JPS6184084A - Q switch laser device - Google Patents

Q switch laser device

Info

Publication number
JPS6184084A
JPS6184084A JP20590184A JP20590184A JPS6184084A JP S6184084 A JPS6184084 A JP S6184084A JP 20590184 A JP20590184 A JP 20590184A JP 20590184 A JP20590184 A JP 20590184A JP S6184084 A JPS6184084 A JP S6184084A
Authority
JP
Japan
Prior art keywords
pulse
switch
frequency
controlling
pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20590184A
Other languages
Japanese (ja)
Inventor
Hiroshi Wada
弘 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20590184A priority Critical patent/JPS6184084A/en
Publication of JPS6184084A publication Critical patent/JPS6184084A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/117—Q-switching using intracavity acousto-optic devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10038—Amplitude control
    • H01S3/10046—Pulse repetition rate control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10053—Phase control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383—Parallel arrangements

Abstract

PURPOSE:To provide switching pulse oscillation with a high Q switching pulse peak value corresponding to that occurring when making the repeating frequency in half, by controlling a continuous oscillating solid-state laser by a plural of Q switches. CONSTITUTION:High frequency drivers 10, 10' are controlled by controlling signals 14, 15 of a pulse signal controlling circuit 13 which suppleis repeating pulses of a controlling signal 12 fed from an external pulse signal source 11 at one pulse intervals alternately to the two high frequency drivers 10, 10'. If the controlling signal 12 of the external signal source 11 is set at a repeating frequency of 20kHz, the frequency of Q switch pulses 16, 17 oscillating from laser oscillators 21, 22 would become a half of the set frequency, 10kHz, respectively. The Q switch pulses 16, 17 are combined by reflecting mirrors 18, 19 to produce a Q switch pulse output 20 with 20kHz.

Description

【発明の詳細な説明】 （産業上の利用分野） この発明はＱスイッチレーザ装置に関するものである。[Detailed description of the invention] (Industrial application field) The present invention relates to a Q-switched laser device.

（従来の技術） Ｑスイッチを用いた固体レーザ、たとえばＮｄ：ＹＡＧ
レーザは、その出力を、尖頭値の極めて高い、見損時間
幅の極めて短いＱスイッチパルス発振として発生しうる
事が知られておυ、この固体レーザを用いた、いわゆる
レーザ加工装置は。(Prior art) Solid-state laser using Q switch, for example Nd:YAG
It is known that a laser can generate output as a Q-switched pulse oscillation with an extremely high peak value and an extremely short missed time width, and so-called laser processing equipment using this solid-state laser has been developed.

精密加工、抵抗トリミング等に広く応用されている。最
近では、このレーザ加工装置による生産性を高めるため
その加ニスピードを上げる事が第１条件となりつつある
。このためレーザ発振器としても高い繰返しのＱスイッ
チパルス発振光を要求されている。Widely used in precision machining, resistance trimming, etc. Recently, in order to increase the productivity of this laser processing device, increasing the machining speed has become the first condition. For this reason, a laser oscillator is also required to provide Q-switched pulse oscillation light with high repetition rate.

このレーザ加工に用いる時のレーザ発振器として重要な
要素は、Ｑスイッチパルスの繰返し周波数が高く、発振
パルスの時間幅が広く、尖頭値が高いことである。しか
し、パルス繰返し周波数が高くなれば、発振パルスの時
間幅が広くなる性質があるため、結果的には尖頭値が低
下する事によって、加工性が低下する問題がある。Important factors for a laser oscillator used in this laser processing are that the repetition frequency of the Q-switch pulse is high, the time width of the oscillation pulse is wide, and the peak value is high. However, as the pulse repetition frequency becomes higher, the time width of the oscillation pulse tends to become wider, which results in a lower peak value, resulting in a problem of lower workability.

（発明の目的） 本発明の目的は、このような問題を解決し、連続発振固
体レーザを複数台のＱスイッチにより制御する事により
、Ｑスイッチパルスの尖頭値が繰返し周波数に対し１／
２、あるいは数分の１の繰返し周波数の尖頭値に相当す
る高いＱスイッチパルス発振を得られるようにしたＱス
イッチレーザ装置を提供する事にある。(Objective of the Invention) The object of the present invention is to solve such problems and to control a continuous wave solid-state laser using a plurality of Q-switches so that the peak value of the Q-switch pulse becomes 1/1/1 of the repetition frequency.
It is an object of the present invention to provide a Q-switched laser device capable of obtaining high Q-switched pulse oscillation corresponding to a peak value of a repetition frequency of 2 or a fraction.

