JPS6193623U - - Google Patents
Info
- Publication number
- JPS6193623U JPS6193623U JP17913684U JP17913684U JPS6193623U JP S6193623 U JPS6193623 U JP S6193623U JP 17913684 U JP17913684 U JP 17913684U JP 17913684 U JP17913684 U JP 17913684U JP S6193623 U JPS6193623 U JP S6193623U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- supply passage
- movable table
- guide
- supply hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17913684U JPS6348810Y2 (es) | 1984-11-26 | 1984-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17913684U JPS6348810Y2 (es) | 1984-11-26 | 1984-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6193623U true JPS6193623U (es) | 1986-06-17 |
| JPS6348810Y2 JPS6348810Y2 (es) | 1988-12-15 |
Family
ID=30736699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17913684U Expired JPS6348810Y2 (es) | 1984-11-26 | 1984-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6348810Y2 (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004100237A1 (ja) * | 2003-05-12 | 2004-11-18 | Nikon Corporation | ステージ装置及び露光装置、並びにデバイス製造方法 |
-
1984
- 1984-11-26 JP JP17913684U patent/JPS6348810Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004100237A1 (ja) * | 2003-05-12 | 2004-11-18 | Nikon Corporation | ステージ装置及び露光装置、並びにデバイス製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6348810Y2 (es) | 1988-12-15 |