JPS6191016A - Production of dielectric material fine powder - Google Patents
Production of dielectric material fine powderInfo
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- JPS6191016A JPS6191016A JP21364984A JP21364984A JPS6191016A JP S6191016 A JPS6191016 A JP S6191016A JP 21364984 A JP21364984 A JP 21364984A JP 21364984 A JP21364984 A JP 21364984A JP S6191016 A JPS6191016 A JP S6191016A
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- fine particles
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- chloride
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Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、チタン酸バリウム微粒子、チタン酸ストロン
チウム微粒子、ジルコニウム酸ノクリウム微粒子等の誘
電体微粒子の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing dielectric fine particles such as barium titanate fine particles, strontium titanate fine particles, and nocurium zirconate fine particles.
本出願人は、特願昭５７−１４７２２６ （チタン酸）
４リウム微粒子の製造方法）、特願昭５７−１５１２４
０（チタン酸カルシウム微粒子の製造方法）、特願昭５
７−１５６３１５ （チタン酸ストロンチウム微粒子の
製造方法）、特願昭５７−２１９５４０ （ジルコニウ
ム酸バリウム微粒子の製造方法）等において、湿式合成
法による誘電体微粒子の製造方法を提案した。The applicant has filed a patent application No. 57-147226 (titanic acid).
(Method for producing 4-lium fine particles), patent application No. 57-15124
0 (Production method of calcium titanate fine particles), patent application 1973
No. 7-156315 (method for manufacturing strontium titanate fine particles), Japanese Patent Application No. 57-219540 (manufacturing method for barium zirconate fine particles), etc., proposed a method for manufacturing dielectric fine particles by a wet synthesis method.
これらの誘電体微粒子の製造方法において、Ｔｉ（又は
Ｚｒ）の原料として塩化物を使用した場合の製造方法は
、大路次の通シである。In the manufacturing method of these dielectric fine particles, when chloride is used as a raw material for Ti (or Zr), the manufacturing method is as follows by Ohji.
先ず、Ｔｉ（Ｊ４ （又は、ＺｒＣｌ１４ 、 Ｚｒ０
ＣＪ！２ ・８Ｈ２０等）を加水分解した後、ＮａＯＨ
、ＫＯＨ等のアルカリ剤を使用して中和する。次に、Ｔ
ｉ ＣＪ１４と等モル黄のＢａ （又はＣａ 、 Ｓ
ｒ等）を加えた後、ＮａＯＨ、ＫＯＨ等のアルカリ剤で
−を強アルカリ性側にして、加熱９反応させる。この後
、デカンテーションによる水洗、濾過、乾燥を行って、
例えばチタン酸バリウムＢａＴｉＯ３微粒子を得る。First, Ti(J4 (or ZrCl14, Zr0
CJ! 2 ・8H20 etc.), then NaOH
, neutralize using an alkaline agent such as KOH. Next, T
i CJ14 and equimolar yellow Ba (or Ca, S
After adding (r, etc.), use an alkaline agent such as NaOH or KOH to make - to the strongly alkaline side, and heat for 9 reactions. After that, wash with water by decantation, filter, and dry.
For example, barium titanate BaTiO3 fine particles are obtained.
上述したように、Ｔｉ（又はＺｒ ）の原料として塩化
物を使用して製造した誘電体微粒子を螢光Ｘ線分析装置
で測定すると、微量のＣｌが検出される。As described above, when dielectric fine particles manufactured using chloride as a Ti (or Zr) raw material are measured with a fluorescent X-ray analyzer, a trace amount of Cl is detected.
このＣ１は、原料のチタン塩化物（又はジルコニウム塩
化物）に由来するものであると考えられる。This C1 is thought to be derived from titanium chloride (or zirconium chloride) as a raw material.
Ｃ１１ｏ存在は、コンデンサ、セラミック成形品等に加
工した後、経時変化による信頼性劣化の原因ともなり得
るので、ＣＰ量はできるだけ少ないことが望ましい。ま
た、ファインセラミックス製品の原料として使用する場
合においても、この（Ｊの存在が問題となシ得る場合が
ある。Since the presence of C11o can cause reliability deterioration due to changes over time after being processed into capacitors, ceramic molded products, etc., it is desirable that the amount of CP be as small as possible. Furthermore, even when used as a raw material for fine ceramic products, the presence of (J) may pose a problem.