（発明の構成） 本発明のＱスイッチレーザ装置は、連続発振する固体レ
ーザを音響光学的Ｑスイッチによりそれぞれパルス発振
させる複数のＱスイッチレーザと、これらＱスイッチレ
ーザの各出力パルスを合成して出力する合波手段と、前
記各Ｑスイッチを駆動して時系列的に１に異った位相の
出力パルスを出力させるＱスイッチ駆動手段とを含み構
成される。(Structure of the Invention) The Q-switched laser device of the present invention includes a plurality of Q-switched lasers in which continuous wave solid-state lasers are each oscillated into pulses by an acousto-optic Q-switch, and outputs a result of combining each output pulse of these Q-switched lasers. and a Q-switch driving means that drives each of the Q-switches to output output pulses having phases different from each other in time series.

（実施例） 次に図面により本発明の詳細な説明する。(Example) Next, the present invention will be explained in detail with reference to the drawings.

第１図は本発明の一実施例のブロック図である。FIG. 1 is a block diagram of one embodiment of the present invention.

本実施例は、２台のＱスイッチＹＡＧレーザ装置を配置
したものである。２台のレーザ共振器２１゜２２は、Ｙ
ＡＧロッド１．１′が、励起光源２゜２′と、集光器３
．３′により励起され、反射鏡４．４′と５．５′から
なる共振器中に置かれている。これらレーザ発振をＱス
イッチパルス化させる音響光学的Ｑスイッチ素子６．６
′は、溶融石英で作られた音響光学媒体７．７′に位相
回折格子８．８′を形成したトランスデー−す９，９′
によシ構成されている。これらトランスデユーサ９、９
′には高周波ドライバ１０．１０’によシ高周波信号が
印加されている。これら高周波ドライバ１０．１０’は
、外部パルス信号源１１からの制御信号１２により、こ
の制御信号の繰返しパルスを１パルス間隔て文旦に２台
の高周波ドライバ１０．１０’に供給するパルス信号制
御回路１３０制御信号１４．１５により制御される。In this embodiment, two Q-switched YAG laser devices are arranged. The two laser resonators 21 and 22 are Y
The AG rod 1.1' connects the excitation light source 2°2' and the condenser 3.
．． 3' and placed in a resonator consisting of reflectors 4.4' and 5.5'. Acousto-optic Q-switch element 6.6 that converts these laser oscillations into Q-switch pulses
' is a transducer 9,9' in which a phase diffraction grating 8,8' is formed on an acousto-optic medium 7,7' made of fused silica.
It is composed of These transducers 9, 9
A high frequency signal is applied to ' by a high frequency driver 10.10'. These high-frequency drivers 10.10' are pulse signal control circuits that, in response to a control signal 12 from an external pulse signal source 11, supply repetitive pulses of this control signal to the two high-frequency drivers 10.10' at one-pulse intervals. 130 control signal 14.15.

今、外部信号源１１０制御信号１２　’ｆｃ　２０　Ｋ
Ｈｚの繰返しに設定すると、各々のレーザ発振器２１゜
２２から発振するＱスイッチパルス１６．１７は、設定
周波数の１７２、りま！＋　１０　ＫＩ（ｚの繰返しに
なっている。これらＱスイッチパルス１６．１７は、反
射鏡１８．１９により合成され２Ｑ　ＩＧ（ｚのＱスイ
ッチ出力パルス２０となる。Now, external signal source 110 control signal 12'fc 20 K
When set to a repetition rate of Hz, the Q-switched pulses 16,17 oscillated from each laser oscillator 21, 22 will be 172, 172, 150Hz of the set frequency. + 10 KI (z) is repeated. These Q-switch pulses 16.17 are combined by a reflector 18.19 to become the Q-switch output pulse 20 of 2Q IG (z).

第２図はＮｄ：ＹＡＧレーザの動作特性の繰返し周波数
とその尖頭値との関係を示すグラフである。この図によ
シ、従来１台で２０　ｆＧ（ｚの繰返し周波数に設定し
た時に得られるＱスイッチパルスの尖頭値と比較すれば
、１０　ＫＨｚの尖頭値に相当する尖頭値出力が得られ
るので、約７５倍の極めて高いＱスイッチパルスが得ら
れる事になる。従って高速加工に応用する場合、繰返し
周波数を上げた時の尖頭値の低下を充分補う事が可能と
なる。FIG. 2 is a graph showing the relationship between the repetition frequency and the peak value of the operating characteristics of the Nd:YAG laser. According to this figure, if you compare the peak value of the Q-switch pulse obtained when setting the repetition frequency to 20 fG (z) with one conventional device, you can obtain a peak value output equivalent to a peak value of 10 KHz. Therefore, an extremely high Q-switch pulse of about 75 times can be obtained.Therefore, when applied to high-speed machining, it is possible to sufficiently compensate for the drop in peak value when the repetition frequency is increased.

