JPS6180066A - Apparatus for feeding and heating comb tooth substrate - Google Patents

Abstract

PURPOSE:To make it possible to efficiently heat an object to be heated while moving the same, by embedding a heater in a comb tooth substrate and the left and right under surface rails thereof other than the heater of an upper surface heating substrate. CONSTITUTION:Heater 6, 8, 12 are provided to an upper surface heating substrate 5, under surface rails 7 and a comb tooth substrate 11. An object 3 to be heated is heated in a sandwich state by the comb tooth substrate 11 and the upper surface heating substrate 5 and moved by a single comb tooth to the direction in this state shown by the arrow. Thereafter, the comb tooth substrate 11 is fallen but, because fallen so as to become lower than the height of the surface of each under surface rail 7, the object 3 to be heated is placed on the surface of the under surface rails and heated for a time less that about 1sec by the heaters of the under surface rails 7. The fallen comb tooth substrate 11 and upper surface heating substrate 5 move to the previous positions and the object 3 to be heated is stopped in a sandwich state and succeedingly held in this state until the next feed indication is issued.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a comb-teeth feeding heating device, and in particular, a device for heating an object to be heated efficiently without damaging the shape of the object to be heated. The present invention provides a comb tooth feeding heating device.

When the object to be heated is of a fixed shape, the comb-teeth feeding heating device mounts the object to be heated in the recessed part of the comb teeth of the comb-tooth base, pushes the comb-teeth base up to the surface of the upper heating base, and transfers the object to be heated. is heated in a sandwiched state, and in that state, the top heating base and the comb tooth base move in a predetermined direction by the length of one comb tooth, and during this time, the heated body is also sandwiched by the comb tooth base and the top heating base. Heated in inches.

Next, the comb tooth base is lowered below the level of the lower rail, so the object to be heated is placed on the lower rail.
By reversing and moving the upper surface heating base and the comb tooth base in the opposite direction to the predetermined direction by the length of one comb tooth, the object to be heated is heated by 1 m.
Only the teeth move, and the object to be heated is thereby heated and transferred.

These applied devices include a heating tester for semiconductor devices, etc., and it is possible to perform temperature tests on semiconductor devices by controlling the time of feeding the comb teeth at a predetermined environmental temperature.

[Conventional technology]

FIG. 3 F8+ is a side cross-sectional view of the comb feeder;
Fig. 3) is a front sectional view of the comb tooth feeding device;
2 is a comb-teeth base that moves vertically and horizontally, 2 is a fixed lower rail, and 3 is a moving object.

4 (al to 4 fd) are side sectional views for explaining the operation of the comb tooth feeding heating device, and in FIG. 3 (a), the moving object 3 is pushed up by the comb tooth base 1. It is in a state of

FIG. 4 (bJ) shows that the comb tooth base 1 moves by a single comb tooth bone in the direction of the arrow.

FIG. 4 (el) shows that the comb-tooth base 1 descends after moving, but at this time, the descending surface falls below the height of the lower rail 20 surface, so the moved object 3 is placed above the lower rail 20 surface. At the same time, the comb tooth base returns to its previous position.

Td+ in FIG. 4 shows the state in which the comb tooth base 1 has returned to its previous position as indicated by the arrow and has been moved by the length of one comb tooth, but this operation is similar to that shown in FIG. 3 (a). The state is repeated.

In a comb-teeth feeding heating device that operates with such a mechanism, the heating state is only when the object to be heated is in the form of a sandwich, but a heating device with even higher heating efficiency is required.

[Problem that the invention seeks to solve]

The object of the present invention is to realize a method for efficiently heating a moving object while moving the comb tooth feeding device having the above-mentioned structure, while keeping the structure and function of the device unchanged.

[Means for solving problems]

The present invention provides a comb-teeth feeding heating device that solves the above-mentioned problems, and the means thereof includes an upper surface heating base body movable in the length direction, a lower surface rail containing a heater, and a length of the lower surface rail. A groove is provided on the center line in the longitudinal direction, and the comb tooth base body operates vertically and longitudinally within the groove, and the comb tooth base body moves up and down as well as reciprocates left and right at the same time. A comb tooth feeding heating furnace for sequentially transferring objects to be heated, characterized in that a heater is embedded in the comb tooth base to heat the object to be heated on the comb tooth base. This can be achieved by a feeding heating device.

