JPS6176355U - - Google Patents
Info
- Publication number
- JPS6176355U JPS6176355U JP16042184U JP16042184U JPS6176355U JP S6176355 U JPS6176355 U JP S6176355U JP 16042184 U JP16042184 U JP 16042184U JP 16042184 U JP16042184 U JP 16042184U JP S6176355 U JPS6176355 U JP S6176355U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- groove
- globe
- utility
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16042184U JPS6176355U (zh) | 1984-10-25 | 1984-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16042184U JPS6176355U (zh) | 1984-10-25 | 1984-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176355U true JPS6176355U (zh) | 1986-05-22 |
Family
ID=30718343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16042184U Pending JPS6176355U (zh) | 1984-10-25 | 1984-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176355U (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3630006A (en) * | 1969-11-05 | 1971-12-28 | Antonio A Sandoval | Spiral capillary gas chromatographic column |
| JPS58195149A (ja) * | 1982-04-26 | 1983-11-14 | マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド | 小型ガスクロマトグラフ装置 |
-
1984
- 1984-10-25 JP JP16042184U patent/JPS6176355U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3630006A (en) * | 1969-11-05 | 1971-12-28 | Antonio A Sandoval | Spiral capillary gas chromatographic column |
| JPS58195149A (ja) * | 1982-04-26 | 1983-11-14 | マイクロセンサ−・テクノロジ−・インコ−ポレ−テツド | 小型ガスクロマトグラフ装置 |