本発明は、上記問題点を解決することができる誘電体微
粒子の製造方法を提供するものである。The present invention provides a method for producing dielectric fine particles that can solve the above problems.
本発明においては、チタン又はジルコニウムの塩化物（
例、ｔば、ＴｉＣｆｆ１４ 、 ＺｒＣｌ４ 、 Ｚｒ
０ＣＩ！２１１８ Ｈ２Ｏ等）を水溶液中で加水分解し
た後、この水溶液を７に−ｊ）り剤（ＮａＯＨ、ＫＯＨ
等）でｐＨ７，１以上のアルカリ性とし、この状態で水
洗、デカンテーションを行って塩素イオンを除去する。In the present invention, titanium or zirconium chloride (
Examples, tba, TiCff14, ZrCl4, Zr
0CI! 2118 H2O, etc.) in an aqueous solution, and then add this aqueous solution to 7-j)
etc.) to make it alkaline to pH 7.1 or higher, and in this state, wash with water and decantation to remove chlorine ions.
引き続き、バリウム、ストロンチウム、カルシウムの水
溶性塩のうちの少くとも１つを加え、強アルカリ性水溶
液中で反応させて所望の誘電体微粒子を得る。Subsequently, at least one of water-soluble salts of barium, strontium, and calcium is added and reacted in a strongly alkaline aqueous solution to obtain desired dielectric fine particles.
得られる誘電体微粒子をＡＢＯ３とした場合（Ａ：Ｂａ
、 Ｓｒ 、 Ｃａ、 Ｂ： Ｔｉ 、 Ｚｒ）、
単−系ノミナらず、複合系の微粒子の製造にも適用する
ことができる。When the obtained dielectric fine particles are ABO3 (A: Ba
, Sr, Ca, B: Ti, Zr),
It can be applied to the production of not only single nanoparticles but also composite microparticles.
なお、バリウムの水溶性塩としては、例えば、Ｂａ（Ｎ
Ｏ３）２ 、 Ｂａ（ＯＨ）２ 、 ＢａＣｊ！２ 、
Ｂａ（ＣＨ３ＣＯＯ）２を使用することができる。ま
た、ストロンチウムの水溶性塩としては、例えばＳｒ（
ＮＯ３）２ 、 Ｓｒ（ＯＨ）２゜５ｒＣｊ！２ 、５
ｒ（ＣＨ３ＣＯＯ）２ 、 ＳｒＯを使用することがで
きる。カルシウムの水溶性塩としては、例えばＣａ（Ｎ
Ｏ３）２ 、 Ｃａ（ＯＨ）２ 、 ＣａＣｊ！２ 、
Ｃａ（ＣＨ３ＣＯＯ）２ 。In addition, as a water-soluble salt of barium, for example, Ba(N
O3)2, Ba(OH)2, BaCj! 2,
Ba(CH3COO)2 can be used. In addition, as a water-soluble salt of strontium, for example, Sr(
NO3)2, Sr(OH)2゜5rCj! 2, 5
r(CH3COO)2, SrO can be used. Examples of water-soluble salts of calcium include Ca(N
O3)2, Ca(OH)2, CaCj! 2,
Ca(CH3COO)2.
ＣａＯを使用することができる。CaO can be used.
チタン又はジルコニウムの原料として塩化物を使用する
誘電体微粒子の製造方法において、従来塩化物を加水分
解し、アルカリで中和するとＣＰがＴｉ０Ｃｊ！２など
の形で残存し、合成反応時にＣＱが結晶中に取り込まれ
たり、結晶表面に吸着されて、反応後の水洗でも除去さ
れないため、得られた誘電体微粒子中にＣＰが残留する
という問題点が生じていた。しかるに、本発明において
は、塩化物を加水分解した後の溶液を中性ではなく、ア
ルカリ性側にするため、Ｃｊ！が残存し難くなり、水洗
、デカンテーションを行うことによシ溶液中のＣＩＡを
大幅に除去することができる。従って、得られる誘電体
微粒子中のＣＲの残留量も低（抑えることが可能になる
。In a method for producing dielectric fine particles using chloride as a raw material for titanium or zirconium, conventionally, when the chloride is hydrolyzed and neutralized with an alkali, CP is Ti0Cj! 2, etc., and CQ is incorporated into the crystal during the synthesis reaction or adsorbed to the crystal surface and is not removed even after washing with water after the reaction, resulting in the problem that CP remains in the obtained dielectric fine particles. A dot had appeared. However, in the present invention, in order to make the solution after hydrolyzing chloride not neutral but alkaline, Cj! It becomes difficult for CIA to remain in the solution, and CIA in the solution can be largely removed by washing with water and decantation. Therefore, the amount of CR remaining in the obtained dielectric fine particles can also be kept low.
