JPS6183040U - - Google Patents
Info
- Publication number
- JPS6183040U JPS6183040U JP16832884U JP16832884U JPS6183040U JP S6183040 U JPS6183040 U JP S6183040U JP 16832884 U JP16832884 U JP 16832884U JP 16832884 U JP16832884 U JP 16832884U JP S6183040 U JPS6183040 U JP S6183040U
- Authority
- JP
- Japan
- Prior art keywords
- die bonding
- tip
- clamping jig
- bonding arm
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Die Bonding (AREA)
Description
第１図はこの考案の一実施例を示す斜視図、第
２図は第１図の防振装置を示す分解斜視図である
。
１…ダイボンデイングアーム、２…コレツト、
３…Ｘ−Ｙテーブル、５…ブラケツト、７…挾持
台具、１０…偏心ローラ。
FIG. 1 is a perspective view showing an embodiment of this invention, and FIG. 2 is an exploded perspective view showing the vibration isolator of FIG. 1. 1...Die bonding arm, 2...Collect,
3... X-Y table, 5... bracket, 7... clamping tool, 10... eccentric roller.
Claims (1)
たダイボンデイングアームがホルダーを介してＸ
−Ｙテーブルに固定され、横方向に移動したのち
停止しダイボンデイング動作を行なうダイボンデ
イング装置において、 上記ホルダーのブラケツト先端に設けられダイ
ボンデイングアームを両側から挾持する如く下向
きに突設された挾持治具と、挾持治具の下端の前
後方向に設けられた透孔に回転自在に嵌装され偏
心する軸を有する偏心ローラとからなるダイボン
デイングアーム防振装置を備えたことを特徴とす
るダイボンデイング装置。[Claims for Utility Model Registration] A die bonding arm with a collet at its tip that sucks a semiconductor chip is
- In a die bonding device that is fixed to a Y table and moves laterally and then stops to perform a die bonding operation, a clamping jig is provided at the tip of the bracket of the holder and protrudes downward so as to clamp the die bonding arm from both sides. A die bonding device comprising a die bonding arm vibration isolator comprising a tool and an eccentric roller that is rotatably fitted into a through hole provided in the front-rear direction at the lower end of the clamping jig and has an eccentric shaft. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832884U JPS6183040U (en) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832884U JPS6183040U (en) | 1984-11-06 | 1984-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183040U true JPS6183040U (en) | 1986-06-02 |
Family
ID=30726104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16832884U Pending JPS6183040U (en) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183040U (en) |
-
1984
- 1984-11-06 JP JP16832884U patent/JPS6183040U/ja active Pending
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