JPS6180638A - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JPS6180638A
JPS6180638A JP20303284A JP20303284A JPS6180638A JP S6180638 A JPS6180638 A JP S6180638A JP 20303284 A JP20303284 A JP 20303284A JP 20303284 A JP20303284 A JP 20303284A JP S6180638 A JPS6180638 A JP S6180638A
Authority
JP
Japan
Prior art keywords
layer
recording medium
film
optical recording
sic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20303284A
Other languages
Japanese (ja)
Inventor
Kazuoki Motomiya
一興 本宮
Mitsuharu Sawamura
光治 沢村
Kazuhiko Kikuchi
一彦 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP20303284A priority Critical patent/JPS6180638A/en
Priority to US06/762,447 priority patent/US4777068A/en
Priority to GB08519965A priority patent/GB2164061B/en
Priority to DE19853528701 priority patent/DE3528701A1/en
Priority to FR858512231A priority patent/FR2569033B1/en
Publication of JPS6180638A publication Critical patent/JPS6180638A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24306—Metals or metalloids transition metal elements of groups 3-10
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25708—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 13 elements (B, Al, Ga)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/256—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers improving adhesion between layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/2585—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on aluminium
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/2595—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on gold

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)

Abstract

PURPOSE:To improve remarkably the corrosion resistance of the recording medium by providing a carbide film without contg. oxygen in the film and having excellent humidity resistance on one side or on both sides of a recording layer. CONSTITUTION:Plastics or glass are used as a substrate 1a on the writing side in manufacturing a photoelectromagnetic recording medium, and an underlying layer 2 of SiO2 is formed thereon by vapor deposition, etc. A carbide film 7 of SiC or B4C, etc., a magnetic recording layer 3 of GdTbFe or GdTbFeCo, etc., and again a carbide film 8 of SiC, B4C, etc. are successively formed by sputtering, etc. A spacer layer 4 of SiO2, etc. and a reflective layer 5 of Cu, Al, Au, etc. are further laminated thereon by vapor deposition, etc., and then a protective substrate 1b consisting of glass, plastics, or metals such as aluminum is stuck through an adhesive layer 6.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光ビームにより記録・再生を行うことが可能
な光学的記録媒体に関するものであるっ〔従来の技術〕 従来より、光ディスクに用いられろ光学的記録媒体とし
ては希土類−遷移金属の合金薄１漢、非晶質から結晶質
への相転移？利用したカルコゲノ化合物等の最尤性酸化
物７４Ｉ７膜、ヒートモード記録媒体、サーモグラスチ
ック記録媒体等が知られている。例えば、希十頑−過移
金属の合金薄膜で形成される光７ｆ４気記釣・媒体とし
ては、Ｍｎ　Ｂ　ｉ　、　ＭｎＣｕＢ　ｉなどの多粘晶
薄’ｉｕ、ＧｄＣｏ、　ＧｄＦｅ、　ＴｂＦｅ、　Ｄｙ
Ｆｅ、　ＧｄＴｂＦｅ。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical recording medium on which recording and reproduction can be performed using a light beam. As an optical recording medium, a rare earth-transition metal alloy thin film, which undergoes a phase transition from amorphous to crystalline? Maximum likelihood oxide 74I7 films such as chalcogeno compounds utilized, heat mode recording media, thermoplastic recording media, etc. are known. For example, optical 7F4 optical fishing media made of alloy thin films of rare and transitional metals include multiviscosity crystal thin films such as MnBi, MnCuBi, GdCo, GdFe, TbFe, and Dy.
Fe, GdTbFe.

ＴｂＤｙＦｅ　、　ＧｄＦｅＣｏ　、　ＴｂＦｅＣｏ、
　ＧｄＴｂＣｏ　　などの非晶質薄膜、Ｇｄ１Ｇなどの
尼結晶薄膜などが知られている。TbDyFe, GdFeCo, TbFeCo,
Amorphous thin films such as GdTbCo and crystalline thin films such as Gd1G are known.

