JP6173552B1 - Electron spectrometer - Google Patents

Abstract

Provided is a technique for realizing an observation image without distortion in a charged particle spectrometer without sample manipulation. A lens system having an optical axis for transporting charged particles emitted from a sample to a measurement region; deflectors for deflecting the charged particles in a direction perpendicular to the optical axis; And a detector configuration for detecting the position of the charged particles, and a part of the lens system 12 is displaced in a predetermined direction in synchronization with the deflection of the charged particle beam. [Selection] Figure 2

Description

  The present invention relates generally to electron spectrometers, and more particularly to novel means and methods for operating in angular mode.

BACKGROUND OF THE INVENTION In a hemispherical analysis device type photoelectron spectrometer, the central component is a measurement region in which the energy of electrons is analyzed. The measurement region is formed by two concentric hemispheres mounted on the base plate and having an electrostatic field applied between them. Electrons enter the measurement region through the entrance, electrons that enter the region between the hemispheres in a direction nearly perpendicular to the base plate are deflected by the electrostatic field, and electrons with a range of kinetic energy defined by the deflection field are After going through the semicircle, the detector configuration will be reached. In a typical instrument, electrons are common and substantially straight from their source (typically a sample that emits electrons after excitation with photons, electrons, or other particles) to the entrance of the hemisphere. Are transported by an electrostatic lens system comprising a plurality of lenses having a plurality of optical axes.

  The lens system and detector configuration will only accept electrons emitted in a limited area perpendicular to the lens axis and within a limited angular range. Furthermore, the source must be positioned within a narrow range in the z direction to achieve the best properties (in terms of sensitivity and resolution). This requires mounting the sample on a manipulator that allows both movement and rotation in all coordinate directions, ie 6 degrees of freedom.

  For example, in many applications of angle-resolved photoelectron spectroscopy (ARPES), a complete measurement requires complete detection of a solid angle with a 30 degree full cone opening from a well-aligned sample. Depending on the sample and the excitation / kinetic energy, the required angular range may vary. Angular resolution requirements also vary from application to application, but typically range from 1 to 0.1 degrees. The desired spread at energy resolution is from 0.5 eV to 0.5 meV depending on the application. To achieve high resolution measurements, the analyzer configuration must have sufficient angle and energy resolution, but the hemispherical analyzer configuration emits electrons within a limited angular range perpendicular to the lens axis. The sample manipulator must have very high precision movement and reproducibility. The manipulator is required to accurately rotate and tilt the sample in order to build a complete 30 degree solid angle data set.

  However, in recent years lighting systems have reached much higher levels of spatial resolution, which means that very fine crystallites can be observed. This makes manipulation, that is, sample rotation, very difficult.

  One way to remove sample manipulation is to provide a second deflector in the lens near the first deflector to carry the electron beam to the entrance to the measurement area aligned with the optical axis of the lens. is there.

  A spectroscope provided with a deflector in such a lens is sold by VG Scienta AB.

  Despite the fact that this system eliminates the need for sample manipulation, there is still some distortion in the recorded image.

SUMMARY OF THE INVENTION In order to improve the quality of recorded images, the inventors have devised a new device that also eliminates the need for sample manipulation and in addition provides less distortion.

  This provides a hemispherical analytical device type charged particle spectrometer for analyzing particle emission samples. A spectrometer forms a particle beam of the charged particles and an inlet that allows the particles to enter the measurement area and transports the particles between the particle emission sample and the inlet of the measurement area The lens system has a substantially straight optical axis, and the analyzer has at least one coordinate perpendicular to the optical axis of the lens system before the particle beam enters the measurement region. A detector configuration comprising a deflector configuration in a lens comprising a deflector configured to deflect a particle beam in a direction (x, y) and a detector configuration for detecting the position of charged particles in a measurement region Are configured to determine the position of charged particles in two dimensions, one of which is an indicator of the energy of the particle and one of which is an indicator of the starting direction or starting position of the particle. The inventive idea is that at least a part of the lens is displaced in at least a first coordinate direction with respect to the axis between the sample spot and the analyzer inlet (i.e. incrementally from one position to a slightly different position). Moving) and deflecting the particle beam once in the lens system. The displacement is performed in synchronism with the deflection of the particle beam, so that the trajectory of the charged particles will enter the measurement region. The particle beam will therefore enter the lens “off-axis” and cause the beam to be focused at a different point.

