JPS6193829A - Activation apparatus - Google Patents

Abstract

PURPOSE:To prevent the adhesion of conductive fine particles to matter to be treated, by interposing a dielectric material between at least one of an exciting electrode and an ion draw-out electrode and the matter to be treated within the space between both electrodes so as to cover the surface of at least one of both electrodes. CONSTITUTION:Matter 18 to be treated is inserted in the treatment space 12 between an exciting electrode 11 and an ion draw-out electrode 14. When high AC voltage is applied between an opposed electrode 9 and the exciting electrode 11, the gas in the space 12 is ionized on the surface of the exciting electrode 11 to generate plasma. Because an electric field, wherein electrons are directed to the ion draw-out electrode 14 from the exciting electrode 11, is generated in the treatment space 12, the surface of the matter 8 in the side of the exciting electrode 11 is activated by the minus ion in the plasma. A dielectric material 13 is interposed between the matter 8 and the ion draw-out electrode 14 and the plasma ion generated from the exciting electrode 11 is prevented from local concn.

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an activation device for activating the surface of an object.

[Background technology]

When activating the surface of objects such as powders, films, and various molded objects to impart or improve hydrophilicity, philophilicity, lipophilicity, or easy dispersibility, ions in plasma are applied to the object to be treated. There is a method of irradiation.

As a device for realizing such a method, a device as shown in FIG. 1 fat was developed. This device consists of a flat opposing cylinder if, and a flat (mesh-like) excitation electrode 3 having many long notches 3a as shown in the plan view of FIG. 1 (bl).
An AC high voltage power source 4 is connected to both electrodes 1.3 with a dielectric 2 interposed between them, and the excitation electrode 3 and an ion extraction electrode 6 facing it with a space 5 in between It had a structure in which it was connected by a voltage power source 7. This device is designed to generate planar plasma on the surface of the excitation electrode 3 under various gas atmospheres. On the other hand, an electric field is generated between the excitation electrode 3 and the ion extraction electrode 6 in which electrons move from the excitation electrode 3 to the ion extraction electrode 6. Therefore, only °-" ions are extracted from the plasma generated on the surface of the excitation electrode 3, and the object 8 inserted between the excitation electrode 3 and the ion extraction electrode 6 is attached to the surface of the three excitation electrodes. °
It was now subject to the activation effect of ions.

However, in this case, if there is a scratch on the surface of the ion extractor 111M6, there is a fear that the ion extraction from the excitation electrode 3 will be localized and the activation of the object will be concentrated locally. Furthermore, the conductive fine particles constituting the excitation pole 3 may adhere to the surface of the object 8 or be mixed into the object 8 due to the discharge, making it impossible to obtain the desired activation of the object 8. There was also fear.

[Purpose of the invention]

Therefore, an object of the present invention is to provide an activation device that can obtain desired activation of an object.

[Disclosure of the Invention] In order to achieve the above object, the inventors have completed this invention after 97 degrees of study.

In this invention, a plate-shaped counter electrode and a plate-shaped excitation electrode with a dielectric interposed therebetween are connected to an AC high voltage power source,
The excitation electrode faces the plate-shaped ion extraction electrode with a space in between and is connected to a high voltage power source, and the object inserted under the discharge state generated in the space between the excitation electrode and the ion extraction electrode. An activation device for activating a processing object, wherein a dielectric material is interposed in the space between at least one electrode and the processing object so as to cover the electrode surface. The gist of the activation device is as follows. Hereinafter, an embodiment thereof will be described in detail based on the accompanying drawings.

As shown in FIG. 2, a flat opposing electrode 9 with a dielectric 10 interposed therebetween, and a plate-like (mesh-like) plate-like electrode having many long notches 11a in the width direction as shown in the plan view of FIG. The excitation electrode 11 is connected to the AC high voltage power supply 4. The excitation electrode 11 faces a plate-shaped ion extraction electrode 14 via a processing space 12 and a plate-shaped dielectric material (liner) 13 . The dielectric material 13 is interposed between the object to be processed 8 inserted into the processing space 12 and the ion extraction electrode 14, and covers the electrode surface of the ion extraction electrode 4i14. The excitation electrode 11 and the ion extraction '21 pole 14 are connected by a DC high voltage power supply 7.