実施例１
５０ｙ−のＴｉＣβ４を１０ｏｆの水に溶かした溶液に
ＮＨ，ＯＨを加えて加水分解させ、−を９．５とした。Example 1 NH and OH were added to a solution of 50y- TiCβ4 dissolved in 10of water to cause hydrolysis, and - was adjusted to 9.5.
そして、この沈殿が生成した溶液に水洗とデカンテーシ
ョンを繰シ返し、−を７とした。次に、溶液中のＴｉと
略等−Ｔ−／Ｉ／量（０，９５） ＯＢａ （ＯＨ）２
を加え、ＫＯＨ溶液でｐｉ（１４とした。この溶液を９
０Ｃで３時間反応させ、生成した沈殿に濾過、水洗を行
った後、１００Ｃで１日乾燥させた。Then, the solution in which this precipitate was generated was repeatedly washed with water and decanted, and the value of - was set to 7. Next, approximately equal to Ti in the solution -T-/I/amount (0,95) OBa (OH)2
was added and adjusted to pi (14) with KOH solution.This solution was adjusted to 9
After reacting at 0C for 3 hours, the resulting precipitate was filtered, washed with water, and then dried at 100C for 1 day.
得られた微粒子をＸ線回折によシ分析した結果によると
、この微粒子はＢａＴｉＯ３であることが確認できた。According to the results of X-ray diffraction analysis of the obtained fine particles, it was confirmed that the fine particles were BaTiO3.
また、粒子サイズは、２００〜３００ Ｘであった。Moreover, the particle size was 200-300×.
実施例２
５０ｙ−のＴ＋（Ｊ！４を２００？の水に溶かした溶液
にＮａ ＯＨ溶液を加えて加水分解させ、−を９．５と
した。Example 2 A NaOH solution was added to a solution of 50y- T+ (J!4 dissolved in 200? water to cause hydrolysis, and - was adjusted to 9.5.
そして、この沈殿が生成した溶液に水洗とデカンテーシ
ョンを繰シ返し、−を７とした。次に、ＢａＯを加え、
ＮａＯＨ溶液でｐＨ１３，７とした後、９５Ｃで２時間
反応させた。生成した沈殿に濾過、水洗を行い、１００
Ｃで１日乾燥させた。Then, the solution in which this precipitate was generated was repeatedly washed with water and decanted, and the value of - was set to 7. Next, add BaO,
After adjusting the pH to 13.7 with a NaOH solution, the mixture was reacted at 95C for 2 hours. The generated precipitate was filtered and washed with water, and
It was dried at C for 1 day.
得られた微粒子をＸ線回折によシ分析した結果によると
、この微粒子はＢａＴ ｉ０３であることが確認できた
二また、粒子サイズは、２００〜３００Ｘであった。According to the results of X-ray diffraction analysis of the obtained fine particles, it was confirmed that the fine particles were BaTi03, and the particle size was 200 to 300X.
次に、表１に上記実施例１及び２で得られたＢａＴｉＯ
３微粒子について、螢光Ｘ線分析によシ残留塩素量を測
定した結果を比較例（加水分解直後の溶液の−は７）と
併せて示す。この表から、加水分解後の溶液をアルカリ
性にし、水洗とデカンテーションを施すことが、得られ
たＢａＴｉＯ３微粒子中の残留塩素量を減少させるのに
有効であることが表１
実施例３
５０テのＴｉＣＪ！４を１００？の水に溶かした溶液に
ＮＨ４ＯＨを加えて加水分解させ、−を９．５とした。Next, Table 1 shows the BaTiO obtained in Examples 1 and 2 above.