  The term “nominal position” of the lens or lens axis means that the particle beam traveling along the horizon from the sample spot to be considered continues to the lens axis and is focused on the entrance slit at a point coincident with the lens axis. Should be interpreted to mean a situation.

  In particular, a beam with a starting direction that deviates from the horizontal, which will be focused above the entrance slit in front of the measurement area at the nominal position of the lens, will have a point below the slit when displaced in an appropriate manner. It should be noted that it can be focused on.

  It is therefore sufficient to provide one deflection stage in the lens in order to bring the beam horizontal, ie aligned with the nominal optical axis or at least parallel.

  Some possible ways to achieve this effect include, for example, tilting the lens, bending the lens at some point along its length, or bending the entire lens in a coordinate direction of interest. and so on.

  In one embodiment, the lens is multi-directional pivot point at the end of the lens adjacent to the entrance of the measurement area so that the lens can be tilted about the pivot point in the coordinate direction (x, y). Is hung.

  At least a first tilting mechanism configured to tilt the lens in the coordinate direction in synchronism with the deflection of the particle beam is also provided.

  In one embodiment of the spectrometer, the mechanism for tilting the lens comprises a motor, an actuator rod connected to the motor, and a spring loaded device arranged to hold the lens against the tilt mechanism. Prepare.

  Preferably, the spectroscope is arranged at right angles to the first tilting mechanism and is configured to tilt the lens in the second coordinate direction (x, y) in synchronism with the deflection of the particle beam. And the spring loaded device is disposed at an angular distance of about 135 ° symmetrically opposite the first and second tilting mechanisms.

  In another embodiment, the entire lens is suspended in a mechanism that allows it to be moved in the desired coordinate direction.

  In yet another embodiment, the lens is subdivided into a plurality of lens elements, at least two lens elements, which are connected so that the lens can be bent at the location where the elements are joined. .

  All of the above embodiments achieve the same result that allows the particle beam to be realigned by using one single deflector unit.

  In a second aspect, the present invention provides a method for determining at least one parameter relating to charged particles emitted from a particle emission sample, the method using a lens system having a substantially straight optical axis. Forming a particle beam of the charged particles and transporting the particles between the particle emission sample and the inlet of the measurement region so that the lens can be tilted in the coordinate direction (x, y) The lens is hung at the end of the lens adjacent to the entrance of the measurement area at a multi-directional pivot point, and the method further includes bringing the particle beam into the optical axis of the lens system before entering the measurement area. A step of deflecting in at least a first perpendicular coordinate direction (x, y), and a step of detecting the position of the charged particle in the measurement region, The step of detecting the position of the charged particle, which is an indicator of the at least one parameter, involves detecting the position in two dimensions, one of which is an indicator of the energy of the particle, one of which is the particle It becomes an index of the starting direction or starting position of.

  In one embodiment, the lens is tilted in the coordinate direction in synchronism with the deflection of the particle beam, and the trajectory of the charged particles will enter the measurement region.

  In another embodiment, the entire lens is moved and in a further embodiment the lens is bent.

  Further scope of applicability of the present invention will become apparent from the detailed description given below and the accompanying drawings, which are given by way of illustration only and therefore should not be considered as limiting the present invention.

