JPS6179174A - Magnetic sensor - Google Patents

Magnetic sensor

Info

Publication number
JPS6179174A
JPS6179174A JP59202548A JP20254884A JPS6179174A JP S6179174 A JPS6179174 A JP S6179174A JP 59202548 A JP59202548 A JP 59202548A JP 20254884 A JP20254884 A JP 20254884A JP S6179174 A JPS6179174 A JP S6179174A
Authority
JP
Japan
Prior art keywords
sensor
magnetic sensor
thin
resin material
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59202548A
Other languages
Japanese (ja)
Inventor
Masumi Nakamichi
眞澄 中道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59202548A priority Critical patent/JPS6179174A/en
Publication of JPS6179174A publication Critical patent/JPS6179174A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Magnetic Heads (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To improve yield and to obtain an effective signal by adhering an organic film printed board to a magneto-resistance effect element made of a thin ferromagnetic film with a thin resin material, and reducing the overall thickness. CONSTITUTION:The magnetic sensor 9 is formed by adhering an organic film substrate 6 made of a polyimide film having printed wiring 5 to the magnetism sending part formation surface of a chip 1 of the magneto-resistance effect element made of the thin ferromagnetic film by solder bonding, and applying the resin material 7 over it thinly. Then, when the sensor 9 detects the magnetism of a magnetized scale disk 8, the gap S between the magnetized disk 8 and sensor 8 decreases because the sensor 9 is thin, an effective signal output is obtained, and further assembly is easy, so the yield is improved and the device is reduced in size on the whole.

Description

【発明の詳細な説明】 く技術分野〉 本発明は強磁性体磁気抵抗効果を利用した磁気センナに
関する。
DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a magnetic sensor that utilizes the magnetoresistive effect of a ferromagnetic material.

〈従来技術〉 従来、磁場を検出する素子として鉄、フェライト等高い
透磁率を有する磁芯に導線を巻きつけた電磁誘導型磁気
センナ、あるいはInSb、InAs。
<Prior Art> Conventionally, as an element for detecting a magnetic field, an electromagnetic induction type magnetic sensor, in which a conducting wire is wound around a magnetic core having high magnetic permeability such as iron or ferrite, or InSb or InAs has been used.

QaAs、Si等の半導体を用いた磁気センサがよく使
用されている。しかし、これらの磁気センサは、上記電
磁誘導型磁気センサでは信号出力は一般に磁束の時間変
化つまり d 12’/d t  で得られるため磁束
変化の速さに出力が依存することとなるし、また磁束変
動の無い時出力が得られない。また上記半導体を用いた
磁気センサでは、基本的に外部磁界により半導体中の電
荷が影響を受け、磁気抵抗が高くなる性質を利用してお
り、実用的にはIKG以上の磁界が必要であり、かつ素
子の形状により比較的分解能が低いという欠点を有して
いた。
Magnetic sensors using semiconductors such as QaAs and Si are often used. However, in the electromagnetic induction type magnetic sensor, the signal output is generally obtained from the time change of magnetic flux, that is, d 12'/d t , so the output depends on the speed of magnetic flux change, and Output cannot be obtained when there is no magnetic flux fluctuation. In addition, magnetic sensors using the semiconductor described above basically take advantage of the property that the charge in the semiconductor is affected by an external magnetic field, increasing magnetic resistance, and for practical purposes, a magnetic field greater than IKG is required. Moreover, it has the disadvantage of relatively low resolution due to the shape of the element.

また近年、ビデオテープレコーダの高機能化て伴い静止
画像、コマ送り等の要求が高まって存り、この様なテー
プの作動を行なう為には従来の磁気センサでは不十分で
あった。この為強磁性体薄膜の磁気抵抗効果を利用した
磁気センサの要請が高まっている。
In addition, in recent years, as video tape recorders have become more sophisticated, there has been an increasing demand for still images, frame-by-frame feeding, etc., and conventional magnetic sensors have not been sufficient to perform such tape operations. For this reason, there is an increasing demand for magnetic sensors that utilize the magnetoresistive effect of ferromagnetic thin films.