これらの、：ｑ膜のうち、大面積の薄膜を室温近傍の温
度で製作する際・ハ成幅性、信号を小さな光熱エネルギ
ーてＩＪ　Ｍ込もための書き込み効立、および書キ込オ
；Ｌ７″二ｆ３号をＳ／’Ｎ比よく読み出すための読み
出し効率等を勘案して、最近では前記非晶質薄膜が光磁
気記録媒体用として浸れていると考えられている。特に
、ＧｄＴｂＦｅ　＆まカー回転角も大きく、１５０℃前
友のキューリ一点を持つので、光磁気記録媒体用として
適しくいる。更（二発明者等はカー回転角を向上させる
目的で研究し７た結果、ＧｄＴｈＦｅＣｏが刀−回転角
が充分（二大きく、Ｓ／Ｎ比の良いユだζｌｐ、　Ｌが
可能ｔｃ九Ｆ気記録媒体であることを見い出した。Among these films, when manufacturing a large-area thin film at a temperature near room temperature, there are three advantages: (c) growth performance; Considering the readout efficiency for reading L7''2f3 with a good S/'N ratio, the amorphous thin film is recently considered to be used for magneto-optical recording media.In particular, GdTbFe & Since the Kerr rotation angle is large and has a Curie point of 150°C, it is suitable for use in magneto-optical recording media. It has been found that a sword with a sufficiently large rotation angle and a good S/N ratio can be used as a recording medium.

に発明が解決しようとする問題点〕 しかしながら、一般じ前記ＧｄＴｂＦｅ等の光磁気記パ
媒体をはじめとする磁気記録媒体（二用いられる非晶質
磁性体は、耐食汁が悪いという欠点を持っている。す７
“、Ｃわち、大気、水蒸気４二触れると磁気特性が低下
し、最終的〔二は完全Ｃ二酸比されて透明化する（１至
る。[Problems to be Solved by the Invention] However, in general, the amorphous magnetic materials used in magnetic recording media, including the magneto-optical recording media such as GdTbFe, have the disadvantage of poor resistance to cooking liquids. I'm here. 7
", C, that is, when exposed to air or water vapor 42, the magnetic properties decrease, and finally [2 becomes a complete C2 acid ratio and becomes transparent (1).

○のような欠点ｅ除くために、従来から、磁気記録媒体
の層の上に、例えば透明物質の保護カバー、例えば５Ｉ
Ｏ２，ＳＩＯニア′）保護層を設けたり、さらに不活性
ガスにより封じ込めたディスク状記録媒体が提案され又
いる。In order to eliminate defects such as ○, it has been conventionally known to cover the layer of a magnetic recording medium with a protective cover made of a transparent material, such as 5I.
Disc-shaped recording media provided with a protective layer (O2, SIO near') or further sealed with an inert gas have been proposed.

すなわち、従来の光学的記録媒体は、例えば第射層５、
接着層６を介して保護用基板１ｂと貼り合わせて得られ
る。That is, the conventional optical recording medium has, for example, the first radiation layer 5,
It is obtained by bonding to the protective substrate 1b via the adhesive layer 6.

しかし、この構成Ｃも保護層或いは下引き層等の補助層
からの酸素、水分のしみ出しく二より記録層が酸ｆヒさ
比るという問題があり、記録特性が劣化し十分な耐食性
は得られなかった。However, this structure C also has the problem that the recording layer becomes exposed to acid and heat due to the seepage of oxygen and moisture from auxiliary layers such as the protective layer or undercoat layer, resulting in deterioration of recording characteristics and insufficient corrosion resistance. I couldn't get it.

本発明は、従来の記録媒体（二比べ更に耐食性の；ム゛
、１ｔた嚢−ｒａｉ１勺記公＃　：’Ｉ：　（本な１是
１共することを目的とする　・コ 〔間館点・？解決するた又・の手段〕 本発明］・ゴ、七Ｇ５−ヒ（二相筬してＳｉＯ膜が下引
き層として設けられている基板上幅二、少なくとも光学
的記Ｚｉ　層、！：炭ｆヒ物の友とを具備することを特
徴とする光学的記録媒体である。The present invention is designed to provide a storage medium that is more corrosion resistant than conventional recording media.・Means for Solving the Problem] The present invention] 7G5-H (Two-phase substrate with an SiO film provided as an undercoat layer, at least an optical Zi layer, ! : An optical recording medium characterized by comprising:

