JPS6190855U - - Google Patents

Info

Publication number
JPS6190855U
JPS6190855U JP17471884U JP17471884U JPS6190855U JP S6190855 U JPS6190855 U JP S6190855U JP 17471884 U JP17471884 U JP 17471884U JP 17471884 U JP17471884 U JP 17471884U JP S6190855 U JPS6190855 U JP S6190855U
Authority
JP
Japan
Prior art keywords
vapor deposition
center portion
deposition apparatus
vapor
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17471884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17471884U priority Critical patent/JPS6190855U/ja
Publication of JPS6190855U publication Critical patent/JPS6190855U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP17471884U 1984-11-16 1984-11-16 Pending JPS6190855U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17471884U JPS6190855U (cg-RX-API-DMAC7.html) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17471884U JPS6190855U (cg-RX-API-DMAC7.html) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6190855U true JPS6190855U (cg-RX-API-DMAC7.html) 1986-06-12

Family

ID=30732333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17471884U Pending JPS6190855U (cg-RX-API-DMAC7.html) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6190855U (cg-RX-API-DMAC7.html)

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