1 schematically illustrates a portion of an electron spectrometer that embodies novel features in operation in angular mode. Fig. 2 shows the same device as shown in Fig. 1 with the lens tilted slightly according to the new feature. A multi-directional hinge is illustrated. 1 schematically illustrates a manipulator system for tilting a lens in at least one coordinate direction. 1 schematically illustrates a control system. It is a figure which compares each between particle beams in a lens which has a deflector, and a lens which does not have. It is a figure which compares between each of the particle beam of the non-inclined lens which has a deflector, and the inclined lens which has a deflector. Fig. 2 illustrates a double deflection of light using a prism. Figure 4 illustrates lens tilt and single deflection using a prism. Fig. 2 illustrates a mechanism for moving the entire lens. The bending of the lens is illustrated. 1 schematically illustrates a straight beam traveling through a lens. Fig. 4 schematically illustrates a state in which a beam is emitted from a sample at an angle and travels through a lens. 1 schematically illustrates a beam emitted from a sample at an angle and traveling across the optical axis through a lens. Fig. 15 schematically illustrates beam deflection as shown in Fig. 14; Fig. 14 schematically illustrates the same situation as Fig. 13; FIG. 17 schematically illustrates the effect of tilting the lens from the position shown in FIG. Fig. 18 schematically illustrates beam deflection in the situation shown in Fig. 17; 1 schematically illustrates a prior art system according to WO 2013/133739. 1 schematically illustrates a prior art system according to WO 2013/133739. It is the recording image obtained by the prior art system and this system, respectively.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS FIG. 1 shows a portion of an electron spectrometer embodying the invention, in particular a sample 10, an electron lens 12 with an optical axis 13, a pair of deflectors 14a, 14b, a hemispherical analyzer M. The entrance slit 16a to the measurement area (only indicated by the broken line), the hinge mechanism 18 that is rigidly attached to the body of the lens 12 via the beam 20 and suspends the lens 12 at multi-directional pivot points. Illustrated. The hinge 18 is attached to the base plate 22 of the hemispherical analyzer M. There is a second slit 16b inside the measurement region.

  The novelty of the device resides in the tilting mechanism 24 in the preferred embodiment. This mechanism comprises a motor 26 in the first embodiment, preferably an electric motor, preferably a stepping motor.

  The motor is controlled by a control unit CU that also controls the voltage on the deflectors 14a, 14b, the control being shown schematically in broken lines and will be described further below.

  The motor 26 is configured to actuate a push member 27 that can move vertically. The push member 27 is suitably an actuator rod having an upper end attached to a support plate 28 on which the lens 12 is placed.

  In FIG. 2, the lens 12 is tilted slightly from the horizontal, ie the entrance area to the lens 12 is moved from the horizontal by a small distance (up to about 5 mm). This is clearly seen in the fact that the optical axis 13 'of the lens deviates from its nominal position 13.

  The hinge mechanism 18 will now be briefly described with reference to FIG. Such a hinge mechanism is provided in most electron spectrometers according to the prior art and is used for adjustment purposes and does not form part of the present invention.

  The hinge mechanism includes a beam member 20 that is rigidly attached (eg, welded or bolted) to the lens body 12. The beam member 20 projects from the proximal end of the lens body. At the end of the protruding portion of the beam 20, the beam has a through hole 31. The through-hole refers to the enlarged portion surrounded by a circle and has a larger diameter at the top than at the bottom, ie, there is a small step 32 at the bottom of the hole. Note that the dimensions are not to scale. There is a sleeve member 34 in the hole. For this reason, due to the step 32, there will be a small circumferential gap G between the sleeve 34 and the inner periphery of the through hole 31. A spring member 36, suitably a cup spring, is provided around the sleeve 34. Bolts or screws 38 are secured within the base plate 22 and when the screws are tightened, the springs will exert a strong downward force to ensure electrical contact. The bottom surface of the beam 20 at the hole is slightly concave (not shown).

This structure allows slight movement of the lens 12 in all directions.
FIG. 4a shows a device for enabling tilting of the lens in at least one direction.

  Apart from one vertically oriented mechanism 24 ′ that can move the lens 12 in the X direction, a horizontally arranged mechanism 24 ″ for moving the lens 12 in the Y direction can also be provided. A spring loaded support device 35 is also provided. It comprises a support plate 36, a guide rod 37 attached to a skeleton (not shown) so as to be slidable, and a spring 38 that applies a pushing force onto the support plate 36. This device 35 holds the lens 12 in contact with the tilting mechanisms 24 ′, 24 ″.

In operation, control unit 28 will perform several actions such as setting energy, setting lens voltage, and defining energy E and angle Θ _x by setting voltage to deflectors 14a, 14b. . The motor is energized so that the lens is tilted incrementally to a specified degree T, which can be a fraction of a millimeter per increment, with the maximum tilt T being a few mm, i.e. about max. ± 10 mm as shown in FIG.

When these actions are taken, an exposure is made and this operation is repeated for a new set of values of energy E and angle Θ _x .

  For this reason, the image (2D) is constructed by a stepwise procedure in which a plurality of exposures are performed by the detector.

  This procedure of setting the motor increment in relation to the deflector voltage will also be referred to as a tilting mechanism (ie motor and actuator rod) that operates in synchronism with the deflection of the beam.

