JPS6188240U - - Google Patents
Info
- Publication number
- JPS6188240U JPS6188240U JP17394684U JP17394684U JPS6188240U JP S6188240 U JPS6188240 U JP S6188240U JP 17394684 U JP17394684 U JP 17394684U JP 17394684 U JP17394684 U JP 17394684U JP S6188240 U JPS6188240 U JP S6188240U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- transport path
- cassette
- prober
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 15
- 230000032258 transport Effects 0.000 claims 4
- 230000002950 deficient Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17394684U JPS6188240U (enrdf_load_stackoverflow) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17394684U JPS6188240U (enrdf_load_stackoverflow) | 1984-11-15 | 1984-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6188240U true JPS6188240U (enrdf_load_stackoverflow) | 1986-06-09 |
Family
ID=30731581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17394684U Pending JPS6188240U (enrdf_load_stackoverflow) | 1984-11-15 | 1984-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188240U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355948A (ja) * | 1986-08-26 | 1988-03-10 | Tokyo Electron Ltd | プロ−ブ装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154370A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Photo resist film treatment apparatus of semiconductor wafers |
| JPS5338266A (en) * | 1976-09-20 | 1978-04-08 | Hitachi Ltd | Screening method of semiconductors and device for the same |
| JPS5932146A (ja) * | 1982-08-18 | 1984-02-21 | Nec Corp | 半導体ウエハ−の検査装置 |
| JPS60241212A (ja) * | 1984-05-16 | 1985-11-30 | Hitachi Ltd | クリ−ンル−ム |
-
1984
- 1984-11-15 JP JP17394684U patent/JPS6188240U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52154370A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Photo resist film treatment apparatus of semiconductor wafers |
| JPS5338266A (en) * | 1976-09-20 | 1978-04-08 | Hitachi Ltd | Screening method of semiconductors and device for the same |
| JPS5932146A (ja) * | 1982-08-18 | 1984-02-21 | Nec Corp | 半導体ウエハ−の検査装置 |
| JPS60241212A (ja) * | 1984-05-16 | 1985-11-30 | Hitachi Ltd | クリ−ンル−ム |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6355948A (ja) * | 1986-08-26 | 1988-03-10 | Tokyo Electron Ltd | プロ−ブ装置 |