JPS6184369A - イオン化装置 - Google Patents

イオン化装置

Info

Publication number
JPS6184369A
JPS6184369A JP59204081A JP20408184A JPS6184369A JP S6184369 A JPS6184369 A JP S6184369A JP 59204081 A JP59204081 A JP 59204081A JP 20408184 A JP20408184 A JP 20408184A JP S6184369 A JPS6184369 A JP S6184369A
Authority
JP
Japan
Prior art keywords
ionization
filaments
filament
electron
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59204081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338429B2 (enExample
Inventor
Koyo Tsuchiya
土谷　高陽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59204081A priority Critical patent/JPS6184369A/ja
Publication of JPS6184369A publication Critical patent/JPS6184369A/ja
Publication of JPS6338429B2 publication Critical patent/JPS6338429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP59204081A 1984-10-01 1984-10-01 イオン化装置 Granted JPS6184369A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59204081A JPS6184369A (ja) 1984-10-01 1984-10-01 イオン化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59204081A JPS6184369A (ja) 1984-10-01 1984-10-01 イオン化装置

Publications (2)

Publication Number Publication Date
JPS6184369A true JPS6184369A (ja) 1986-04-28
JPS6338429B2 JPS6338429B2 (enExample) 1988-07-29

Family

ID=16484462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59204081A Granted JPS6184369A (ja) 1984-10-01 1984-10-01 イオン化装置

Country Status (1)

Country Link
JP (1) JPS6184369A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63125672A (ja) * 1986-11-13 1988-05-28 Mitsubishi Electric Corp 薄膜形成装置
JPH01307211A (ja) * 1988-06-06 1989-12-12 Agency Of Ind Science & Technol 薄膜形成装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318434A (ja) * 1988-06-20 1989-12-22 Nec Corp マイクロ波受信装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63125672A (ja) * 1986-11-13 1988-05-28 Mitsubishi Electric Corp 薄膜形成装置
JPH01307211A (ja) * 1988-06-06 1989-12-12 Agency Of Ind Science & Technol 薄膜形成装置

Also Published As

Publication number Publication date
JPS6338429B2 (enExample) 1988-07-29

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