  In FIG. 4b, an alternative embodiment is illustrated. It comprises a ball joint 29 (spherical bearing), i.e. suitably a metal but other usable material, comprising a socket mounted (encapsulated) ball that is attached to the lens body. Using a rigid rod 27 'actuated by a motor 26' as shown limits the movement to one coordinate direction (X direction) in this embodiment.

This time, the actual control of the synchronous operation will be briefly explained.
FIG. 5 schematically illustrates the control.

  The control unit CU is schematically indicated by a box drawn in broken lines and comprises a memory unit for storing data and respective digital-analog converters DAC for the lens voltage and for the motor drive, A processor P configured to retrieve data from the memory is provided, and the data is converted into an analog signal for setting a voltage in the deflector and operating the motor in synchronization with the voltage setting in the tilting mechanism.

  For this reason, the parameter setting is performed by providing data from the table DTab (8) to the memory of the control unit CU. A corresponding table MTab is provided for the incremental operation of the motor. A plurality of DACs (digital analog converters) are provided, one for each deflector plate 1-8 in element O4 (8 pole configuration).

Similarly, there is a DAC for motor drive.
The DTab (8) and MTab tables each contain a voltage value corresponding to each starting angle Θ _x for the electrons to be scanned. Therefore, the table contains a value that is a function of the start angle theta _x.

As already indicated above, a complete scan cycle consists of a) a voltage for deflection for a given starting angle Θ _x and b) actuating the motor and correspondingly the rod 27 (shown in FIG. 1). Setting the voltage (setpoint (V)) corresponding to the desired movement of the lens by moving the same element) and c) a) and b) at all angles Θ _x , eg − Repeating for 5 ° to + 5 °.

  Coupled to the motor is a potentiometer PM that will produce a voltage (actual value) according to the rotation of the motor shaft, and when the actual value = set value, the PID stops the motor , Exposure will be done.

This time, the operation of the system incorporating the novel tilt mechanism will be described.
FIG. 6a schematically shows an electron beam emitted from an emitted sample spot and how the beam is affected by a simplified lens. Each dot represents a point on the lens through which the electron beam passes and is refracted, that is, a spot where the beam changes direction. In this simplified illustration, a single lens element is shown having focus on the slit at the right end. As can be clearly seen in this simplified diagram, electrons traveling in a straight line, that is, electrons at a starting angle of 0 °, are focused on the slit, enter the measurement region in a straight line and start Electrons having an angle> 0 ° (eg 15 °) will be spot-focused differently.

  In FIG. 6b, a deflector is introduced. As can be seen, as a result of the deflection, the electrons take a direction away from the horizontal and out of the slit.

  FIG. 7a, which is similar to FIG. 6b, should be compared to FIG. 7b where the lens is tilted (the position where the dashed line is not tilted) and the deflector is driven (the electron beam is shown by the solid line).

  The dashed beam line (as a continuation of the solid electron beam) in FIG. 7b shows the electron beam when the deflector is not driven. It is important to recognize that the tilting of the lens must be sufficient so that the focus without deflection hits the slit member at a point below the slit. When the deflector is driven, it is led to a new horizontal path, so that it just hits the slit and enters the measurement area.

  It is important to recognize that tilting the lens is a compromise. What we want to achieve is to move the entire lens vertically. This is certainly possible, but would be more complicated because the lens is placed in a bulky (800 mm long) vacuum chamber. Instead, a very slight tilt of the lens achieves the same effect, since the tilt angle is so small that it can be ignored and is equivalent to the vertical translation of the lens for all practical purposes. Moving the sample, i.e. relative movement of the sample / lens, is possible as well, but again the sample is attached to a very bulky structure and moving it is complicated.

A mechanism for moving the entire lens is shown in FIG. 10 and is further described below.
A further possibility would be to bend the lens. In practice, the lens will consist of multiple segments, and it would be possible to actually cause a slight bend at the junction between the two segments. Such bending will, of course, be equivalent to the tilt disclosed herein for all practical purposes. Such bending is shown in FIG. 11 and is further described below.

  Thus, in a general sense, it can be said that at least a part of the lens is displaced (or moved) in a desired coordinate direction.

