JPS6180354U - - Google Patents
Info
- Publication number
- JPS6180354U JPS6180354U JP16391084U JP16391084U JPS6180354U JP S6180354 U JPS6180354 U JP S6180354U JP 16391084 U JP16391084 U JP 16391084U JP 16391084 U JP16391084 U JP 16391084U JP S6180354 U JPS6180354 U JP S6180354U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- layer
- passage
- diaphragm valve
- closes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984163910U JPH0332772Y2 (de) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984163910U JPH0332772Y2 (de) | 1984-10-31 | 1984-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6180354U true JPS6180354U (de) | 1986-05-28 |
| JPH0332772Y2 JPH0332772Y2 (de) | 1991-07-11 |
Family
ID=30721772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984163910U Expired JPH0332772Y2 (de) | 1984-10-31 | 1984-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0332772Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0463960A (ja) * | 1990-07-03 | 1992-02-28 | Hino Motors Ltd | 水冷式ｅｇｒバルブを用いた排ガス再循環装置 |
| WO2022060561A1 (en) * | 2020-09-15 | 2022-03-24 | Lam Research Corporation | Heat-transferring valve flexure and methods |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109022A (en) * | 1977-03-07 | 1978-09-22 | Hitachi Ltd | Exhaust gas re-cycling valve |
| JPS59115849U (ja) * | 1983-01-26 | 1984-08-04 | 三菱電機株式会社 | 排ガス制御バルブ |
-
1984
- 1984-10-31 JP JP1984163910U patent/JPH0332772Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109022A (en) * | 1977-03-07 | 1978-09-22 | Hitachi Ltd | Exhaust gas re-cycling valve |
| JPS59115849U (ja) * | 1983-01-26 | 1984-08-04 | 三菱電機株式会社 | 排ガス制御バルブ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0463960A (ja) * | 1990-07-03 | 1992-02-28 | Hino Motors Ltd | 水冷式ｅｇｒバルブを用いた排ガス再循環装置 |
| WO2022060561A1 (en) * | 2020-09-15 | 2022-03-24 | Lam Research Corporation | Heat-transferring valve flexure and methods |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0332772Y2 (de) | 1991-07-11 |