JPS6188240U - - Google Patents

Info

Publication number
JPS6188240U
JPS6188240U JP17394684U JP17394684U JPS6188240U JP S6188240 U JPS6188240 U JP S6188240U JP 17394684 U JP17394684 U JP 17394684U JP 17394684 U JP17394684 U JP 17394684U JP S6188240 U JPS6188240 U JP S6188240U
Authority
JP
Japan
Prior art keywords
wafer
wafers
transport path
cassette
prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17394684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17394684U priority Critical patent/JPS6188240U/ja
Publication of JPS6188240U publication Critical patent/JPS6188240U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17394684U 1984-11-15 1984-11-15 Pending JPS6188240U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17394684U JPS6188240U (enExample) 1984-11-15 1984-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17394684U JPS6188240U (enExample) 1984-11-15 1984-11-15

Publications (1)

Publication Number Publication Date
JPS6188240U true JPS6188240U (enExample) 1986-06-09

Family

ID=30731581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17394684U Pending JPS6188240U (enExample) 1984-11-15 1984-11-15

Country Status (1)

Country Link
JP (1) JPS6188240U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355948A (ja) * 1986-08-26 1988-03-10 Tokyo Electron Ltd プロ−ブ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154370A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Photo resist film treatment apparatus of semiconductor wafers
JPS5338266A (en) * 1976-09-20 1978-04-08 Hitachi Ltd Screening method of semiconductors and device for the same
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置
JPS60241212A (ja) * 1984-05-16 1985-11-30 Hitachi Ltd クリ−ンル−ム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154370A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Photo resist film treatment apparatus of semiconductor wafers
JPS5338266A (en) * 1976-09-20 1978-04-08 Hitachi Ltd Screening method of semiconductors and device for the same
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置
JPS60241212A (ja) * 1984-05-16 1985-11-30 Hitachi Ltd クリ−ンル−ム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355948A (ja) * 1986-08-26 1988-03-10 Tokyo Electron Ltd プロ−ブ装置

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