[Function] In other words, the present invention provides new heaters in the comb tooth base and the left and right lower rails in which the upper surface heating base and the heated object are sandwiched, in addition to the heater in the upper surface heating base in the comb tooth feeding heating device. This design takes into account the efficiency of raising the temperature of the heated object by embedding it.

〔Example〕

FIG. 1 is a front sectional view of a comb tooth feed heating device showing an embodiment of the present invention.

5 is an upper surface heating base, 6 is a heater arranged on the upper surface heating base, 7 is a lower surface rail, 8 is a heater arranged on the lower surface rail, 11 is a comb tooth base, and 12 is a newly installed on the comb tooth base. 3 indicates a heated object.

As an example of a comb teeth feeding heating device, for temperature testing of semiconductor devices, 64 comb teeth are arranged, and the temperature for the temperature test is set at about 25°C to 120°C, but the maximum temperature is 200°C. It is possible to set the heating temperature to approximately .degree.

The elevating mechanism of the comb-tooth base is linked to the timing of reciprocating movement of the upper surface heating base and the comb-teeth base, and the comb-teeth base is usually raised and lowered by air pressure from an air cylinder.

FIGS. 2(a) to 2(d) are side sectional views for explaining the operation of the comb tooth feeding heating device.

In FIG. 2(a), the object to be heated 3 is heated in a sandwiched state between the comb tooth base 11 and the upper surface heating base 5. In FIG.

In FIG. 2(b), the object to be heated 3 moves in the direction of the arrow by a single comb dentary bone in a sandwich state.

In FIG. 2(C), the comb-tooth base 11 descends after moving, but since it falls below the height of the surface of the lower rail 7, the object to be heated 3 is transferred onto the surface of the lower rail 7, and during this time, Although it takes less than one second, the object to be heated 3 is heated by the lower rail heater.

The comb tooth base 11 and the upper surface heating base 5 that have descended in FIG. 2(d)
moves in the direction of the arrow and returns to its previous position.

In this way, the heated object 3 is transferred by the length of one comb tooth, stops in the state shown in Fig. 2 fa), and continues to maintain the state shown in Fig. 2 (a) until the next transport instruction is issued. In other words, the heating time for only the bottom surface is shortened as much as possible, and the heating time for both the top and bottom surfaces is made as long as possible.

The comb-teeth feeding heating device configured in this manner improves the efficiency of temperature rise characteristics of the heated object, and improves heating efficiency.
The manufacturing process is significantly shortened.

〔Effect of the invention〕

As explained in detail above, the comb tooth feed heating device of the present invention can be achieved by simply adding a heater inside the comb teeth and the lower rail body and attaching the upper surface heating base that moves from side to side to the conventional device. By adopting this equipment, the manufacturing process is significantly streamlined and has great effects.

[Brief explanation of drawings]

Fig. 1 is a front cross-sectional view of the comb-tooth feeding heating device of the present invention, Fig. 2 (al to (d) is a side view for explaining the operation of the conventional comb-tooth feeding heating device, and Fig. 3 (a) is a booklet). FIG. 3 is a front view of the comb-teeth feeding heating device of the invention, FIG. 3 is a side view, and FIG. In the figure, 3 is an object to be heated, 5 is an upper surface heating base, 6 is a heater arranged on the upper surface heating base, 7 is a lower surface rail, 8 is a heater arranged on the lower surface rail, 11 is a comb tooth base, 12
1 and 2 respectively indicate heaters arranged on the comb tooth base. 1M1 figure

Claims (1)

[Claims] An upper surface heating base that is movable in the length direction, a lower surface rail containing a built-in heater, and a groove provided on the longitudinal center line of the lower surface rail, and comb teeth that operate vertically and longitudinally within the groove. A heater is embedded in the comb-toothed base in a comb-tooth feeding heating furnace that moves up and down and also reciprocates left and right at the same timing to sequentially transfer the objects to be heated. A comb tooth feeding heating device characterized in that the heated object on the comb tooth base is heated.