Such devices are used under vacuum conditions or under various gas atmospheres such as oxygen gas, nitrogen gas, etc., depending on the activity. Also high temperature, low temperature and high pressure.

Used under various environmental conditions such as low pressure. In use, as shown in FIG. 2, the object to be processed 8 is inserted into the processing space 12 between the excitation electrode 11 and the ion extraction electrode 14. When an AC high voltage is applied between the counter electrode 9 and the excitation electrode 11, the gas in the space 12 is ionized on the surface of the excitation electrode 11, and plasma is generated. In the processing space 12, an electric field is generated in which electrons move from the excitation electrode 11 to the ion extraction electrode 14. Therefore, the surface of the excitation electrode 1111J of the object 8 is activated by the 1-'' ions in the plasma. As described above, the dielectric material 13 is interposed between the object 8 and the ion extraction electrode 14. Therefore, the plasma ions generated at the excitation electrode 11 will not be locally concentrated, so that the activation will not be concentrated locally such as the biting part of the object 8. There is no.

In this example, a DC high voltage power supply was used for the excitation electrode and the ion extraction electrode so that the excitation electrode was used as a cathode and the ion extraction @ ion extraction electrode was used as an anode.

However, instead of that power source, a DC high voltage power source 7a (shown in FIG. 4(a)) or an AC high voltage power source 4a (shown in FIG. 4(b)) with the polarity reversed from that of the embodiment is used. Or, as shown in Figure 4(C) or Figure 4(dl), it is okay to use a power source that combines AC high voltage 11fi4a and DC high voltage power source 7 (or ?a). Inside, 4 is an AC high voltage power supply connected to the counter electrode and the excitation electrode.Furthermore, in the above embodiment, the ion extraction electrode was in the form of a flat plate.

However, instead, as shown in FIG.
A plate-shaped ion extraction electrode 14' having the same shape as the above, that is, a plate-shaped ion extraction electrode 14' having a large number of long notches 14a in the width direction, may be used, whereby the electric field in the processing space 12 is appropriately concentrated.

6 and 7 show different embodiments of the activation device according to the present invention. These devices have almost the same structure as the device shown in FIG. The same reference numerals are given to the constituent parts, and the explanation thereof will be omitted.

The device shown in FIG. 6 consists of a flat dielectric material (liner) 1
5 is interposed between the object to be processed 8 inserted into the processing space 12 and the excitation electrode 11 .

This dielectric material 15 covers the electrode surface of the excitation electrode 11 . Therefore, it not only prevents local concentration of extracted ions, but also prevents conductor fine particles generated by the excitation electrode 11 due to discharge or mechanical wear from adhering to or mixing with the object to be processed 8. be.

The apparatus shown in FIG. 7 includes an object to be treated 8 inserted into a treatment space 12 and an excitation i! A flat dielectric material (liner) is provided between the pole 11 and the ion extraction electrode 14.
15 and 13 are interposed. In this way, it is possible to prevent the activation effect from being concentrated locally, and also to prevent the conductor fine particles from adhering to or mixing with the object to be processed 8.

The device shown in FIG. 88 uses a plate-like (mesh-like) ion extraction electrode 14 having a large number of long notches 14a in the width direction, instead of the flat ion extraction electrode 14 in the device shown in FIG.
' is used, so that the processing space 12
A suitable electric field concentration is applied to the Of course, the same effect as the device shown in FIG. 6 can be obtained.

In the apparatus shown in FIG. 9, a plate-shaped ion extraction electrode 14' having a large number of long notches 14a in the width direction is used instead of the flat ion extraction electrode 14 in the apparatus shown in FIG. As a result, an appropriate concentration of electric field is given to the processing space 12.

Of course, the same effect as the device shown in FIG. 7 can be obtained.

In the devices shown in FIGS. 5 to 9, the excitation electrode 11 and the ion extraction electrode 14 (or 14') are similar to the device shown in FIG. It was connected via A7. Even in these devices, the above-mentioned DC high voltage? Instead of the llt source 7, various high voltage power supplies as shown in FIGS. 4(a)-(dl) may be used.