  In FIG. 7b it can clearly be seen that the tilting and deflection of the synchronized method will cause the electrons to enter the slit along a substantially horizontal axis. The very small deviation of the lens from the horizontal due to tilting is negligible. The lens is on the order of 800 mm long, and the maximum deflection at the lens aperture is 5 mm, usually 1-2 mm.

  An analogy from how the system operates can be to imagine an image that is focused by a single lens on the screen at a given spot. If the lens is moved in one direction, the light will go out of the lens center and as a result the image will also move on the screen. A prism can be placed between the lens and the screen to bring the image back to the center. The prism “deflects” the light in parallel, which is exactly what the deflector does to the electron beam.

  A situation similar to the prior art using two deflections using two prisms P1, P2 is shown in FIG. Thus, the light from the light source LS has a start angle of about 15 °, is focused by the lens L, is refracted the first time P1 so as to indicate a point below the slit S, and enters the slit S. Thus, the second deflection P2 is performed.

  FIG. 9 shows a situation similar to the present invention, i.e., moving the lens to deflect once.

  FIG. 9a shows the light emitted from the light source LS. The light is focused by the lens L and refracted by the prism P2. As can be seen, the light passes through the slit S at an angle.

  FIG. 9b shows the situation where the lens L has been moved downwards a small distance (eg 2 mm) as indicated by the arrows. In this way, the optical axis is now also displaced so that the light will be focused differently. Thus, when correctly positioned, prism P2 will refract (deflect) it so that the light is aligned parallel to the optical axis.

This is completely similar to the situation of FIG.
In FIG. 10, one alternative mechanism for displacing the optical axis is schematically shown, in particular a mechanism for vertically displacing the entire lens.

  Thus, in the illustrated embodiment, the lens 12 is suspended through the support plate 28 by the rod 27, similar to the embodiment illustrated in FIG. Of course, in this embodiment a ball joint type suspension 29 would be equally applicable. The rod is actuated by a motor 26.

  FIG. 10 a shows the lens 12 in the “nominal position”. In FIG. 10 b, the motor 26 retracts the rod 27 so that the lens 12 is moved slightly by a distance D in the vertical direction as indicated by the arrow A.

  FIG. 11 schematically illustrates an embodiment in which the lens is subdivided into two segments via a joint 110 at some point along the lens 12. The end of the lens must be pivotably suspended. Thus, this embodiment allows the segment to be moved relative to the optical axis at the junction 110. FIG. 11 a is the “nominal” position, and FIG. 11 b shows a bent situation (slightly exaggerated), ie the part of the lens 12 is displaced by a distance D ′ at the joint 110.

  The mechanism that allows this movement can be the same or similar to that shown in FIG. 10, but a ball joint may be preferred in this embodiment.

  The above described invention will be further described in terms of its function compared to prior art solutions by Scienta. The new solution is based on the inherent characteristics of the lens and is illustrated in FIGS.

  FIG. 12 shows an electron beam emitted from a sample ([Equation 1]) at an angle “0”. It travels straight through the lens along its optical axis OA, enters the slit, passes through both slits, and proceeds to the measurement region M.

  FIG. 13 shows what happens to the electron beam emitted from the sample at an angle. It passes through the lens, but leaves a different location and comes off the slit. The trajectory in the lens is illustrated with a seemingly irregular curve, merely to explain the complexity of the lens.

  In FIG. 14, the sample has been moved to a slightly offset position (symbolized by [Equation 2]). The electron beam will be off the slit again, but if the sample is moved properly, it exits the lens at the point where it straddles the optical axis. Thus, referring to FIG. 15, one single deflector provided at the exit end of the lens at the slit will deflect the beam through the slit along the optical axis into the measurement region.

  Now, moving the sample can move the lens or, as shown in FIGS. 16 and 17, the lens by a small angle α from the horizontal position shown in FIG. 16 to the tilted position shown in FIG. Is equivalent to tilting. Tilt is much simpler than moving the entire lens, and the resulting angle is so small that the result will be virtually the same as if the entire lens was moved, and is important to explain the effects of the present invention. It will have no meaning.

  Thus, if the lens is tilted properly, the beam will exit the lens near the slit and straddle the original optical axis OA, i.e., the axis running through the pair of slits.

  If a single deflector is now provided (as previously shown in FIG. 15), referring to FIG. 18, the beam can be returned along the original optical axis OA and through the slit. Will travel to the measurement area M.

