JPS6190855U - - Google Patents
Info
- Publication number
- JPS6190855U JPS6190855U JP17471884U JP17471884U JPS6190855U JP S6190855 U JPS6190855 U JP S6190855U JP 17471884 U JP17471884 U JP 17471884U JP 17471884 U JP17471884 U JP 17471884U JP S6190855 U JPS6190855 U JP S6190855U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- center portion
- deposition apparatus
- vapor
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
第１図および第２図はいずれもこの考案の一実
施例を示す図で、第１図は要部平面図、第２図は
要部側断面図、第３図〜第５図はいずれも従来の
この種蒸着装置を示す図で第３図は要部平面図、
第４図は要部側断面図、第５図は側断面図である
。
図中、１，１１はウエハホルダ、２はウエハ固
定部材、５は回動機構、８は蒸発源、９は防着板
、１０は容器である。尚、図中同一符号は同一又
は相当部分を示す。
Both Figures 1 and 2 are views showing one embodiment of this invention, with Figure 1 being a plan view of the main part, Figure 2 being a side sectional view of the main part, and Figures 3 to 5 all showing an embodiment of the invention. Figure 3 is a plan view of the main part of a conventional vapor deposition apparatus of this type;
FIG. 4 is a side sectional view of the main part, and FIG. 5 is a side sectional view. In the figure, 1 and 11 are wafer holders, 2 is a wafer fixing member, 5 is a rotation mechanism, 8 is an evaporation source, 9 is an adhesion prevention plate, and 10 is a container. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
複数の突出片とを有し、複数の被蒸着体固定部材
が取付けられた被蒸着体ホルダ、この被蒸着体ホ
ルダに対向して配置された蒸発源を備えた蒸着装
置。 (2) 被蒸着体ホルダは回動機構を介して回動自
在に複数個配置されている実用新案登録請求の範
囲第１項記載の蒸着装置。[Claims for Utility Model Registration] (1) A vapor deposited object holder having a center portion and a plurality of protruding pieces projecting radially from the center portion, and to which a plurality of vapor deposited object fixing members are attached; A vapor deposition apparatus equipped with an evaporation source placed opposite a body holder. (2) The vapor deposition apparatus according to claim 1, wherein a plurality of vapor deposition object holders are rotatably arranged via a rotation mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17471884U JPS6190855U (en) | 1984-11-16 | 1984-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17471884U JPS6190855U (en) | 1984-11-16 | 1984-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190855U true JPS6190855U (en) | 1986-06-12 |
Family
ID=30732333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17471884U Pending JPS6190855U (en) | 1984-11-16 | 1984-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190855U (en) |
-
1984
- 1984-11-16 JP JP17471884U patent/JPS6190855U/ja active Pending
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