The results of measuring the amount of residual chlorine for the 3 fine particles by fluorescent X-ray analysis are shown together with a comparative example (- of the solution immediately after hydrolysis is 7). From this table, it can be seen that making the solution after hydrolysis alkaline, washing with water and decantation is effective in reducing the amount of residual chlorine in the obtained BaTiO3 fine particles. TiCJ! 4 to 100? NH4OH was added to a solution dissolved in water to cause hydrolysis, and - was adjusted to 9.5.
そして、この沈殿が生成した溶液に水洗とデカンテーシ
ョンを繰り返して−を７とした。次に、この溶液ｏ’ｒ
ｉに対して、Ｓｒ／Ｔｉ ＝ １．０５ （モル比）と
なるＳｒ（ＯＨ）２を加え、ＫＯＨ溶液でＰＩ（を１４
とした。Then, water washing and decantation were repeated to the solution in which this precipitate was generated, and - was set to 7. Next, this solution o'r
Sr(OH)2 was added to Sr/Ti = 1.05 (molar ratio) to i, and PI (14
And so.
この溶液を９５Ｃで４時間反応させた後、生成した沈殿
に濾過、水洗を行い、１００Ｃで１日乾燥させた。After reacting this solution at 95C for 4 hours, the resulting precipitate was filtered, washed with water, and dried at 100C for 1 day.
得られた微粒子をＸ線回折によシ分析した結果によると
、この微粒子は５ｒＴｉ０３であることが確認できた。According to the results of X-ray diffraction analysis of the obtained fine particles, it was confirmed that the fine particles were 5rTi03.
また、粒子サイズは、１００〜２００Ｘであつた。Moreover, the particle size was 100-200X.
実施例４
５０テのＴ ｉ ＣＲ４を２００１の水に溶かした溶液
にＮａＯＨ溶液を加えて加水分解させ、−を９，５とし
た。Example 4 A NaOH solution was added to a solution of 50% T i CR4 dissolved in 2001% water for hydrolysis, and - was adjusted to 9.5.
そして、この沈殿が生じた溶液に水洗とデカンテーショ
ンを繰シ返して−を７とした。次に、この溶液中のＴｉ
と等モル量の５ｒＣＲ２を加え、ＮａＯＨ溶液でｐｉ−
１１４とした。１００Ｃで３時間反応きせた後、生成し
た沈殿に濾過、水洗を行い、１００Ｃで１日乾燥させた
。Then, the solution in which the precipitate had formed was repeatedly washed with water and decanted to give a value of -7. Next, Ti in this solution
Add an equimolar amount of 5rCR2 to pi-
It was set at 114. After reacting at 100C for 3 hours, the resulting precipitate was filtered, washed with water, and dried at 100C for 1 day.
Ｘ線回折による分析結果によると、この微粒子は５ｒＴ
ｉ０３であることが確認できた。According to the analysis results by X-ray diffraction, this fine particle has a 5rT
I was able to confirm that it was i03.
次に、表２に上記実施例３及び４で得られた５ｒＴｉ０
３微粒子について、螢光Ｘ線分析によシ残留塩素量を測
定した結果を比較例（加水分解直後の−は７）と併せて
示す。Next, Table 2 shows the 5rTi0 obtained in Examples 3 and 4 above.
The results of measuring the amount of residual chlorine using fluorescent X-ray analysis for the 3 fine particles are shown together with a comparative example (- is 7 immediately after hydrolysis).
表２
実施例５
５０？のＴｉＣｆｆ１４を１００ｙ−の水に溶かした溶
液にＮＨ４ＯＨを加えて加水分解させ、−を９．５とし
た。Table 2 Example 5 50? NH4OH was added to a solution of TiCff14 dissolved in 100y- of water to hydrolyze it, and - was adjusted to 9.5.
そして、この沈殿が生じた溶液に水洗とデカンテーショ
ンを繰シ返して−を７とした。次に、この溶液中のＴｉ
に対してモル比で１．０５となるＣａ（ＯＨ）２を加え
、ＮａＯＨ溶液でｐＨ１４とした。この溶液を９５Ｃで
４時間反応させた後、生成した沈殿に濾過、水洗を行い
、１００Ｃで１日乾燥させた。Then, the solution in which the precipitate had formed was repeatedly washed with water and decanted to give a value of -7. Next, Ti in this solution
Ca(OH)2 was added thereto at a molar ratio of 1.05, and the pH was adjusted to 14 with NaOH solution. After reacting this solution at 95C for 4 hours, the resulting precipitate was filtered, washed with water, and dried at 100C for 1 day.