  For comparison, FIG. 19 and FIG. 20 illustrate what Scienta does in its international application 2013/133739.

  As shown in FIG. 19, starting with the same situation as FIG. 12, Sienta refers to FIG. 20 and changes two so that the beam trajectory eventually aligns with the optical axis and reaches the slit. Provide a deflector.

  FIG. 21 (a) and FIG. 21 (b) show a comparison between the prior art system and recorded images obtained by this system. FIG. 21 (a) is a recorded image obtained by a prior art system having two deflectors. Similar to the electron spectrograph according to WO 2013/133739 by Scienta, the prior art system includes two deflectors. FIG. 21B is a recorded image obtained by the present electron spectrometer having an angle correction lens. The recorded image shown in FIG. 21B has significantly less distortion than the recorded image shown in FIG.

Claims (13)

A hemispherical analytical device type charged particle spectrometer for analyzing a particle emission sample (10), the spectrometer comprising:
A measurement region (M) having an inlet that allows the particles to enter the measurement region (M);
A lens system (12) that forms a particle beam of the charged particles and transports the particles between the particle emission sample and the entrance of the measurement region, the lens system comprising a substantially straight optical Having an axis (13), the spectrometer further comprising:
The particle beam is configured to be deflected in at least one coordinate direction (x, y) perpendicular to the optical axis (13) of the lens system before the particle beam enters the measurement region (M). A deflector configuration (14a, 14b) in the lens;
A detector configuration (9) for detecting the position of the charged particles in the measurement region;
The detector arrangement (9) is configured to determine the position of the charged particle in two dimensions, one of which is an indicator of the energy of the particle, one of which is the starting direction of the particle or It becomes an index of the starting position,
At least a first mechanism (26; 26 ′; 26 ″) at least a portion of the lens (12) with at least a first coordinate direction relative to an axis between a sample spot and the inlet of the analyzer. Is configured to be displaced in synchronization with the deflection of the particle beam,
The lens is suspended at a multi-directional pivot point at the end of the lens adjacent to the entrance of the measurement area, so that the lens is in the coordinate direction (x, y) around the pivot point. Can be tilted,
The spectroscope , wherein the mechanism for moving at least the entrance region of the lens system (12) is a tilting mechanism . The mechanism for tilting the lens includes a motor, an actuator rod connected to said motor, said lens is the tilting mechanism is arranged so as to keep in touch with (26; '26''26) Spectrometer according to claim 1 , comprising a spring-loaded device (35, 36, 37, 38). A further tilting mechanism arranged perpendicular to the first tilting mechanism (26, 26 ') and configured to tilt the lens in a second coordinate direction (x, y) in synchronism with the deflection of the particle beam. (26 ″)
The spectroscope according to claim 2, wherein the spring loaded device (35) is symmetrically opposed to the first and second tilting mechanisms and is arranged at an angular distance of 135 ° . A control unit (CU) comprising a processor (P) configured to retrieve data from the memory;
The data performs voltage setting to the deflector, for operating the motor in the tilting mechanism in synchronization with the voltage setting, is converted into an analog signal, to any one of claims 1 to 3 The spectroscope described. The data is provided as tables (DTab (8), MTab), one set of tables is for each deflector plate (1-8) in the deflector configuration, and one table is for the motor. The spectroscope of claim 4 , wherein a specific voltage setting is correlated with a specific motor setting to provide a specific tilt of the lens. A hemispherical analytical device type charged particle spectrometer for analyzing a particle emission sample (10), the spectrometer comprising:
A measurement region (M) having an inlet that allows the particles to enter the measurement region (M);
A lens system (12) that forms a particle beam of the charged particles and transports the particles between the particle emission sample and the entrance of the measurement region, the lens system comprising a substantially straight optical Having an axis (13), the spectrometer further comprising:
The particle beam is configured to be deflected in at least one coordinate direction (x, y) perpendicular to the optical axis (13) of the lens system before the particle beam enters the measurement region (M). A deflector configuration (14a, 14b) in the lens;
A detector configuration (9) for detecting the position of the charged particles in the measurement region;
The detector arrangement (9) is configured to determine the position of the charged particle in two dimensions, one of which is an indicator of the energy of the particle, one of which is the starting direction of the particle or It becomes an index of the starting position,
At least a first mechanism (26; 26 ′; 26 ″) at least a portion of the lens (12) with at least a first coordinate direction relative to an axis between a sample spot and the inlet of the analyzer. Is configured to be displaced in synchronization with the deflection of the particle beam,
