JPS6193623U - - Google Patents

Info

Publication number
JPS6193623U
JPS6193623U JP17913684U JP17913684U JPS6193623U JP S6193623 U JPS6193623 U JP S6193623U JP 17913684 U JP17913684 U JP 17913684U JP 17913684 U JP17913684 U JP 17913684U JP S6193623 U JPS6193623 U JP S6193623U
Authority
JP
Japan
Prior art keywords
air supply
supply passage
movable table
guide
supply hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17913684U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6348810Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17913684U priority Critical patent/JPS6348810Y2/ja
Publication of JPS6193623U publication Critical patent/JPS6193623U/ja
Application granted granted Critical
Publication of JPS6348810Y2 publication Critical patent/JPS6348810Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP17913684U 1984-11-26 1984-11-26 Expired JPS6348810Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17913684U JPS6348810Y2 (enrdf_load_stackoverflow) 1984-11-26 1984-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17913684U JPS6348810Y2 (enrdf_load_stackoverflow) 1984-11-26 1984-11-26

Publications (2)

Publication Number Publication Date
JPS6193623U true JPS6193623U (enrdf_load_stackoverflow) 1986-06-17
JPS6348810Y2 JPS6348810Y2 (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30736699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17913684U Expired JPS6348810Y2 (enrdf_load_stackoverflow) 1984-11-26 1984-11-26

Country Status (1)

Country Link
JP (1) JPS6348810Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100237A1 (ja) * 2003-05-12 2004-11-18 Nikon Corporation ステージ装置及び露光装置、並びにデバイス製造方法
CN113581893A (zh) * 2021-07-30 2021-11-02 逸美德科技股份有限公司 用于柔性物料的平整方法和装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100237A1 (ja) * 2003-05-12 2004-11-18 Nikon Corporation ステージ装置及び露光装置、並びにデバイス製造方法
CN113581893A (zh) * 2021-07-30 2021-11-02 逸美德科技股份有限公司 用于柔性物料的平整方法和装置

Also Published As

Publication number Publication date
JPS6348810Y2 (enrdf_load_stackoverflow) 1988-12-15

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