JPS6185851U - - Google Patents

Info

Publication number

JPS6185851U

JPS6185851U JP1984172068U JP17206884U JPS6185851U JP S6185851 U JPS6185851 U JP S6185851U JP 1984172068 U JP1984172068 U JP 1984172068U JP 17206884 U JP17206884 U JP 17206884U JP S6185851 U JPS6185851 U JP S6185851U

Authority

JP

Japan

Prior art keywords

photomask

thin film

recess

peripheral edge

recessed

Prior art date

1984-11-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 4
• 239000000839 emulsion Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims description 2
• 239000000758 substrate Substances 0.000 description 2
• 239000004020 conductor Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1