JPS6177544U - - Google Patents
Info
- Publication number
- JPS6177544U JPS6177544U JP16237084U JP16237084U JPS6177544U JP S6177544 U JPS6177544 U JP S6177544U JP 16237084 U JP16237084 U JP 16237084U JP 16237084 U JP16237084 U JP 16237084U JP S6177544 U JPS6177544 U JP S6177544U
- Authority
- JP
- Japan
- Prior art keywords
- dose
- display device
- utility
- model registration
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本案の構成を示すブロツク図、第２図
はドーズ量演算器の処理を示すフローチヤートで
ある。
１…電子線、４…偏向器、６…試料、７…電流
検出器、８…偏向制御器、９…ドーズ量演算器、
１０…表示器、１３…ＣＲＴ。
FIG. 1 is a block diagram showing the configuration of the present invention, and FIG. 2 is a flowchart showing the processing of the dose amount calculator. DESCRIPTION OF SYMBOLS 1... Electron beam, 4... Deflector, 6... Sample, 7... Current detector, 8... Deflection controller, 9... Dose amount calculator,
10...Display device, 13...CRT.
Claims (1)
縮小し、該電子線束を偏向器により試料上を走査
させ該試料から発生する二次電子信号を検出し像
を結ぶ走査電子顕微鏡において、該電子線束の電
流を検出する電流検出器を有し該偏向器の偏向信
号及び該電流検出器の信号によりドーズ量を算出
する装置を設けたことを特徴とする走査電子顕微
鏡のドーズ量表示装置。 ２ 実用新案登録請求の範囲第１項において、一
画面ごとのドーズ量を算出し表示することを特徴
とする走査電子顕微鏡のドーズ量表示装置。 ３ 実用新案登録請求の範囲第２項において、同
一視野を連続して観察する場合、一画面ごとのド
ーズ量を加算し該視野の総ドーズ量を表示するこ
とを特徴とする走査電子顕微鏡のドーム量表示装
置。[Claims for Utility Model Registration] 1. The electron beam generated by an electron gun is reduced by a reduction lens system, the electron beam is scanned over a sample by a deflector, and the secondary electron signal generated from the sample is detected to form an image. A scanning electron microscope comprising: a current detector for detecting the current of the electron beam; and a device for calculating a dose amount based on a deflection signal from the deflector and a signal from the current detector. Microscope dose display device. 2. A dose amount display device for a scanning electron microscope as set forth in claim 1 of the utility model registration claim, characterized in that the dose amount is calculated and displayed for each screen. 3. A dome of a scanning electron microscope as set forth in paragraph 2 of the claims for utility model registration, characterized in that when the same field of view is observed continuously, the dose for each screen is added up and the total dose of the field of view is displayed. Quantity display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16237084U JPS6177544U (en) | 1984-10-29 | 1984-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16237084U JPS6177544U (en) | 1984-10-29 | 1984-10-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6177544U true JPS6177544U (en) | 1986-05-24 |
Family
ID=30720256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16237084U Pending JPS6177544U (en) | 1984-10-29 | 1984-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6177544U (en) |
-
1984
- 1984-10-29 JP JP16237084U patent/JPS6177544U/ja active Pending
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