得られた微粒子をＸ線回折によシ分析した結果によると
、この微粒子はＣａＴｉＯ３であることが確認できた。According to the results of X-ray diffraction analysis of the obtained fine particles, it was confirmed that the fine particles were CaTiO3.
また、この微粒子のサイズは、１〜３μｍであった。Moreover, the size of this fine particle was 1 to 3 μm.
実施例６
５０ｆＰのＴｉＣ＆！４を２００１の水に溶かした溶液
にＮａＯＨ溶液を加えて加水分解させ、−を９．５とし
た。Example 6 50 fP TiC&! A NaOH solution was added to a solution of 4 dissolved in 2001 in water to cause hydrolysis, and - was adjusted to 9.5.
そして、この沈殿が生じた溶液に水洗とデカンテーショ
ンを繰シ返して−を７とした。次に、この溶液中のＴｉ
と等モル量のＣａＣｆｆ１２を加え、ＮａＯＨ溶液でｐ
ｌ−１１４とした。この溶液を１００Ｃで３時間反応さ
せた後、生成した沈殿に濾過、水洗を行い、１００Ｃで
１日乾燥させた。Then, the solution in which the precipitate had formed was repeatedly washed with water and decanted to give a value of -7. Next, Ti in this solution
Add equimolar amount of CaCff12 to p
It was designated as l-114. After reacting this solution at 100C for 3 hours, the resulting precipitate was filtered, washed with water, and dried at 100C for 1 day.
Ｘ線回折による分析結果によると、この微粒子はＣａＴ
ｉＯ３であることが確認できた。According to the analysis results by X-ray diffraction, this fine particle is CaT.
It was confirmed that it was iO3.
次に、表３に上記実施例５及び６で得られたＣａＴｉＯ
３微粒子について、螢光Ｘ線分析によシ残留塩素量を測
定した結果を比較例（加水分解直後の−は７）と併せて
示す。Next, Table 3 shows the CaTiO obtained in Examples 5 and 6 above.
The results of measuring the amount of residual chlorine using fluorescent X-ray analysis for the 3 fine particles are shown together with a comparative example (- is 7 immediately after hydrolysis).
実施例７
５５．７４ＰのＺｒＣｊ！４を水に溶解した５０ＯＮの
溶液から４０ｍ１を採取し、この中にＬｉＯＨ溶液を加
えて加水分解させ、−を９．５とした。そして、この沈
殿が生じた溶液に水洗とデカンテーションを繰シ返して
−を７とした。この白色懸濁液にＢａ （ＯＨ） ２・
８Ｈ２０を９．０５４ Ｐ （Ｂａ／ Ｚｒ ＝ １．
５ ）を加えＬｉＯＨ溶液でｐＪ（１４とした。この溶
液を９８Ｃで８時間反応させた後、生成した沈殿にデカ
ンテーション、濾過を行い、乾燥させた。Example 7 ZrCj of 55.74P! 40 ml was collected from a 50ON solution of 4 dissolved in water, and a LiOH solution was added thereto to hydrolyze it, and - was adjusted to 9.5. Then, the solution in which the precipitate had formed was repeatedly washed with water and decanted to give a value of -7. This white suspension contains Ba (OH) 2.
8H20 to 9.054 P (Ba/Zr = 1.
5) and adjusted to pJ (14) with LiOH solution. After reacting this solution at 98C for 8 hours, the resulting precipitate was decanted, filtered, and dried.
得られた微粒子をＸ線回折により分析した結果によると
、この微粒子はＢａＺｒ０ａであることが確認できた。According to the results of analyzing the obtained fine particles by X-ray diffraction, it was confirmed that the fine particles were BaZr0a.
また、粒子サイズは、２〜３Ｒであった。Moreover, the particle size was 2-3R.
