JPS6185853U - - Google Patents

Info

Publication number
JPS6185853U
JPS6185853U JP1984171792U JP17179284U JPS6185853U JP S6185853 U JPS6185853 U JP S6185853U JP 1984171792 U JP1984171792 U JP 1984171792U JP 17179284 U JP17179284 U JP 17179284U JP S6185853 U JPS6185853 U JP S6185853U
Authority
JP
Japan
Prior art keywords
vacuum
transmission device
motion transmission
vacuum flange
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984171792U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984171792U priority Critical patent/JPS6185853U/ja
Publication of JPS6185853U publication Critical patent/JPS6185853U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
JP1984171792U 1984-11-13 1984-11-13 Pending JPS6185853U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984171792U JPS6185853U (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984171792U JPS6185853U (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Publications (1)

Publication Number Publication Date
JPS6185853U true JPS6185853U (enrdf_load_stackoverflow) 1986-06-05

Family

ID=30729472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984171792U Pending JPS6185853U (enrdf_load_stackoverflow) 1984-11-13 1984-11-13

Country Status (1)

Country Link
JP (1) JPS6185853U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100680054B1 (ko) * 2000-02-24 2007-02-07 엘지.필립스 엘시디 주식회사 마스크 운반 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100680054B1 (ko) * 2000-02-24 2007-02-07 엘지.필립스 엘시디 주식회사 마스크 운반 장치 및 방법

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