JPS6181657U - - Google Patents

Info

Publication number
JPS6181657U
JPS6181657U JP1984166348U JP16634884U JPS6181657U JP S6181657 U JPS6181657 U JP S6181657U JP 1984166348 U JP1984166348 U JP 1984166348U JP 16634884 U JP16634884 U JP 16634884U JP S6181657 U JPS6181657 U JP S6181657U
Authority
JP
Japan
Prior art keywords
pattern
light
transmitting
mask
transparent mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984166348U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984166348U priority Critical patent/JPS6181657U/ja
Publication of JPS6181657U publication Critical patent/JPS6181657U/ja
Pending legal-status Critical Current

Links

JP1984166348U 1984-10-31 1984-10-31 Pending JPS6181657U (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984166348U JPS6181657U (US06623731-20030923-C00052.png) 1984-10-31 1984-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984166348U JPS6181657U (US06623731-20030923-C00052.png) 1984-10-31 1984-10-31

Publications (1)

Publication Number Publication Date
JPS6181657U true JPS6181657U (US06623731-20030923-C00052.png) 1986-05-30

Family

ID=30724169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984166348U Pending JPS6181657U (US06623731-20030923-C00052.png) 1984-10-31 1984-10-31

Country Status (1)

Country Link
JP (1) JPS6181657U (US06623731-20030923-C00052.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05134391A (ja) * 1991-11-14 1993-05-28 Mitsubishi Electric Corp 露光用マスク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05134391A (ja) * 1991-11-14 1993-05-28 Mitsubishi Electric Corp 露光用マスク

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