JPS6178872U - - Google Patents

Info

Publication number
JPS6178872U
JPS6178872U JP15981284U JP15981284U JPS6178872U JP S6178872 U JPS6178872 U JP S6178872U JP 15981284 U JP15981284 U JP 15981284U JP 15981284 U JP15981284 U JP 15981284U JP S6178872 U JPS6178872 U JP S6178872U
Authority
JP
Japan
Prior art keywords
molecular beam
sample
sample holder
beam source
liquid nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15981284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15981284U priority Critical patent/JPS6178872U/ja
Publication of JPS6178872U publication Critical patent/JPS6178872U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15981284U 1984-10-24 1984-10-24 Pending JPS6178872U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15981284U JPS6178872U (enrdf_load_html_response) 1984-10-24 1984-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15981284U JPS6178872U (enrdf_load_html_response) 1984-10-24 1984-10-24

Publications (1)

Publication Number Publication Date
JPS6178872U true JPS6178872U (enrdf_load_html_response) 1986-05-26

Family

ID=30717758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15981284U Pending JPS6178872U (enrdf_load_html_response) 1984-10-24 1984-10-24

Country Status (1)

Country Link
JP (1) JPS6178872U (enrdf_load_html_response)

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