JPS6365218U - - Google Patents

Info

Publication number
JPS6365218U
JPS6365218U JP15995686U JP15995686U JPS6365218U JP S6365218 U JPS6365218 U JP S6365218U JP 15995686 U JP15995686 U JP 15995686U JP 15995686 U JP15995686 U JP 15995686U JP S6365218 U JPS6365218 U JP S6365218U
Authority
JP
Japan
Prior art keywords
exhaust duct
semiconductor manufacturing
gaseous substance
gas
envelope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15995686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15995686U priority Critical patent/JPS6365218U/ja
Publication of JPS6365218U publication Critical patent/JPS6365218U/ja
Pending legal-status Critical Current

Links

JP15995686U 1986-10-17 1986-10-17 Pending JPS6365218U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15995686U JPS6365218U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15995686U JPS6365218U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365218U true JPS6365218U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31084872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15995686U Pending JPS6365218U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365218U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02122076A (ja) * 1988-10-28 1990-05-09 Teru Kyushu Kk 成膜方法および成膜装置
JPH04346669A (ja) * 1991-05-21 1992-12-02 Nec Yamagata Ltd 常圧ｃｖｄ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02122076A (ja) * 1988-10-28 1990-05-09 Teru Kyushu Kk 成膜方法および成膜装置
JPH04346669A (ja) * 1991-05-21 1992-12-02 Nec Yamagata Ltd 常圧ｃｖｄ装置

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