炭化物の膜は、使用光（１関して要求される透過性を有
し、化学的Ｃ二安定な耐湿性に優れたちのであれば使用
し得るが、好ましい炭化物はＳｉＣおよびＢ４Ｃである
。炭化物の膜厚は２００乃至２０００人の′急回が好ま
し・７・。２００＾未満だと耐腐食性が充分でなく、２
０００Ａを越えると記録感度が低下したり、膜（二亀裂
等が生じるおそれがあり好ましくないっ 本発明の光学的記録媒体は、貼り合わせ構造あるいはエ
アーサンドイッチ構造のいずれもとることがＯＴ能であ
る。Carbide films may be used provided they have the required transparency for the light used (1) and have good chemical C-bistable moisture resistance, but the preferred carbides are SiC and B4C. The film thickness should preferably be 200 to 2,000. If the thickness is less than 200, the corrosion resistance will not be sufficient;
If it exceeds 000 A, recording sensitivity may decrease or film cracks may occur, which is undesirable. The optical recording medium of the present invention can have either a laminated structure or an air sandwich structure. .

下引き７“苦として設けるＳｉＯ膜は、その上に設ける
嘆の基板との融合性向上の目的で設けるものであり、そ
の膜Ｉ厚は５００＾乃至２０００＾の範囲が好ましい。The SiO film provided as the underlayer 7 is provided for the purpose of improving compatibility with the substrate provided above, and the thickness of the film I is preferably in the range of 500 to 2000.

貼り合わせ構造の本発明の光学的記録媒体の実施態様の
一しリを第１図（二示す。An embodiment of the optical recording medium of the present invention having a laminated structure is shown in FIG.

第１（２）の光学的記録媒体は書き込み側基板１ａ上（
二下引き層２を形成せしめ、順次、炭化物膜７゜記録層
６．炭化物膜８．スペーサ層４７反射層５を設け、さら
に接着層６を介して採掘用基板１ｂと貼り合わせること
（二より得られる。The first (2) optical recording medium is on the writing side substrate 1a (
Two undercoat layers 2 are formed, and a carbide film 7° recording layer 6. Carbide film 8. The spacer layer 47 is provided with the reflective layer 5, and further bonded to the mining substrate 1b via the adhesive layer 6 (obtained from step 2).

第１図の列では、記録層の両側に炭化物膜を設けてあり
、耐食性はこの場合が最も効果的であるが、どちらか一
方のｌ１ｌ−二のみ設けてもよく、またこの例のよう（
二炭ｆヒ物膜を記録層Ｃ二相接して設けることが好まし
い（二しても必須ではなく、炭化物膜と記録層との間に
他の補助層が介在していても本発明の目的を達成出来る
。In the row of FIG. 1, carbide films are provided on both sides of the recording layer, and corrosion resistance is most effective in this case, but it is also possible to provide only one of them, or as in this example (
It is preferable to provide two carbon carbide films in contact with each other in the recording layer C (although this is not essential, and even if another auxiliary layer is interposed between the carbide film and the recording layer, the present invention will not be affected). I can achieve my purpose.

以下、第１因の例が光磁気記録媒体である場合（二つい
て、その作製方法を述べる。Below, an example of the first factor is a magneto-optical recording medium (there are two examples), and a method for manufacturing the medium will be described.

書き込み側基−１反１ａはプラスチックまたはガラスが
用いられ、その上にＳｉＯの下引き層２を蒸着ｌ去など
（二よ：１形ｆ〃すう−ＳｉＣまたはＢ４Ｃなどの炭化
物ｍ　７−　ＧｄＴｂＦｅまたｋｉ　ＧｄＴｂＦｅＣｏ
などの磁性記：禄層５．欠いで再二、”　ＳｉＣ、Ｂ４
Ｃなどの炭化物膜８を：ｊＱｄ　ｉ欠スパッタリングな
ど【二より形成してゆき、更Ｃ：その」二（二ＳｉＯな
どのスペーサ一層４．Ｃｕ。The writing side group 1 is made of plastic or glass, and a subbing layer 2 of SiO is deposited on it. ki GdTbFeCo
Magnetic notes such as: Rokulayer 5. Missing again,” SiC, B4
A carbide film 8, such as C, is formed by sputtering, etc., and then a spacer layer, such as SiO, is formed.

ＡＺ　＋　Ａｕなどの反射層５を蒸着法などにより積層
したのち、ガラス、プラスチックまたはアルミニウムな
どの金属よりなる保護基板１ｂを接着層６を介して貼り
合わせること（二より第１図の構造の光磁気記録媒体が
得ら、する。After a reflective layer 5 such as AZ+Au is laminated by a vapor deposition method or the like, a protective substrate 1b made of glass, plastic, or metal such as aluminum is bonded via an adhesive layer 6. A magnetic recording medium is obtained.