また、１０台のレーザ発振器を配置し、時系列的に動作
させる事によＦ）　、２０　ＫＨｚの繰返し設定に対し
て得られる尖頭値は、第２図のグラフによると、　　２
ＫＨｚの尖頭値に相当する約４０倍の極めて高いＱスイ
ッチパルスが得られる事になる。Furthermore, by arranging 10 laser oscillators and operating them in time series, the peak value obtained for a repetition setting of 20 KHz is 2, according to the graph in Figure 2.
An extremely high Q-switched pulse of about 40 times the peak value of KHz is obtained.

（発明の効果） 本発明によれば、高い尖頭値のパルス出力が得られるの
で、レーザ加工への応用も更に高速に対応できる能力が
得られる。(Effects of the Invention) According to the present invention, since a pulse output with a high peak value can be obtained, it is possible to obtain the ability to respond to application to laser processing at even higher speed.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例のブロック図、第２図は本発
明に用いられるＮ　ｄ　：　Ｙ　Ａ　Ｃ）レーザ一台の
動作特性例を示すグラフである。図において、１．１′
・・・・・・ＹＡＧロッド、　　２．　２’・・・・・
・励起光源、３．３′・・・・・・集光器、４．　４’
、　　５．　５’・・・・・・反射ｆｉ、６．　６’・
・・・・・音響光学的Ｑスイッチ素子、７．７′・・・
・・・音響光学媒体、８．　８’・・・・・・位相回折
格子、　　９．　９’・・−・・・トランスデユーサ、
１０．１０’・・・・・・高周波ドライバ、１１・・・
・・・外部パルス信号源、　　１２．　１４．　１５・
・・・・・制御信号、１３・・・・・・パルス信号制御
回路、１６．１７・・・・・・レーザ発振器２２．２１
からのＱスイッチパルス発振出力、１８．１９・・・・
・・反射鏡、２０・・・・・・合成、されたＱスイッチ
パルス発振波形、２１．２２・・・・・・レーザ発振器
である。 亡゛／FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a graph showing an example of the operating characteristics of one N d : Y AC) laser used in the present invention. In the figure, 1.1'
...YAG rod, 2. 2'・・・・・・
- Excitation light source, 3.3'...Concentrator, 4. 4'
, 5. 5'...Reflection fi, 6. 6'・
...Acousto-optic Q-switch element, 7.7'...
...Acousto-optic medium, 8. 8'... Phase diffraction grating, 9. 9'---Transducer,
10.10'...High frequency driver, 11...
...external pulse signal source, 12. 14. 15.
... Control signal, 13 ... Pulse signal control circuit, 16.17 ... Laser oscillator 22.21
Q switch pulse oscillation output from 18.19...
...Reflector, 20...Synthesized Q-switch pulse oscillation waveform, 21.22...Laser oscillator. Death/

Claims (1)

【特許請求の範囲】[Claims] 連続発振する固体レーザを音響光学的Ｑスイッチにより
それぞれパルス発振させる複数のＱスイッチレーザと、
これらＱスイッチレーザの各出力パルスを合成して出力
する合波手段と、前記各Ｑスイッチを駆動して時系列的
に互に異った位相の出力パルスを出力させるＱスイッチ
駆動手段とを含むＱスイッチレーザ装置。A plurality of Q-switched lasers each of which pulses a continuously oscillating solid-state laser using an acousto-optic Q-switch;
It includes a combining means for combining and outputting each output pulse of these Q-switch lasers, and a Q-switch driving means for driving each of the Q-switches to output output pulses having different phases in time series. Q-switched laser device.
JP20590184A 1984-10-01 1984-10-01 Q switch laser device Pending JPS6184084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20590184A JPS6184084A (en) 1984-10-01 1984-10-01 Q switch laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20590184A JPS6184084A (en) 1984-10-01 1984-10-01 Q switch laser device

Publications (1)

Publication Number Publication Date
JPS6184084A true JPS6184084A (en) 1986-04-28

Family

ID=16514620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20590184A Pending JPS6184084A (en) 1984-10-01 1984-10-01 Q switch laser device

Country Status (1)

Country Link
JP (1) JPS6184084A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147858U (en) * 1987-03-19 1988-09-29
JPH0441257U (en) * 1990-08-06 1992-04-08
US20210305763A1 (en) * 2020-03-24 2021-09-30 David Stucker Composite fiber laser assembly

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147858U (en) * 1987-03-19 1988-09-29
JPH0441257U (en) * 1990-08-06 1992-04-08
JP2528458Y2 (en) * 1990-08-06 1997-03-12 株式会社シマノ Fishing rod
US20210305763A1 (en) * 2020-03-24 2021-09-30 David Stucker Composite fiber laser assembly

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