Figures 10 to 15 show AC high voltage? iR4,
Excitation electrode 11 and ion extractor 4, (or 14'
), thereby providing an excitation 1! to the processing space 12. An electric field synchronized between the opposite electrodes is formed, so the excitation is 1! pole 11
The ion irradiation rate from

FIG. 16 shows yet another embodiment of the activation device according to the present invention. In this device, a flat second counter electrode 17 is installed on the opposite side of the processing space 12 with a dielectric 16 in between, with respect to the ion extraction electrode 14' in the apparatus shown in FIG. The ion extraction electrode 14' and the second
are connected to a counter electrode 17 by an AC high voltage power source 4b. As a result, a creeping discharge is generated from the ion extraction electrode 14' along the surface of the dielectric material 13, and the gas is also excited in the area facing the processing space 12 of the ion extraction type +ffi 14', resulting in a planar plasma. Occur. Moreover, specific ions in the plasma are drawn out into the processing space 12 by the electric field generated by the DC high voltage power supply 7. Therefore, the object to be processed 8 inserted into the processing space 12 is activated by plasma also on the surface facing the ion extraction electrode 14'. In this case, the ion extraction electrode 1
In order to more efficiently apply plasma to the surface of the object to be processed 8 facing 4', it is preferable to make the thickness of the dielectric material 13 as thin as possible. You can also
This apparatus, like the apparatus shown in FIG. 5, is designed to prevent local activation of the object to be treated. Components that are the same as those in FIG. 5 are designated by the same reference numerals in the drawing, and their explanations are omitted.

The apparatus shown in FIG. 17 is the apparatus shown in FIG. 16 in which a flat dielectric material 15 is interposed between the object to be processed 8 inserted therein and the excitation electrode 11 in the processing space 12. It is. The dielectric material 5 covers the electrode surface of the excitation electrode 11 and prevents conductor fine particles generated from the surface of the excitation electrode 11 due to discharge or mechanical wear from adhering to or mixing with the object to be treated 8. 11 The iJ electric material 15 is preferably as thin as possible so as not to weaken the electric field in the processing space 12 too much.1 For example, it may be thinly coated on the surface of the excitation electrode 11. In this apparatus as well, as in the apparatus shown in FIG. 16, gas is excited at the portion of the ion extraction electrode 14' facing the processing space 12, and planar plasma is generated. Therefore, the object to be processed 8 is the ion extraction electrode 1
The surface facing 4' is also subjected to plasma activation treatment. Also, this device is the 7th v! Similar to the apparatus of J, local concentration of the activation effect is prevented, and conductor fine particles are also prevented from adhering to or being mixed into the object 8 to be processed. Note that the same components as in FIG. 16 are denoted by the same reference numerals in the drawing, and their explanations are omitted.

In the apparatus shown in FIG. 16 or 17, instead of the DC high voltage power supply 70 to which the excitation electrode 11 and the ion extraction electrode 14' are connected, various high voltage sources as shown in FIG. 4 (83 to rb) are used. 18 and 1 where the power supply can be used
FIG. 9 shows a device having a different power source from the device shown in FIG. 16 and the device shown in FIG. 17, respectively. In these devices, the ion extraction electrode 14' and the second counter electrode 17 are connected. The AC high voltage power source R4 is used in common with the AC high voltage power source R4 to which the opposite pole 9 and the excitation electrode 11 are connected. That is, the excitation electrode 11 and the second counter electrode 17 are connected, and the ion extraction electrode 14' and the counter electrode 9 are connected at t! This reduces the number of AC high voltage power supplies to one. In these devices as well, instead of the DC muscle voltage generator 217ii7 to which the excitation electrode 11 and the ion extraction electrode 14' are connected, the
) to Fdl may be used.

20TyJ and FIG. 21 respectively show devices with different power supplies from the device shown in FIG. 18 and the device shown in FIG. 19. In these devices, the excitation electrode 11 and the ion extraction electrode 14' are connected. The high voltage power source is shared with the AC high voltage power source 4 to which the excitation electrode 11 and counter electrode 9 are connected. That is, the excitation electrode 11 and the second counter electrode 17 are connected, and at the same time, the AC high voltage electric current R
It is connected to 4. As a result, processing space 1
Second, since an electric field is formed in synchronization with the AC high voltage power supply 4, the ion irradiation rate from the excitation electrode 11 is improved.

In the embodiment, the excitation electrode and ion extraction electrode constituting the activation device according to the present invention had a shape having a large number of long notches in the width direction.

