JPS6185145U - - Google Patents
Info
- Publication number
- JPS6185145U JPS6185145U JP1984170684U JP17068484U JPS6185145U JP S6185145 U JPS6185145 U JP S6185145U JP 1984170684 U JP1984170684 U JP 1984170684U JP 17068484 U JP17068484 U JP 17068484U JP S6185145 U JPS6185145 U JP S6185145U
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- liquid
- substrate surface
- backflow prevention
- prevention means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170684U JPS6185145U (enExample) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170684U JPS6185145U (enExample) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185145U true JPS6185145U (enExample) | 1986-06-04 |
Family
ID=30728394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984170684U Pending JPS6185145U (enExample) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185145U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63163077A (ja) * | 1986-12-25 | 1988-07-06 | Tokyo Electron Ltd | サツクバツクバルブ |
-
1984
- 1984-11-09 JP JP1984170684U patent/JPS6185145U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63163077A (ja) * | 1986-12-25 | 1988-07-06 | Tokyo Electron Ltd | サツクバツクバルブ |