JPS6185055U - - Google Patents
Info
- Publication number
- JPS6185055U JPS6185055U JP17057984U JP17057984U JPS6185055U JP S6185055 U JPS6185055 U JP S6185055U JP 17057984 U JP17057984 U JP 17057984U JP 17057984 U JP17057984 U JP 17057984U JP S6185055 U JPS6185055 U JP S6185055U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- center axis
- holders
- insulated
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 1
Description
第１図は、この考案の一実施例を示す断面図で
ある。第２図は、この考案の一実施例を示す側面
図である。第３図は、従来のＱレンズ装置を示す
断面図である。第４図は、Ｑレンズを示す斜視図
である。
５…Ｑレンズ、５ａ，５ｂ，５ｃ，５ｄ…電極
列、９…ロータリーフイードスルー、１８…保持
金具、ＡＳ…大気側、ＶＳ…真空側、ＡＸ…中心
軸。
FIG. 1 is a sectional view showing an embodiment of this invention. FIG. 2 is a side view showing an embodiment of this invention. FIG. 3 is a sectional view showing a conventional Q lens device. FIG. 4 is a perspective view of the Q lens. 5...Q lens, 5a, 5b, 5c, 5d...electrode array, 9...rotary leaf through, 18...holding metal fitting, AS...atmosphere side, VS...vacuum side, AX...center axis.
Claims (1)
４つの保持具に絶縁してそれぞれ固定し、各保持
具を大気側からロータリーフイードスルーを介し
てＱレンズの中心軸に対して同じ距離ずつ移動さ
せるようにしたことを特徴とするＱレンズ装置。 The four electrode rows of the Q lens provided on the vacuum side are insulated and fixed to four holders, and each holder is connected from the atmosphere side to the center axis of the Q lens at the same distance from the rotary leaf through. A Q lens device characterized in that it is moved in steps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17057984U JPS6185055U (en) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17057984U JPS6185055U (en) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185055U true JPS6185055U (en) | 1986-06-04 |
Family
ID=30728286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17057984U Pending JPS6185055U (en) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185055U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162700U (en) * | 1988-04-30 | 1989-11-13 | ||
| JP2003028999A (en) * | 2001-07-11 | 2003-01-29 | Ebara Corp | Charged particle beam controller, charged particle beam optical device using the same, charge particle beam defect inspection device and control method for charged particle beam |
| JP6173552B1 (en) * | 2016-05-27 | 2017-08-02 | エム・ベー・サイエンティフィック・アクチボラゲットＭｂ Ｓｃｉｅｎｔｉｆｉｃ Ａｂ | Electron spectrometer |
-
1984
- 1984-11-09 JP JP17057984U patent/JPS6185055U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162700U (en) * | 1988-04-30 | 1989-11-13 | ||
| JP2003028999A (en) * | 2001-07-11 | 2003-01-29 | Ebara Corp | Charged particle beam controller, charged particle beam optical device using the same, charge particle beam defect inspection device and control method for charged particle beam |
| JP6173552B1 (en) * | 2016-05-27 | 2017-08-02 | エム・ベー・サイエンティフィック・アクチボラゲットＭｂ Ｓｃｉｅｎｔｉｆｉｃ Ａｂ | Electron spectrometer |