In this way, if the surface facing the object to be processed is formed into an uneven surface with a small curvature, it is preferable because an appropriate concentration of electric field is given to the processing space. There are shapes (shape consisting of a long thin piece, plate shape formed from such a piece or a long thin notch, slit shape), brush shape, etc. However, excitation i! The poles may be flat.

〔Effect of the invention〕

As described above, in the activation device according to the present invention, a plate-shaped counter electrode and a plate-shaped excitation TL pole with a dielectric interposed therebetween are connected to an AC high voltage power supply, and the excitation electrode is connected to an AC high voltage power source. It faces a plate-shaped ion extraction electrode through a space and is connected to a high voltage power supply, and the inserted object is activated under the discharge state generated in the space between the excitation electrode and the ion extraction electrode. The activation device is characterized in that a dielectric material is interposed in the space between at least one of the electrodes and the object to be processed so as to cover the electrode surface. Therefore, when a dielectric material is interposed between the excitation electrode and the object to be processed, it is possible to prevent the conductor particles generated from the excitation electrode from adhering to or mixing with the object to be processed. This has the effect of being done. In addition, when a dielectric material is interposed between the ion extraction electrode and the object to be processed, activation is prevented from concentrating on a local part of the object, and activation occurs over the entire surface of the object. is brought about. That is, in a space into which the object to be processed is inserted, between at least one electrode forming the space and the object to be processed? l! Since the dielectric material is interposed so as to cover the polar surface, the effect of obtaining the desired activation of the object to be processed is brought about.

[Brief explanation of the drawing]

Figure 1 (a3 is a front view of a conventional example of an activation device;
The same figure (bl is a plan view of the excitation electrode constituting the activation device, FIG. 2 is a front view of an embodiment of the activation device according to the present invention, and FIG. 3 is a plan view of the excitation electrode constituting the activation device). A plan view of the excitation electrodes constituting the conversion device, Figure 4.
(d) is a drawing showing different aspects of the power source constituting the activation device according to the present invention, FIGS. 5 to 2.
FIG. 1 is a front view showing different embodiments of the activation device according to the present invention. 4.4a, 4b... AC high voltage power supply 7.7a...
DC high voltage power supply 8...Object to be processed 9...Opposing m
ff510.16...Dielectric material 11...Excitation electrode
12...Processing space 13.15...Dielectric material 1
4.14'...Ion extraction electrode 17...Second opposing electrode Fig. 1 (a) Fig. 1 (b) Fig. 2 Fig. 3 Fig. 4 (a) (b) (c) (d)7
7a i5Figure 8Figure 10Figure 11Figure 14Figure 17Figure 18Figure 19Figure 20

Claims (6)

[Claims] (1) A plate-shaped counter electrode with a dielectric interposed therebetween and a plate-shaped excitation electrode are connected to an AC high voltage power source, and the excitation electrode faces the plate-shaped ion extraction electrode with a space interposed therebetween. and an activation device connected to a high voltage power source so that the object to be treated inserted into the discharge state generated in the space between the excitation electrode and the ion extraction electrode is activated. An activation device characterized in that a dielectric material is interposed in the space between at least one electrode and the object to be processed so as to cover the electrode surface. (2) A plate-shaped second counter electrode is installed on the opposite side of the ion extraction electrode from the space into which the object to be processed is inserted, with a dielectric interposed therebetween, and the ion extraction electrode and the second counter electrode Claim 1, in which the and are connected by an AC high voltage power supply.
Activation device as described in section. (3) Claim 2, in which the AC high voltage power supply to which the ion extraction electrode and the second counter electrode are connected is shared with the AC high voltage power supply to which the excitation electrode and the counter electrode are connected. Activation device as described in section. (4) Claims 1 to 3, wherein the high voltage power supply to which the excitation electrode and the ion extraction electrode are connected is shared with the AC high voltage power supply to which the excitation electrode and counter electrode are connected. The activation device according to any one of paragraphs. (5) The activation device according to any one of claims 1 to 4, wherein the excitation electrode has a plate shape having a plurality of long notches in the width direction. (6) Claims 1 to 5, wherein the ion extraction electrode is plate-shaped with a plurality of long notches in the width direction.
The activation device according to any one of paragraphs.