〔実油例〕[Real oil example]

以下に本発明を光磁気記録媒体に適用した場合（二つき
実ｉ恒例？示して更に具体的（二説明する。Below, the case where the present invention is applied to a magneto-optical recording medium will be shown and more specifically explained.

実捲例１ 第１商籠二示した↑：Ｉｊ造の光学的記録媒体を次のよ
うに製作（−たつ ポリアクリレート■ｒ脂のグラスチック基板１ａの上に
下３１１層２として約１００ＯＡ（７’）ＳｉＯ膜を蒸
着法に」ユニＪ形成し、炭化物・乃保護膜７として５０
口Ａ　、；）ＳｉＣ模をスパツタリングにより形成した
。その上に高１；；Ｊ　、皮スパッタリングによりＧｄ
Ｔｂ　−ＦｅＣｏを膜厚２００．〜じ族１漠し、磁性膜
辷り成る記録層６を形成した。更に、保険層８として、
２ＤＯＡのＳｉＣ膜をスパツタリング（二より設（すた
後、スペーサ層４として、約７０ＯＡのＳｉＣ膜、反射
層５として約５０ＯＡのＡｔ膜をそれぞれ蒸着し、接４
９層６として／リコノ系接／ａ剤を用いて保護用グラス
チック基板１ｂと貼り合わせて光磁気記録媒体とした。Actual winding example 1 ↑ shown in the first commercial basket 2: An optical recording medium made of Ij was manufactured as follows (approximately 100 OA (approx. 7') A SiO film was formed using a vapor deposition method, and a carbide protective film 7 was formed at 50
Mouth A;) A SiC pattern was formed by sputtering. On top of that, high 1;;J, Gd by skin sputtering.
Tb-FeCo film thickness 200. A recording layer 6 consisting of a magnetic film was formed. Furthermore, as insurance layer 8,
After sputtering a 2 DOA SiC film, an approximately 70 OA SiC film was deposited as a spacer layer 4, and an approximately 50 OA At film was deposited as a reflective layer 5.
The nine layers 6 were bonded to a protective glass substrate 1b using a licon type adhesive/a agent to form a magneto-optical recording medium.

得られた記録媒体Ｃ１関し、そのカー回転角θｋ。Regarding the obtained recording medium C1, its Kerr rotation angle θk.

床両刃Ｈｃの測定とともに、４５℃、相対湿度９５％の
恒温恒湿槽（二て５００時間の耐湿テストを行な一］だ
　。In addition to measuring the floor double-edged Hc, we used a constant temperature and humidity chamber at 45°C and 95% relative humidity (we also conducted a 500-hour humidity test).

比・咬のため保護層７，８を設けない池は、上記と同様
の溝成を有する記録媒体についても試験を行なった。Ike, who did not provide the protective layers 7 and 8 due to the ratio and bite, also conducted a test on a recording medium having the same groove structure as above.

結果は第１表【二示すとおりで、本発明の光学的記録媒
体は、磁気特性の劣化も認められず、耐久性が向上した
、尚、第１表の数隙は、初期圃を１．０とした場合の比
率で示しである。The results are shown in Table 1 [2], and the optical recording medium of the present invention showed no deterioration in magnetic properties and improved durability.The number gaps in Table 1 are 1. The ratio is shown when it is set to 0.

実梠汐ＩＪ　２ 実韓′！／１ドのＳｉＬｇ偽Ｊ＋ｉ文：ノにＢ４Ｃ膜を
保護／、ｉ　７および８としてスパッタ゛１ノグＣ二よ
り設けた外は、実１狗例１と同様の嗅構°７の光磁気記
録媒体を作成した。Jitsuki Shio IJ 2 Jitsukan'! A magneto-optical recording medium with the same olfactory structure as Example 1, except that the B4C film was protected by sputtering as i 7 and 8. It was created.

実＋４．４　ｒ二゛：１１と同様、カー回転角θに、保
磁力Ｈｃ、の・１４１１足ととｉＪに、４５℃１．Ｆ１
対湿度９５％の恒温恒ｉ１　ＣＩａ　（二おける耐久５
００時間の耐湿テストを行なった。Actual +4.4 r2: As in 11, the Kerr rotation angle θ, the coercive force Hc, 1411 feet, and iJ, 45°C1. F1
Constant temperature i1 CIa with humidity of 95% (durability in two
A moisture resistance test was conducted for 00 hours.

