JPS6185143U - - Google Patents

Info

Publication number
JPS6185143U
JPS6185143U JP16852784U JP16852784U JPS6185143U JP S6185143 U JPS6185143 U JP S6185143U JP 16852784 U JP16852784 U JP 16852784U JP 16852784 U JP16852784 U JP 16852784U JP S6185143 U JPS6185143 U JP S6185143U
Authority
JP
Japan
Prior art keywords
reaction chamber
negative pressure
sealing part
cover
membrane manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16852784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526735Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16852784U priority Critical patent/JPH0526735Y2/ja
Publication of JPS6185143U publication Critical patent/JPS6185143U/ja
Application granted granted Critical
Publication of JPH0526735Y2 publication Critical patent/JPH0526735Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16852784U 1984-11-08 1984-11-08 Expired - Lifetime JPH0526735Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16852784U JPH0526735Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16852784U JPH0526735Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Publications (2)

Publication Number Publication Date
JPS6185143U true JPS6185143U (enrdf_load_stackoverflow) 1986-06-04
JPH0526735Y2 JPH0526735Y2 (enrdf_load_stackoverflow) 1993-07-07

Family

ID=30726295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16852784U Expired - Lifetime JPH0526735Y2 (enrdf_load_stackoverflow) 1984-11-08 1984-11-08

Country Status (1)

Country Link
JP (1) JPH0526735Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0526735Y2 (enrdf_load_stackoverflow) 1993-07-07

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