第2図に従来の磁気抵抗効果型磁気センサの外観図を示
す。第2図において1f″i磁気抵抗素子のチップを示
し、2領域に感磁部が蒸着手法及びホトエツチング手法
で形成されている。又、このチップより電気端子3が取
り出されている。4I/′iチツプ1と電気端子3を半
田付けまたは電気熔接等でつないだ後、機械的強度の向
上を図るためそして外部からの保護のため接合部分に塗
布された樹脂コートである。この樹脂コート4を行なっ
た場合、■磁気センサチップ1の2領域へ樹脂コート4
の一部が硬化時に拡がる0また、チップlの裏面(2領
域の反対側)への樹脂のまわり込み等があり歩留りを低
下さす、更に■樹脂コート4の厚き着磁媒体との距離が
大きくなり、有効な信号が検出できなくなる0 等の欠点を含んでいた。
FIG. 2 shows an external view of a conventional magnetoresistive magnetic sensor. FIG. 2 shows a chip of a 1f''i magnetoresistive element, in which magnetically sensitive parts are formed in two regions by vapor deposition and photoetching. Also, an electrical terminal 3 is taken out from this chip. 4I/' After the i-chip 1 and the electrical terminal 3 are connected by soldering or electric welding, this resin coat is applied to the joint part in order to improve mechanical strength and protect it from the outside. If this is done, ■Resin coating 4 is applied to two areas of the magnetic sensor chip 1.
In addition, the resin wraps around the back surface of the chip 1 (opposite the area 2), reducing the yield. This included defects such as 0, which made it impossible to detect a valid signal.

く目的〉 本発明は以上の磁気抵抗効果型の磁気センナの問題点を
解消するべくなされたものであり、磁気センサの歩留り
の向上と、信号検出形態の向上を図ることを目的とする
0 〈実施例〉 以下、本発明に係る磁気センサの一実施例について図面
を用いて詳細に説明を行なう。
The present invention has been made to solve the above-mentioned problems of magnetoresistive magnetic sensors, and aims to improve the yield of magnetic sensors and improve the signal detection mode. Embodiment> Hereinafter, an embodiment of the magnetic sensor according to the present invention will be described in detail with reference to the drawings.

第1図に本発明に係る磁気センサの一実施例のリント配
線5を配したポリイミドフィルムまたはポリエステルフ
ィルム等の有機フィルム基板6を半田ボンディングまた
は溶接等により接続を行い、その後チップ1及び有機フ
ィルム基板6上へ薄く樹脂材7を塗布する。この時、チ
ップ1及びフィルム基板6の間にも樹脂材7が毛細管現
象により吸い込まれ、チップ1とフィルム基板6との間
の密着強度を高めることが出来る。ここで樹脂材7はチ
ップ1上では一面の全面を被覆することにより保護膜と
して作用し、チップlとフィルム基板6間では接着強化
の作用をする。
FIG. 1 shows an organic film substrate 6 such as a polyimide film or a polyester film on which a lint wiring 5 of an embodiment of a magnetic sensor according to the present invention is arranged, and is connected by solder bonding or welding, and then a chip 1 and an organic film substrate 6 are connected to each other by solder bonding or welding. 6. Apply a thin layer of resin material 7 onto 6. At this time, the resin material 7 is also sucked between the chip 1 and the film substrate 6 by capillary action, and the adhesion strength between the chip 1 and the film substrate 6 can be increased. Here, the resin material 7 acts as a protective film by covering the entire surface of the chip 1, and acts to strengthen the adhesion between the chip 1 and the film substrate 6.

次に第2図と第1図の構造比較すると分る様にプリント
配線を施こしたフィルム基板6を使用することにより、
第1図のものでは樹脂材7の層厚を薄く出来る。
Next, as can be seen by comparing the structures in FIG. 2 and FIG. 1, by using a film substrate 6 with printed wiring,
In the case shown in FIG. 1, the layer thickness of the resin material 7 can be made thinner.