結果は第１表に示した通りで、耐久性を向上させること
ができたつ 〔発明の効果〕 本発明の光学的記録、媒体（−よれば、記録層が、列え
ば約数ｉゴ入の厚さの磁性層であってもその片１創又は
両１１Ｈｔｌ　を二ｉ模目体に酸素を含まない耐湿性の
すぐれた炭化物の膜を設けることＣ二より、記録媒体５
乃耐食性を謬著（−改善出来る。その効果は、上記炭化
物の膜を記録層（二相接して設けた場合（二特にすぐれ
ている。またＳｉＣ膜を下引き層として基板上Ｃ二股け
ること（二より、その上に設ける膜の基板との融合性を
向上することが出来るっ 尚、本発明は光磁気記録媒体（二限定されるものでなく
、たとえばカルコゲノ化合物の薄物等、酸化さ、１を易
し・記録層を有する他の光学的記録媒体の＋ｆｊｒｆ　
３１！：性向上に関しても同様に効果的である。The results are shown in Table 1. [Effects of the Invention] The optical recording medium of the present invention (according to Even if the magnetic layer has a thickness of 11Htl, one or both pieces of the magnetic layer should be coated with a carbide film that does not contain oxygen and has excellent moisture resistance.
The corrosion resistance can be significantly improved.The effect is particularly excellent when the above-mentioned carbide film is provided in contact with the recording layer (2).Also, when the SiC film is used as an undercoat layer and the film is divided into two layers on the substrate. (2) The compatibility of the film formed thereon with the substrate can be improved. , 1 and +fjrf of other optical recording media having a recording layer.
31! : It is equally effective in improving sex.

【図面の簡単な説明】[Brief explanation of the drawing]

第１１Ａは本発明の記録媒体、第２図は従来の記録媒体
の各層の溝吸例す］）断面略図である。 １ａ・男き込み１１１１屑板、　　２・・下引き層、３
　・記録層、　　４・・スペーサ一層、５・・・反射層
、　　６・・接ン音１脅、　７，８・・炭化物膜、１ｂ
　・保９語用基板。 第１図 第２図11A is a schematic cross-sectional view of the recording medium of the present invention, and FIG. 2 is a cross-sectional diagram showing an example of grooves in each layer of a conventional recording medium. 1a・Okikokomi 1111 scrap board, 2・・Undercoat layer, 3
- Recording layer, 4... Spacer layer, 5... Reflective layer, 6... Contact sound 1 threat, 7, 8... Carbide film, 1b
・Board for 9 words. Figure 1 Figure 2

Claims (2)

【特許請求の範囲】[Claims] （１）その上に相接してＳｉＯ膜が下引き層として設け
られている基板上に、少なくとも光学的記録層と炭化物
の膜とを具備することを特徴とする光学的記録媒体。(1) An optical recording medium comprising at least an optical recording layer and a carbide film on a substrate on which a SiO film is provided as an undercoat layer. （２）前記炭化物の膜がＳｉＣまたはＢ＿４Ｃからなる
特許請求の範囲第１項記載の光学的記録媒体。(2) The optical recording medium according to claim 1, wherein the carbide film is made of SiC or B_4C.
JP20303284A 1984-08-10 1984-09-28 Optical recording medium Pending JPS6180638A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP20303284A JPS6180638A (en) 1984-09-28 1984-09-28 Optical recording medium
US06/762,447 US4777068A (en) 1984-08-10 1985-08-05 Optical recording medium
GB08519965A GB2164061B (en) 1984-08-10 1985-08-08 Optical recording medium
DE19853528701 DE3528701A1 (en) 1984-08-10 1985-08-09 LIGHT RECORDING MATERIAL
FR858512231A FR2569033B1 (en) 1984-08-10 1985-08-09 OPTICAL RECORDING MEDIUM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20303284A JPS6180638A (en) 1984-09-28 1984-09-28 Optical recording medium

Publications (1)

Publication Number Publication Date
JPS6180638A true JPS6180638A (en) 1986-04-24

Family

ID=16467216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20303284A Pending JPS6180638A (en) 1984-08-10 1984-09-28 Optical recording medium

Country Status (1)

Country Link
JP (1) JPS6180638A (en)

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