螢光Ｘ線分析により残留塩素量を測定した結果によると
、本製造方法によＩ）得られたＢａＺｒＯ３微粒子中の
残留塩素量は、大幅に減少していることが確認できた。According to the results of measuring the amount of residual chlorine by fluorescent X-ray analysis, it was confirmed that the amount of residual chlorine in the BaZrO3 fine particles obtained by the present production method (I) was significantly reduced.
本発明によれば、訪電体微粒子中の塩素残留量が大幅に
減少するため、塩素に原因する特性の劣化は生ぜず、信
頼性の高いコンデンサ、セラミック成形品等を提供する
ことができる。また、ＣＰを除去する工程を付加するの
みでよく、本出願人が提案した湿式合成法をそのまま採
用することができる。According to the present invention, since the residual amount of chlorine in the fine particles of the current-visiting body is significantly reduced, deterioration of characteristics caused by chlorine does not occur, and highly reliable capacitors, ceramic molded products, etc. can be provided. Further, it is only necessary to add a step of removing CP, and the wet synthesis method proposed by the present applicant can be adopted as is.
Claims (1)
解した後、該水溶液を一旦アルカリ性にして塩素イオン
を除去し、引き続きバリウム、ストロンチウム、カルシ
ウムの水溶性塩のうちの少くとも１つを加え、強アルカ
リ性水溶液中で反応させることを特徴とする誘電体微粒
子の製造方法。After hydrolyzing titanium or zirconium chloride in an aqueous solution, the aqueous solution is once made alkaline to remove chlorine ions, and then at least one of water-soluble salts of barium, strontium, and calcium is added to make it strongly alkaline. A method for producing dielectric fine particles characterized by reaction in an aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21364984A JPH06649B2 (en) | 1984-10-12 | 1984-10-12 | Method for producing fine dielectric particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21364984A JPH06649B2 (en) | 1984-10-12 | 1984-10-12 | Method for producing fine dielectric particles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191016A true JPS6191016A (en) | 1986-05-09 |
| JPH06649B2 JPH06649B2 (en) | 1994-01-05 |
Family
ID=16642653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21364984A Expired - Fee Related JPH06649B2 (en) | 1984-10-12 | 1984-10-12 | Method for producing fine dielectric particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06649B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6374915A (en) * | 1986-07-14 | 1988-04-05 | キヤボツト コ−ポレ−シヨン | Manufacture of diatomic cation titanate |
| FR2659641A1 (en) * | 1990-03-14 | 1991-09-20 | Rhone Poulenc Chimie | PROCESS FOR PREPARING A DIVALENT OR TRIVALENT CATION TITANATE. |
| JPH0489317A (en) * | 1990-07-30 | 1992-03-23 | Denki Kagaku Kogyo Kk | Easily-sintering powder material for microwave dielectric material |
| EP1013609A1 (en) * | 1998-05-20 | 2000-06-28 | Toho Titanium Co., Ltd. | Method for producing barium titanate powder |
| WO2015122180A1 (en) * | 2014-02-14 | 2015-08-20 | 富士フイルム株式会社 | Manufacturing method for strontium titanate fine particles |
-
1984
- 1984-10-12 JP JP21364984A patent/JPH06649B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6374915A (en) * | 1986-07-14 | 1988-04-05 | キヤボツト コ−ポレ−シヨン | Manufacture of diatomic cation titanate |
| FR2659641A1 (en) * | 1990-03-14 | 1991-09-20 | Rhone Poulenc Chimie | PROCESS FOR PREPARING A DIVALENT OR TRIVALENT CATION TITANATE. |
| JPH0489317A (en) * | 1990-07-30 | 1992-03-23 | Denki Kagaku Kogyo Kk | Easily-sintering powder material for microwave dielectric material |
| EP1013609A1 (en) * | 1998-05-20 | 2000-06-28 | Toho Titanium Co., Ltd. | Method for producing barium titanate powder |
| EP1013609A4 (en) * | 1998-05-20 | 2007-12-19 | Toho Titanium Co Ltd | Method for producing barium titanate powder |
| WO2015122180A1 (en) * | 2014-02-14 | 2015-08-20 | 富士フイルム株式会社 | Manufacturing method for strontium titanate fine particles |
| JP2015151303A (en) * | 2014-02-14 | 2015-08-24 | 富士フイルム株式会社 | Method for producing strontium titanate fine particles |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06649B2 (en) | 1994-01-05 |
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