The mechanism for moving at least a portion of the lens (12) in at least a first coordinate direction relative to the axis between the sample spot and the analyzer inlet comprises moving the lens (12) in the coordinate direction. A spectroscope which is a mechanism for bending to (x, y). The spectroscope according to claim 2 , wherein the mechanism comprises a ball joint (29) connecting the actuator rod (27 ') to the lens body. A method for determining at least one parameter for charged particles emitted from a particle emission sample (10) comprising:
A lens system (12) having a substantially straight optical axis (13) forms a particle beam of the charged particles, the particles being emitted from the particle emission sample (10) and the entrance (8) of the measurement region (3). Transporting between and
Deflecting the particle beam in at least a first coordinate direction (x, y) perpendicular to the optical axis of the lens system before the particle beam enters the measurement region;
Detecting the position of the charged particles in the measurement region, the position being an indicator of the at least one parameter;
The step of detecting the position of the charged particle involves detecting the position in two dimensions, one of which is an index of the energy of the particle, one of which is an index of the start direction or start position of the particle. And the method further includes
Displacing at least a part of the lens (12) in the coordinate direction relative to the axis between the sample spot and the inlet of the analyzer in synchronism with the deflection of the particle beam, whereby the charging Ri trajectories of the particles entering the measuring region,
The lens is suspended at a multidirectional pivot point at the end of the lens adjacent to the entrance of the measurement area;
Tilting the lens in the coordinate direction (x, y) . The method of claim 8 , wherein the displacing step is incremental. A method for determining at least one parameter for charged particles emitted from a particle emission sample (10) comprising:
A lens system (12) having a substantially straight optical axis (13) forms a particle beam of the charged particles, the particles being emitted from the particle emission sample (10) and the entrance (8) of the measurement region (3). Transporting between and
Deflecting the particle beam in at least a first coordinate direction (x, y) perpendicular to the optical axis of the lens system before the particle beam enters the measurement region;
Detecting the position of the charged particles in the measurement region, the position being an indicator of the at least one parameter;
The step of detecting the position of the charged particle involves detecting the position in two dimensions, one of which is an index of the energy of the particle, one of which is an index of the start direction or start position of the particle. And the method further includes
Displacing at least a part of the lens (12) in the coordinate direction relative to the axis between the sample spot and the inlet of the analyzer in synchronism with the deflection of the particle beam, whereby the charging Particle trajectory enters the measurement area,
The method wherein the lens is bent at a point to effect the displacement . A hemispherical analytical device type charged particle spectrometer for analyzing particle emission samples,
The charged particle spectrometer is
A measurement region having an entrance into which charged particles emitted from the particle emission sample and constituting a particle beam enter;
A lens that transports the charged particles between the particle emission sample and the inlet of the measurement region and having a substantially straight optical axis;
A deflector arrangement disposed within the lens and deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens before the particle beam enters the measurement region;
A detector configuration for detecting the position of the charged particles in the measurement region;
At least a portion of the lens is configured to be displaced in synchronism with deflection of the particle beam in at least the first coordinate direction relative to an axis between a sample spot and the entrance of the charged particle spectrometer. With a mechanism,
The detector configuration is configured to determine a position of the charged particle in two dimensions;
One of the positions of the charged particles in two dimensions is an indicator of the energy of the charged particles,
The other of the positions of the charged particles in two dimensions is an indicator of the starting direction or starting position of the charged particles,
The lens is configured to be tilted in the first coordinate direction about the pivot point by being suspended at a multi-directional pivot point at an end of the lens adjacent to the entrance of the measurement region;
The mechanism includes a charged particle spectrometer including a first tilting mechanism for moving an entrance region of the lens. 12. The mechanism of claim 11, further comprising a motor, an actuator rod connected to the motor, and a spring loaded device arranged such that the lens remains in contact with the first tilting mechanism. Charged particle spectrometer. 13. The mechanism of claim 12, further comprising a second tilting mechanism disposed at a right angle to the first tilting mechanism and tilting the lens in a second coordinate direction in synchronism with deflection of the particle beam. Charged particle spectrometer.