JPS6190856U - - Google Patents
Info
- Publication number
- JPS6190856U JPS6190856U JP17627384U JP17627384U JPS6190856U JP S6190856 U JPS6190856 U JP S6190856U JP 17627384 U JP17627384 U JP 17627384U JP 17627384 U JP17627384 U JP 17627384U JP S6190856 U JPS6190856 U JP S6190856U
- Authority
- JP
- Japan
- Prior art keywords
- reaction gas
- vapor phase
- phase growth
- buffer
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17627384U JPS6190856U (ar) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17627384U JPS6190856U (ar) | 1984-11-20 | 1984-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190856U true JPS6190856U (ar) | 1986-06-12 |
Family
ID=30733873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17627384U Pending JPS6190856U (ar) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190856U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192459U (ar) * | 1987-05-29 | 1988-12-12 |
-
1984
- 1984-11-20 JP JP17627384U patent/JPS6190856U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192459U (ar) * | 1987-05-29 | 1988-12-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6190856U (ar) | ||
| JPS6150760U (ar) | ||
| JPS63140619U (ar) | ||
| JPS62142839U (ar) | ||
| JPS62126362U (ar) | ||
| JPS6139937U (ja) | 拡散炉型気相成長装置 | |
| JPH0165872U (ar) | ||
| JPS6382929U (ar) | ||
| JPH0210470U (ar) | ||
| JPH0351834U (ar) | ||
| JPH01114680U (ar) | ||
| JPS63106766U (ar) | ||
| JPH0320434U (ar) | ||
| JPS6329929U (ar) | ||
| JPS63140618U (ar) | ||
| JPS6169282U (ar) | ||
| JPS5812941U (ja) | 気相成長装置用サセプタ | |
| JPH0245627U (ar) | ||
| JPH01107124U (ar) | ||
| JPS63192460U (ar) | ||
| JPS61177440U (ar) | ||
| JPS62148574U (ar) | ||
| JPS5717126A (en) | Manufacture of silicon carbide process tube for semiconductor | |
| JPH0165128U (ar) | ||
| JPS6262432U (ar) |