JPS6181616A - Forming method of thin film of magnetic substance - Google Patents

Abstract

PURPOSE:To make uniform the diameter of the magnetic domain of the thin film of a magnetic substance formed on the surface of a substrate, by a method wherein a molded composite plate with ferromagnetic substance particles dispersed therein is provided on the back surface of the substrate and the inner- field evaporation molding of the thin film of the magnetic substance is conducted in a magnetic field formed by said composite plate. CONSTITUTION:A composite substance 3 with ferromagnetic substance particles dispersed therein is disposed on the back surface of a substrate 2 of silica glass, for instance, which is formed by evaporation inside a vacuum vessel 1, and the inner-field evaporation molding of the thin film 4 of a magnetic substance is conducted in a magnetic field formed be said composite plate 3. The evaporation is performed by applying argon ions 6 onto an evaporation source 5 to form a current of evaporated particles 7. By performing the inner- field evaporation molding in this way, the thin film of the magnetic substance having a uniform magnetic domain distribution can be formed on the surface of the substrate, and thus a method of forming the thin film of the magnetic substance, which has an industrial merit, can be furnished.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to an improvement in a method for forming a magnetic thin film.

[Conventional technology]

As is well known, attempts have been made to form a magnetic thin film having a uniform magnetic domain diameter distribution on, for example, a silica glass substrate. However, such magnetic thin films can be applied as magnetic sensors and magnetic recording materials, and are conventionally formed by vacuum evaporation methods such as ion sputtering methods.

[Problem that the invention seeks to solve]

However, according to the conventional technology, when trying to form a large-area magnetic thin film, non-uniformity of the flow of deposited particles,
Non-uniformity in the thickness of the thin film.

Due to variations in the composition of the components that make up the thin film.

It is not possible to construct a thin film with magnetic domains having a uniform distribution.

The present invention has been made in view of the above circumstances, and involves arranging a composite plate in which fine ferromagnetic particles are dispersed and molded on the back surface of a substrate, and depositing a magnetic thin film in a magnetic field formed by the composite plate. The present invention aims to provide a method capable of forming a magnetic thin film composed of magnetic domains having a uniform distribution.

[Means for solving problems]

In the present invention, a composite plate in which fine ferromagnetic particles are dispersed and molded is installed on the back surface of a substrate, and a magnetic thin film is formed by vapor deposition in a magnetic field formed by the composite plate, thereby forming a thin film on the surface of the substrate. The main point is to make the magnetic domain diameter of the magnetic thin film uniform.

[For production]

According to the present invention, a composite plate in which fine ferromagnetic particles are dispersed and molded is installed on the back surface of a substrate, and deposition is performed in the magnetic field of the composite plate, thereby forming a magnetic thin film with a uniform magnetic domain distribution on the substrate surface. Can be formed.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

In the figure, 1 is a vacuum container. A composite plate 3 in which ferromagnetic fine particles are dispersed is placed on the back surface of a lath substrate 2 in which, for example, silica is vapor-deposited in the vacuum vessel 1. Performs vapor deposition molding in a magnetic field. In FIG. 1, 5 indicates a vapor deposition source, 6 indicates an argon ion, and 7 indicates a flow of evaporated particles.

According to the present invention, the composite plate 3 in which ferromagnetic fine particles are dispersed is arranged on the back surface of the substrate 2.

In the magnetic field formed by the composite plate 3, the magnetic thin film 4
Since the evaporation molding is performed in a magnetic field, the thin film 4 can have a uniform magnetic domain distribution.

A specific example will be explained below.

Specific example 1 A silica glass substrate (temperature: 30°C) measuring 200 x 200 m + x 1 mm was used, and a Gd-Co alloy, which is promising as a magneto-optical recording material, was deposited on the surface of the substrate to a high thickness of 10 tasty in a vacuum using the ion snort method. 200
In the process of forming a 0X magnetic thin film.

The method of the present invention was applied. 0.1 μm as ferromagnetic fine particles (
Fe-Co alloy with an average particle size of 70
Composite board with a thickness of 1 day, dispersion molded at ωt%.

Vapor deposition was performed by placing it on the back surface of the substrate.

As a result of observing the molded Gd-c% magnetic domain distribution using a polarizing microscope, it was confirmed that a thin film with an excellent magnetic domain distribution was molded, as shown by the solid line (A) in Figure 2. It was done. In addition, the dotted line (b) in Figure 1 indicates Gt by the conventional method.
The distribution of magnetic domain diameters using a -Co alloy is shown.

Specific Example 2 A Tb-Fe alloy was vapor-deposited using the same method as in Specific Example 1. As a result, it was confirmed that a thin Tb--Pe film having an excellent magnetic domain distribution could be formed as shown by the solid line (a) in FIG. 3. In addition, the dotted line ((b) in the figure is Tb by the conventional method.
- Shows the distribution of magnetic domain diameter using Fe alloy.

In addition, in Example 1, Gd-C was used as one ferromagnetic particle.
Although the case where an o alloy and a Tb-Fe alloy are used has been described, the present invention is not limited thereto.

〔Effect of the invention〕

As described in detail above, according to the present invention, it is possible to form a magnetic thin film having a uniform magnetic domain distribution on the surface of a substrate, thereby providing an industrially valuable method for forming a magnetic thin film.

[Brief explanation of drawings]

(The diagram on the right shows the conventional method when ad-Co alloy is used and the method according to the present invention. Figure 3 shows the conventional method when Tb-pe alloy is used as a 7-coat blade. and a magnetic domain distribution diagram according to the method of the present invention. I... Vacuum vessel, 2... Silica is a lath substrate, 3...
- Composite plate, 4... magnetic thin film. Applicant's sub-agent Patent attorney Takehiko Suzue Figure 2 Figure 3 Number of stones

Claims (1)

[Claims] In a method of forming a magnetic thin film on a substrate by vacuum evaporation, a composite plate in which fine ferromagnetic particles are dispersed and molded is installed on the back surface of the substrate, and the magnetic field of the magnetic thin film is formed in the magnetic field formed by the composite plate. A method for forming a magnetic thin film, characterized by performing medium evaporation molding.