365A (en) * 1983-03-14 1983-12-13 Fairchild Camera And Instrument Corporation Formation of patterned film over semiconductor structure
US4564585A (en) * 1983-11-28 1986-01-14 Magnetic Peripherals, Inc. Process for fabricating negative pressure sliders
DE3544299A1 (de) * 1985-12-14 1987-06-19 Hoechst Ag Verfahren zum herstellen eines eich- und pruefstandardelements und nach dem verfahren hergestelltes eich- und pruefstandardelement
JPS62234214A (ja) * 1986-04-03 1987-10-14 Alps Electric Co Ltd 磁気ヘツドの製造方法
JPH01157527A (ja) * 1987-12-14 1989-06-20 Toshiba Corp フォトレジストのパターン形成方法
NL8900107A (nl) * 1989-01-18 1990-08-16 Philips Nv Magneetkop alsmede werkwijze voor het vervaardigen van de magneetkop.
US4933209A (en) * 1989-06-28 1990-06-12 Hewlett-Packard Company Method of making a thin film recording head apparatus utilizing polyimide films
JP2757546B2 (ja) * 1990-08-27 1998-05-25 日本電気株式会社 Feを含む物質のエッチング方法およびエッチング装置
CA2090708A1 (en) * 1992-04-30 1993-10-31 Jeffrey Merritt Mckay Combination transducer/slider/suspension and method for making
US5779873A (en) * 1995-12-29 1998-07-14 Lucent Technologies Inc. Electroplating of nickel on nickel ferrite devices
JPH11306706A (ja) 1998-04-23 1999-11-05 Alps Electric Co Ltd パターン形成方法
JPH11306707A (ja) 1998-04-23 1999-11-05 Alps Electric Co Ltd 露光用マスク及びこの露光用マスクを用いた露光方法
US20020110700A1 (en) * 2001-02-12 2002-08-15 Hein Gerald F. Process for forming decorative films and resulting products
US8673161B2 (en) * 2008-12-29 2014-03-18 HGST Netherlands B.V. Structure formation using metal deposited on a RIE-able seedlayer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE792908A (fr) * 1971-12-20 1973-04-16 Western Electric Co Procede de fabrication de dispositifs semi-conducteurs
FR2209216B1 (OSRAM) * 1972-11-30 1977-09-30 Ibm
NL7401859A (nl) * 1974-02-12 1975-08-14 Philips Nv Werkwijze voor het vervaardigen van een patroon en of meer lagen op een ondergrond door selijk verwijderen van deze laag of lagen sputteretsen en voorwerpen, in het bijzon- alfgeleiderinrichtingen, vervaardigd met ssing van deze werkwijze.
US4259433A (en) * 1976-10-22 1981-03-31 Fuji Photo Film Co., Ltd. Method for producing disk-recording plates
US4124473A (en) * 1977-06-17 1978-11-07 Rca Corporation Fabrication of multi-level relief patterns in a substrate
US4256514A (en) * 1978-11-03 1981-03-17 International Business Machines Corporation Method for forming a narrow dimensioned region on a body
US4275286A (en) * 1978-12-04 1981-06-23 Hughes Aircraft Company Process and mask for ion beam etching of fine patterns

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09310194A (ja) * 1995-12-29 1997-12-02 Lucent Technol Inc ニッケルフェライトデバイスへのニッケルの電気メッキ

Also Published As

Publication number Publication date
EP0088869A2 (en) 1983-09-21
EP0088869A3 (en) 1986-02-05
DE3374485D1 (en) 1987-12-17
JPS58181872A (ja) 1983-10-24
EP0088869B1 (en) 1987-11-11
US4375390A (en) 1983-03-01

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