JPS6185599A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6185599A
JPS6185599A JP59206180A JP20618084A JPS6185599A JP S6185599 A JPS6185599 A JP S6185599A JP 59206180 A JP59206180 A JP 59206180A JP 20618084 A JP20618084 A JP 20618084A JP S6185599 A JPS6185599 A JP S6185599A
Authority
JP
Japan
Prior art keywords
rotor
stator
tip
blades
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59206180A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0263120B2 (enrdf_load_stackoverflow
Inventor
Hisahiro Terasawa
寿浩 寺澤
Toshio Kusumoto
淑郎 楠本
Hiroyuki Yamakawa
洋幸 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59206180A priority Critical patent/JPS6185599A/ja
Publication of JPS6185599A publication Critical patent/JPS6185599A/ja
Publication of JPH0263120B2 publication Critical patent/JPH0263120B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP59206180A 1984-10-03 1984-10-03 タ−ボ分子ポンプ Granted JPS6185599A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59206180A JPS6185599A (ja) 1984-10-03 1984-10-03 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59206180A JPS6185599A (ja) 1984-10-03 1984-10-03 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6185599A true JPS6185599A (ja) 1986-05-01
JPH0263120B2 JPH0263120B2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=16519136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59206180A Granted JPS6185599A (ja) 1984-10-03 1984-10-03 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6185599A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump
JP2008280977A (ja) * 2007-05-14 2008-11-20 Shimadzu Corp ターボ分子ポンプ
EP3608545A1 (de) * 2013-10-15 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0740631A (ja) * 1993-07-26 1995-02-10 Erekomu Hanbai Kk 原稿保持具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018603A (enrdf_load_stackoverflow) * 1973-06-22 1975-02-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018603A (enrdf_load_stackoverflow) * 1973-06-22 1975-02-27

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001029417A1 (en) * 1999-10-18 2001-04-26 Sarcos Lc Compact molecular drag vacuum pump
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
US6866488B2 (en) 1999-10-18 2005-03-15 Sarcos Lc Compact molecular-drag vacuum pump
US7165931B2 (en) 1999-10-18 2007-01-23 Sarcos Investments Lc Compact molecular-drag vacuum pump
JP2008280977A (ja) * 2007-05-14 2008-11-20 Shimadzu Corp ターボ分子ポンプ
EP3608545A1 (de) * 2013-10-15 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
JPH0263120B2 (enrdf_load_stackoverflow) 1990-12-27

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