第3図に磁気センサの一使用例を示す。8は着磁スケー
ル円板であり、該円板8周辺に一定波長で着磁が行なわ
れており、この着磁部より発生する磁界を本発明の磁気
センサ9で検出している。
FIG. 3 shows an example of the use of a magnetic sensor. Reference numeral 8 denotes a magnetized scale disk, and the periphery of the disk 8 is magnetized at a constant wavelength, and the magnetic field generated from this magnetized portion is detected by the magnetic sensor 9 of the present invention.

このような時従来の第2図に示す磁気センナでは樹脂層
4が厚くなることにより、着磁円板8と磁気センサ9と
の間隔Sが大きくなり、磁気センサ9に作用する磁界が
減褒し、信号出力が得られない事となる。しかるに第1
図に示す本発明の構造を利用すれば有効な信号出力を得
ることが可能である。
In such a case, in the conventional magnetic sensor shown in FIG. 2, as the resin layer 4 becomes thicker, the distance S between the magnetizing disk 8 and the magnetic sensor 9 increases, and the magnetic field acting on the magnetic sensor 9 is reduced. However, no signal output can be obtained. However, the first
It is possible to obtain an effective signal output by utilizing the structure of the present invention shown in the figure.

尚、本発明に係る磁気センナを用いれば、フレキシブル
なプリント基板を使用することにより、より取扱い性が
向上し、かつ全体の厚さを薄くできるのでより小さい部
分にコン・くクトに収納することが可能となり装置全体
の小型化が図れる。
Furthermore, if the magnetic sensor according to the present invention is used, it can be more easily handled by using a flexible printed circuit board, and the overall thickness can be reduced, so it can be stored compactly in a smaller area. This makes it possible to downsize the entire device.

く効果〉 本発明によれば組立てが容易である為に歩留りを向上で
き、一方センサ全体の厚さを薄くできるので磁界発生部
分と磁気センサの間隔を極力短くでき、有効に信号の検
出を行なうことができる0
Effects> According to the present invention, since assembly is easy, the yield can be improved, and on the other hand, since the overall thickness of the sensor can be made thinner, the distance between the magnetic field generating part and the magnetic sensor can be made as short as possible, and signals can be detected effectively. can do 0

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る磁気センナの一実施例の外観図、
第2図は従来の磁気センサの外観図、第3図は磁気セン
ナを組み込んだ回転検出器の外観図を示す。
FIG. 1 is an external view of an embodiment of a magnetic sensor according to the present invention;
FIG. 2 shows an external view of a conventional magnetic sensor, and FIG. 3 shows an external view of a rotation detector incorporating a magnetic sensor.

Claims (1)

【特許請求の範囲】[Claims] 1、強磁性体薄膜からなる磁気抵抗効果型素子と該素子
の出力を取り出す為の有機フィルムプリント基板とが薄
い樹脂材にて接着されてなることを特徴とする磁気セン
サ。
1. A magnetic sensor characterized in that a magnetoresistive element made of a ferromagnetic thin film and an organic film printed circuit board for extracting the output of the element are bonded with a thin resin material.
JP59202548A 1984-09-26 1984-09-26 Magnetic sensor Pending JPS6179174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59202548A JPS6179174A (en) 1984-09-26 1984-09-26 Magnetic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59202548A JPS6179174A (en) 1984-09-26 1984-09-26 Magnetic sensor

Publications (1)

Publication Number Publication Date
JPS6179174A true JPS6179174A (en) 1986-04-22

Family

ID=16459322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202548A Pending JPS6179174A (en) 1984-09-26 1984-09-26 Magnetic sensor

Country Status (1)

Country Link
JP (1) JPS6179174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1220205A1 (en) * 2000-01-20 2002-07-03 Matsushita Electric Industrial Co., Ltd. Magnetoresistive head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1220205A1 (en) * 2000-01-20 2002-07-03 Matsushita Electric Industrial Co., Ltd. Magnetoresistive head
EP1220205A4 (en) * 2000-01-20 2005-07-06 Matsushita Electric Ind Co Ltd Magnetoresistive head

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