JPS6186514U - - Google Patents

Info

Publication number
JPS6186514U
JPS6186514U JP17281384U JP17281384U JPS6186514U JP S6186514 U JPS6186514 U JP S6186514U JP 17281384 U JP17281384 U JP 17281384U JP 17281384 U JP17281384 U JP 17281384U JP S6186514 U JPS6186514 U JP S6186514U
Authority
JP
Japan
Prior art keywords
pipe
plate
ventilation pipe
gas
cleaning cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17281384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143455Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17281384U priority Critical patent/JPH0143455Y2/ja
Publication of JPS6186514U publication Critical patent/JPS6186514U/ja
Application granted granted Critical
Publication of JPH0143455Y2 publication Critical patent/JPH0143455Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP17281384U 1984-11-13 1984-11-13 Expired JPH0143455Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17281384U JPH0143455Y2 (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17281384U JPH0143455Y2 (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Publications (2)

Publication Number Publication Date
JPS6186514U true JPS6186514U (enrdf_load_stackoverflow) 1986-06-06
JPH0143455Y2 JPH0143455Y2 (enrdf_load_stackoverflow) 1989-12-18

Family

ID=30730472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17281384U Expired JPH0143455Y2 (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Country Status (1)

Country Link
JP (1) JPH0143455Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5081527B2 (ja) * 2007-07-26 2012-11-28 東京エレクトロン株式会社 気体清浄化装置及び気体清浄化方法
JP5442818B2 (ja) * 2012-09-03 2014-03-12 東京エレクトロン株式会社 気体清浄化装置

Also Published As

Publication number Publication date
JPH0143455Y2 (enrdf_load_stackoverflow) 1989-12-18

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